Semiconductor micromachining: 2 Techniques and industrial applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Chichester [u.a.]
Wiley
1998
|
| Beschreibung: | XII, 389 S. Ill., graph. Darst. |
| ISBN: | 0471966827 |
Internformat
MARC
| LEADER | 00000nam a2200000 cc4500 | ||
|---|---|---|---|
| 001 | BV012061252 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 980716s1998 ad|| |||| 00||| eng d | ||
| 020 | |a 0471966827 |9 0-471-96682-7 | ||
| 035 | |a (OCoLC)312930912 | ||
| 035 | |a (DE-599)BVBBV012061252 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-355 |a DE-91 |a DE-706 |a DE-83 |a DE-522 | ||
| 245 | 1 | 0 | |a Semiconductor micromachining |n 2 |p Techniques and industrial applications |c ed. by S. A. Campbell ... |
| 264 | 1 | |a Chichester [u.a.] |b Wiley |c 1998 | |
| 300 | |a XII, 389 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 700 | 1 | |a Campbell, Stephen A. |e Sonstige |4 oth | |
| 773 | 0 | 8 | |w (DE-604)BV012061233 |g 2 |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008163149 | ||
Datensatz im Suchindex
| _version_ | 1804126658650701824 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV012061252 |
| ctrlnum | (OCoLC)312930912 (DE-599)BVBBV012061252 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00842nam a2200265 cc4500</leader><controlfield tag="001">BV012061252</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">980716s1998 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0471966827</subfield><subfield code="9">0-471-96682-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)312930912</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012061252</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-522</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Semiconductor micromachining</subfield><subfield code="n">2</subfield><subfield code="p">Techniques and industrial applications</subfield><subfield code="c">ed. by S. A. Campbell ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Chichester [u.a.]</subfield><subfield code="b">Wiley</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XII, 389 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Campbell, Stephen A.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="w">(DE-604)BV012061233</subfield><subfield code="g">2</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008163149</subfield></datafield></record></collection> |
| id | DE-604.BV012061252 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:20:57Z |
| institution | BVB |
| isbn | 0471966827 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008163149 |
| oclc_num | 312930912 |
| open_access_boolean | |
| owner | DE-703 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-706 DE-83 DE-522 |
| owner_facet | DE-703 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-706 DE-83 DE-522 |
| physical | XII, 389 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Wiley |
| record_format | marc |
| spelling | Semiconductor micromachining 2 Techniques and industrial applications ed. by S. A. Campbell ... Chichester [u.a.] Wiley 1998 XII, 389 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Campbell, Stephen A. Sonstige oth (DE-604)BV012061233 2 |
| spellingShingle | Semiconductor micromachining |
| title | Semiconductor micromachining |
| title_auth | Semiconductor micromachining |
| title_exact_search | Semiconductor micromachining |
| title_full | Semiconductor micromachining 2 Techniques and industrial applications ed. by S. A. Campbell ... |
| title_fullStr | Semiconductor micromachining 2 Techniques and industrial applications ed. by S. A. Campbell ... |
| title_full_unstemmed | Semiconductor micromachining 2 Techniques and industrial applications ed. by S. A. Campbell ... |
| title_short | Semiconductor micromachining |
| title_sort | semiconductor micromachining techniques and industrial applications |
| volume_link | (DE-604)BV012061233 |
| work_keys_str_mv | AT campbellstephena semiconductormicromachining2 |