Semiconductor micromachining:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Chichester [u.a.]
Wiley
|
| Schlagworte: | |
| ISBN: | 0471980846 |
Internformat
MARC
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| 245 | 1 | 0 | |a Semiconductor micromachining |c ed. by S. A. Campbell ... |
| 264 | 1 | |a Chichester [u.a.] |b Wiley | |
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| 700 | 1 | |a Campbell, Stephen A. |e Sonstige |4 oth | |
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Datensatz im Suchindex
| _version_ | 1804132546974318593 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV012061233 |
| classification_rvk | UP 2800 |
| classification_tum | TEC 025f ELT 270f |
| ctrlnum | (DE-599)BVBBV012061233 |
| discipline | Physik Technik Elektrotechnik |
| format | Book |
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| id | DE-604.BV012061233 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T19:54:33Z |
| institution | BVB |
| isbn | 0471980846 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012635458 |
| open_access_boolean | |
| publishDateSort | 0000 |
| publisher | Wiley |
| record_format | marc |
| spelling | Semiconductor micromachining ed. by S. A. Campbell ... Chichester [u.a.] Wiley txt rdacontent n rdamedia nc rdacarrier Erschienen: 1 - 2 Mikrophysik (DE-588)4169842-3 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf Materialbearbeitung (DE-588)4139082-9 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Materialbearbeitung (DE-588)4139082-9 s Mikrophysik (DE-588)4169842-3 s DE-604 Mikrobearbeitung (DE-588)4582923-8 s Campbell, Stephen A. Sonstige oth |
| spellingShingle | Semiconductor micromachining Mikrophysik (DE-588)4169842-3 gnd Halbleiter (DE-588)4022993-2 gnd Mikrobearbeitung (DE-588)4582923-8 gnd Materialbearbeitung (DE-588)4139082-9 gnd |
| subject_GND | (DE-588)4169842-3 (DE-588)4022993-2 (DE-588)4582923-8 (DE-588)4139082-9 |
| title | Semiconductor micromachining |
| title_auth | Semiconductor micromachining |
| title_exact_search | Semiconductor micromachining |
| title_full | Semiconductor micromachining ed. by S. A. Campbell ... |
| title_fullStr | Semiconductor micromachining ed. by S. A. Campbell ... |
| title_full_unstemmed | Semiconductor micromachining ed. by S. A. Campbell ... |
| title_short | Semiconductor micromachining |
| title_sort | semiconductor micromachining |
| topic | Mikrophysik (DE-588)4169842-3 gnd Halbleiter (DE-588)4022993-2 gnd Mikrobearbeitung (DE-588)4582923-8 gnd Materialbearbeitung (DE-588)4139082-9 gnd |
| topic_facet | Mikrophysik Halbleiter Mikrobearbeitung Materialbearbeitung |
| work_keys_str_mv | AT campbellstephena semiconductormicromachining |