Semiconductor micromachining: 2 Techniques and industrial applications
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Chichester [u.a.]
Wiley
1998
|
| Physical Description: | XII, 389 S. Ill., graph. Darst. |
| ISBN: | 0471966827 |
Staff View
MARC
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| id | DE-604.BV012061252 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:20:57Z |
| institution | BVB |
| isbn | 0471966827 |
| language | English |
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| physical | XII, 389 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Wiley |
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| spelling | Semiconductor micromachining 2 Techniques and industrial applications ed. by S. A. Campbell ... Chichester [u.a.] Wiley 1998 XII, 389 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Campbell, Stephen A. Sonstige oth (DE-604)BV012061233 2 |
| spellingShingle | Semiconductor micromachining |
| title | Semiconductor micromachining |
| title_auth | Semiconductor micromachining |
| title_exact_search | Semiconductor micromachining |
| title_full | Semiconductor micromachining 2 Techniques and industrial applications ed. by S. A. Campbell ... |
| title_fullStr | Semiconductor micromachining 2 Techniques and industrial applications ed. by S. A. Campbell ... |
| title_full_unstemmed | Semiconductor micromachining 2 Techniques and industrial applications ed. by S. A. Campbell ... |
| title_short | Semiconductor micromachining |
| title_sort | semiconductor micromachining techniques and industrial applications |
| volume_link | (DE-604)BV012061233 |
| work_keys_str_mv | AT campbellstephena semiconductormicromachining2 |