Proceedings of the 9th International Conference on Solid-State Sensors and Actuators: Chicago, IL, USA, 16 - 19 June 1997
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY [u.a.]
Elsevier
1998
|
| Schriftenreihe: | Sensors and actuators / A
66 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Bd. |
| Beschreibung: | IX, 367 S. Ill., graph. Darst. |
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| 111 | 2 | |a International Conference on Solid State Sensors and Actuators |n 9 |d 1997 |c Chicago, Ill. |j Verfasser |0 (DE-588)5266148-9 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the 9th International Conference on Solid-State Sensors and Actuators |b Chicago, IL, USA, 16 - 19 June 1997 |c Transducers '97. Ed.: S. Middelhoek ... |
| 264 | 1 | |a New York, NY [u.a.] |b Elsevier |c 1998 | |
| 300 | |a IX, 367 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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Datensatz im Suchindex
| _version_ | 1804126622929911808 |
|---|---|
| adam_text | SENSORS
ACTUATORS
A
ELSEVIER
Уоіигткбб.
Numbers
І-Л.
I April
1998
PHYSICAL
Contents
General Sensors
Human information sensor
................................................................................................................................
I
K. Morinaka. K. Hashimoto. S. Tanaka.
N.
Yoshiike
Electrofluidic full-system modelling of a flap valve
micropump
based on Kirchhoffian network theory
...................................... 9
P.
Voigt.
G.
Schräg.
G.
Wachutka
Efficient design
and optimization of MEMS by integrating commercial simulation tools
....................................................... 15
O. Nagler. M.
Trost.
В.
Hillerich.
F. Kozlowski
Physical
Sensors
Offset reduction of Hall plates in three different crystal planes
...................................................................................... 23
S. Bellekom, P.M.
Sarro
Miniaturized infrared sensor using silicon diaphragm based on Golay cell
........................................................................ 29
K. Yamashita,
A. Murata,
M.
Okuyama
A surface-acoustic-wave gyro sensor
.................................................................................................................... 33
M
Kurosawa, Y. Fukuda, M. Takasaki. T. Higuchi
The autonomous impact resonator: a new operating principle for a silicon resonant strain gauge
.............................................. 40
J. Bienstman. J. Vandewalle, R. Puers
People-counting system using multisensing application
.............................................................................................. 50
K. Hashimoto. C. Kawaguchi, S. Matsueda.
.
Katsuya Morinaka,
N.
Yoshiike
Electrothermal oscillator for film-thickness monitoring
.............................................................................................. 56
J. Kim, K.D. Wise
A flexible micromachined electrode array for a cochlear prosthesis
................................................................................ 63
Т.Е.
Bell, K.D. Wise,
DJ.
Anderson
A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation
................................... 70
D.
De
Bruyker, A. Cozma, R. Puers
Silicon mirrors and micromirror arrays for spatial laser beam modulation
......................................................................... 76
S. Kurth. R.
Hahn,
С.
Kaufmann,
К.
Kehr,
J.
Mehner.
U.
Wollmann,
W.
Dötzel,
T.
Gessner
The influence of gas-surface interaction on gas-film damping in a silicon accelerometer
....................................................... 83
T. Veijola, H. Kuisma,
J. Lahdenperä
ThePrandtl micro flow sensor (PMFS): a novel silicon diaphragm
capacitive
sensor for flow-velocity measurement
..................... 93
O.
Berberig,
К.
Nottmeyer, J. Mizuno, Y. Kanai, T. Kobayashi
An integrated resonant accelerometer microsystem for automotive applications
................................................................. 99
P. Ohlckers, R. Holm, H. Jakobsen, T. Kvisteroy, G. Kittilsland, A. Larsen, M.
Nese,
S.M. Nilsen,
A. Ferber
New bulk accelerometer for
triaxial
detection
.......................................................................................................... 105
J.A. Plaza, H. Chen, J.
Esteve,
E.
Lora-Tamayo
Gas spectrometry
based on pyroelectric thin-film arrays integrated on silicon
.................................................................... 109
B. Willing, M. Kohli, P.
Murait,
N.
Setter, O. Oehler
All-fibre acousto-optic modulator using ZnO piezoelectric actuators
............................................................................... 114
C.R. Wuethrich, CAP.
Muller, GR. Fox, HG. Limberger
vj¡¡
Contents
New designs
of micromachined vibrating rate gyroscopes with decoupled oscillation modes
.................................................. 118
W.
Geiger.
В.
Folkmer,
U. Sobe,
H.
