CVD of molybdenum from molybdenum: hexafluoride : kinetics and reactor modelling
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
1997
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| Schlagworte: | |
| Beschreibung: | Eindhoven, Techn., Univ., Proefschr. |
| Beschreibung: | 159 S. Ill., graph. Darst. |
| ISBN: | 9038607687 |
Internformat
MARC
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| 100 | 1 | |a Orij, Edwin Nicolaas |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a CVD of molybdenum from molybdenum |b hexafluoride : kinetics and reactor modelling |c Edwin Nicolaas Orij |
| 264 | 1 | |c 1997 | |
| 300 | |a 159 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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Datensatz im Suchindex
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| author | Orij, Edwin Nicolaas |
| author_facet | Orij, Edwin Nicolaas |
| author_role | aut |
| author_sort | Orij, Edwin Nicolaas |
| author_variant | e n o en eno |
| building | Verbundindex |
| bvnumber | BV012019534 |
| ctrlnum | (OCoLC)68075027 (DE-599)BVBBV012019534 |
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| id | DE-604.BV012019534 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:20:18Z |
| institution | BVB |
| isbn | 9038607687 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008135315 |
| oclc_num | 68075027 |
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| physical | 159 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
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| spelling | Orij, Edwin Nicolaas Verfasser aut CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling Edwin Nicolaas Orij 1997 159 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Eindhoven, Techn., Univ., Proefschr. Chemical vapour deposition gtt Molybdeen gtt (DE-588)4113937-9 Hochschulschrift gnd-content Proefschriften (vorm) gtt |
| spellingShingle | Orij, Edwin Nicolaas CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling Chemical vapour deposition gtt Molybdeen gtt |
| subject_GND | (DE-588)4113937-9 |
| title | CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling |
| title_auth | CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling |
| title_exact_search | CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling |
| title_full | CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling Edwin Nicolaas Orij |
| title_fullStr | CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling Edwin Nicolaas Orij |
| title_full_unstemmed | CVD of molybdenum from molybdenum hexafluoride : kinetics and reactor modelling Edwin Nicolaas Orij |
| title_short | CVD of molybdenum from molybdenum |
| title_sort | cvd of molybdenum from molybdenum hexafluoride kinetics and reactor modelling |
| title_sub | hexafluoride : kinetics and reactor modelling |
| topic | Chemical vapour deposition gtt Molybdeen gtt |
| topic_facet | Chemical vapour deposition Molybdeen Hochschulschrift Proefschriften (vorm) |
| work_keys_str_mv | AT orijedwinnicolaas cvdofmolybdenumfrommolybdenumhexafluoridekineticsandreactormodelling |