Sandmaier, W. Lang
Characterization of a novel piezo-tunneling strain sensor
............................................................................................ 125
A.P.
Friedrich.
P.A.
Besse. C.M.A. Ashruf.R.S. Popovic
A conduction-convection design for liquid flow sensing
............................................................................................. 131
L.
Castañer,
V. Jimenez. M.
Domínguez,
F. Masana,
A. Rodríguez
An electroformed
CMOS integrated angular rate sensor
............................................................................................. 138
S.
Chang,
M.
Chia,
P.
Castillo-Borelley.
W. Higdon,
Q.
Jiang,
J.
Johnson,
L.
Obedier.
M.
Putty,
Q.
Shi.
D.
Sparks,
S. Zarabadi
Design and fabrication of micromirror array supported by vertical springs
........................................................................ 144
J.-W. Shin,
S.W.
Chung. Y.-K. Kim, B. Kyoo Choi
A fiber-optic pressure microsensor for
biomedical
applications
..................................................................................... 150
O. Tohyama, M. Kohashi. M. Sugihara, H. ltoh
A vertically integrated media-isolated absolute pressure sensor
..................................................................................... 155
K. Goldman, G. Gritt. I.
Baske«,
W.
Czarnocki, A. Ramirez,
С.
Brown,
D. Hughes, D.
Wallace,
M. Shah
Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and
capacitive
detection
........... 160
T.
Corman,
P. Enoksson. G.
Stemme
Offset reduction in Hall devices by continuous spinning current method
.......................................................................... 167
R.
Steiner.
Ch.
Maier,
A. Hèberli,
F.-P. Steiner,
H. Baltes
Design
of two-dimensional
micromachined gyroscope
by using
nickel
electroplating
...........................................................
1
73
T.
Fujita.
К.
Maenaka, M. Maeda
Vibration
sensor using optical-fiber cantilever with bulb-lens
....................................................................................... 78
M. Kimura, K. Toshima
Error analysis of material parameter determination with quartz-crystal resonators
............................................................... * 184
R. Lucklum,
С
Behling, P.
Hauptmann,
R.W. Černošek, S.J.
Martin
IR
bolometers made of polycry
stalline
silicon germanium
...........................................................................................
1
93
S. Sedky, P.
Fiorini.
M.
Caymax,
Α.
Verbist,
С.
Baert
Operation of
α(6Η)
-SiC pressure sensor at 5O0°C
.................................................................................................... 200
R.S. Okojie.
A.A.
Ned,
A.D.
Kurtz
Design, fabrication and characterization of a highly symmetrical
capacitive
triaxial accelerometer
........................................... 205
J.C.
Lotters.
J.G.
Bomer. A.J. Verloop, E.A. Droog, W. Olthuis, P.H. Veltink,
P. Bergveld
The structures for electrostatic
servo capacitive
vacuum sensors
.................................................................................... 213
Y. Wang. M. Esashi
An
integrated thermopile
structure
with high responsivity using any standard CMOS process
................................................. 218
T. Akin, Z. Olgun, O.
Akar,
H.
Kulah
Metallic profile and coin imaging using an inductive proximity sensor microsystem
............................................................ 225
Ph.A.
Passeraub,
P.-A. Besse,
С
De Raad, O.
Dezuari, F. Quinet, R.S. Popovic
Commercial
vision of silicon-based
inerţial
sensors
.................................................................................................. 231
C.
Song,
M. Shinn
Monolithic pyroelectric infrared image sensor using PVDF thin film
.............................................................................. 237
N.
Fujitsuka. J.
Sakata,
Y.
Miyachi.
К.
Mizuno,
К.
Ohtsuka,
Y.
Taga, O. Tabata
Temperature dependence and drift of a thermal accelerometer
...................................................................................... 244
U.A. Dauderstädt,
P.M.
Sarro, P.J.
French
A bulk-micromachined three-axis accelerometer using silicon direct bonding technology and polysilicon layer
............................ 250
К. К
won, S. Park
Materials and Technology
A model for the etch-stop location on reverse-biased pn
j
unctions
................................................................................. 259
D. Lapadatu. G. Kittilsland, M.
Nese,
S.M.
Nilsen,
H. Jakobsen
Thin-beam bulk micromachining based on
RIE
and xenon difluoride silicon etching
............................................................ 268
R.
Toda,
К.
Minami,
M. Esashi
Eight-beam piezoresistive
accelerometer
fabricated by using a selective porous-silicon etching method
.............................
-73
J.-H. Sim, C.-S. Cho, J.-S. Kim. J.-H. Lee, J.-H. Lee
Cimlťills í
Photolithographic packaging of silicon pressure sensors
............................................................................................ 274
H. Krassow, F. Campabadal. E. Loru-Tamayo
A new contactless electrochemical etch-stop based on a gold/silicon/TMAH galvanic cell
.................................................... 284
C.M.A. Ashruf, P.]. French, P.M.M.C. Bressers. P.M.
Sarro.
J J.
Kelly
Automated assembly of flip-up micromirrors
.......................................................................................................... 242
J.R. Reid,
V.M.
Bright, J.T. Butler
Concave corner compensation between vertical (OIO)-((K)I
)
planes anisotropically etched in Si(
1(10).....................................
2C)9
B. Nikpour, L.M.
Landsberger.
T.J. Hubbard. M. Kahri/i. A. Mimic
A novel deposition technique for fiuorocarbon films and its applications for bulk- and surface-micronuichined devices
...................
ЗОН
Y.
Matsumoto,
К.
Yoshida.
M. Ishida
MicroJoinery
:
concept, definition, and application to microsystem development
................................................................. 315
С
Gonzalez, R.L. Smith, D.G. Howitt,
S.D.
Collins
Interface Electronics and Sensor
CMOS sensor systems
..................................................................................................................................... 335
B.J. Hosticka
Micromechanics
The major part of the Micromechanics papers from Transducers
97
will be published in a special issue later this year.
Surface-micromachined electrostatic microrelay
...................................................................................................... 345
I.
Schiele,
J.
Huber,
В.
Hillerich, F. Kozlowski
Microfluidic
motion generation with acoustic waves
................................................................................................. 355
X. Zhu, E.S. Kim
Author Index of Volume
66.............................................................................................................................. 361
Subject Index of Volume
66.............................................................................................................................. 363
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| spelling | International Conference on Solid State Sensors and Actuators 9 1997 Chicago, Ill. Verfasser (DE-588)5266148-9 aut Proceedings of the 9th International Conference on Solid-State Sensors and Actuators Chicago, IL, USA, 16 - 19 June 1997 Transducers '97. Ed.: S. Middelhoek ... New York, NY [u.a.] Elsevier 1998 IX, 367 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Sensors and actuators / A 66 Einzelaufnahme eines Zeitschr.-Bd. Integrierter Sensor (DE-588)4235815-2 gnd rswk-swf Aktor (DE-588)4198914-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 Chicago Ill. gnd-content Aktor (DE-588)4198914-4 s DE-604 Integrierter Sensor (DE-588)4235815-2 s Middelhoek, S. Sonstige oth Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008138971&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Proceedings of the 9th International Conference on Solid-State Sensors and Actuators Chicago, IL, USA, 16 - 19 June 1997 Integrierter Sensor (DE-588)4235815-2 gnd Aktor (DE-588)4198914-4 gnd |
| subject_GND | (DE-588)4235815-2 (DE-588)4198914-4 (DE-588)1071861417 |
| title | Proceedings of the 9th International Conference on Solid-State Sensors and Actuators Chicago, IL, USA, 16 - 19 June 1997 |
| title_auth | Proceedings of the 9th International Conference on Solid-State Sensors and Actuators Chicago, IL, USA, 16 - 19 June 1997 |
| title_exact_search | Proceedings of the 9th International Conference on Solid-State Sensors and Actuators Chicago, IL, USA, 16 - 19 June 1997 |
| title_full | Proceedings of the 9th International Conference on Solid-State Sensors and Actuators Chicago, IL, USA, 16 - 19 June 1997 Transducers '97. Ed.: S. Middelhoek ... |
| title_fullStr | Proceedings of the 9th International Conference on Solid-State Sensors and Actuators Chicago, IL, USA, 16 - 19 June 1997 Transducers '97. Ed.: S. Middelhoek ... |
| title_full_unstemmed | Proceedings of the 9th International Conference on Solid-State Sensors and Actuators Chicago, IL, USA, 16 - 19 June 1997 Transducers '97. Ed.: S. Middelhoek ... |
| title_short | Proceedings of the 9th International Conference on Solid-State Sensors and Actuators |
| title_sort | proceedings of the 9th international conference on solid state sensors and actuators chicago il usa 16 19 june 1997 |
| title_sub | Chicago, IL, USA, 16 - 19 June 1997 |
| topic | Integrierter Sensor (DE-588)4235815-2 gnd Aktor (DE-588)4198914-4 gnd |
| topic_facet | Integrierter Sensor Aktor Konferenzschrift 1997 Chicago Ill. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008138971&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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