Laser assisted microtechnology:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1998
|
| Ausgabe: | 2., updated ed. |
| Schriftenreihe: | Springer series in materials science
19 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XII, 270 S. zahlr. Ill., graph. Darst. |
| ISBN: | 354063973X |
Internformat
MARC
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|---|---|---|---|
| 001 | BV011985169 | ||
| 003 | DE-604 | ||
| 005 | 20130604 | ||
| 007 | t | ||
| 008 | 980526s1998 gw ad|| |||| 00||| eng d | ||
| 016 | 7 | |a 953721035 |2 DE-101 | |
| 020 | |a 354063973X |c Pp. : DM 108.00 |9 3-540-63973-X | ||
| 035 | |a (OCoLC)313451104 | ||
| 035 | |a (DE-599)BVBBV011985169 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-703 |a DE-29T |a DE-92 |a DE-91 |a DE-898 |a DE-1051 |a DE-634 |a DE-83 |a DE-188 | ||
| 084 | |a UH 5750 |0 (DE-625)145705: |2 rvk | ||
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| 084 | |a ZN 4150 |0 (DE-625)157360: |2 rvk | ||
| 084 | |a FER 729f |2 stub | ||
| 084 | |a FER 786f |2 stub | ||
| 084 | |a FER 299f |2 stub | ||
| 100 | 1 | |a Metev, Simeon M. |d 1947- |e Verfasser |0 (DE-588)120188252 |4 aut | |
| 245 | 1 | 0 | |a Laser assisted microtechnology |c Simeon M. Metev ; Vadim P. Veiko |
| 246 | 1 | 3 | |a Laser-assisted microtechnology |
| 250 | |a 2., updated ed. | ||
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 1998 | |
| 300 | |a XII, 270 S. |b zahlr. Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Springer series in materials science |v 19 | |
| 650 | 0 | 7 | |a Laserbearbeitung |0 (DE-588)4139080-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Laser |0 (DE-588)4034610-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Laser |0 (DE-588)4034610-9 |D s |
| 689 | 0 | 1 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 1 | 1 | |a Laserbearbeitung |0 (DE-588)4139080-5 |D s |
| 689 | 1 | 2 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Laserbearbeitung |0 (DE-588)4139080-5 |D s |
| 689 | 2 | 1 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 2 | |5 DE-604 | |
| 700 | 1 | |a Vejko, Vadim P. |d 1940- |e Verfasser |0 (DE-588)120188260 |4 aut | |
| 830 | 0 | |a Springer series in materials science |v 19 |w (DE-604)BV000683335 |9 19 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008110312&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-008110312 | |
Datensatz im Suchindex
| _version_ | 1807953560172756992 |
|---|---|
| adam_text |
CONTENTS
1.
INTRODUCTION
.
1
1.1
LASER-ASSISTED
THIN-FILM
MICROMACHINING
.
1
1.2
LASER-ASSISTED
MICROPROCESSING
AND
MODIFICATION
OF
MATERIALS
.
3
1.3
LASER
MICROPATTERNING
.
4
1.4
PULSED
LASER-PLASMA
DEPOSITION
OF
THIN
FILMS
.
5
2.
LASER-BASED
EQUIPMENT
FOR
MICROTECHNOLOGY
.
6
2.1
PRINCIPAL
DESIGN
OF
LASER-BASED
MICROTECHNOLOGICAL
EQUIPMENT
.
6
2.2
LASERS
USED
IN
MICROTECHNOLOGICAL
SYSTEMS
.
7
2.2.1
LASERS
FOR
THIN-FILM
MACHINING
.
7
2.2.2
LASERS
FOR
MICROWELDING
AND
MICROSHAPING
.
9
2.2.3
LASERS
FOR
MICROLITHOGRAPHY
(MICROPATTERNING)
.
10
2.3
OPTICAL
ARRANGEMENT
OF
THE
ENERGY
BEAM
LINE
.
11
2.3.1
THE
BEAM-CONTOUR
(FOCUSING)
TECHNIQUE
.
11
2.3.2
THE
PROJECTION
TECHNIQUE
.
14
2.3.3
THE
CONTOUR-PROJECTION
TECHNIQUE
.
18
2.3.4
THE
ACTIVE
PROJECTION
TECHNIQUE
.
21
2.3.5
REMARKS
ON
THE
ROLE
OF
LIGHT
COHERENCE
.
24
2.4
LASER-BEAM
TRAJECTORY
CONTROL
.
26
2.5
OPTICAL
ARRANGEMENT
OF
THE
VISUAL
CHANNEL
.
29
3.
LASER
MICROMACHINING
OF
THIN
FILMS
.
34
3.1
PHYSICS
OF
LASER-INDUCED
THIN-FILM
TREATMENT
.
34
3.1.1
FILM
HEATING
UNDER
THE
ACTION
OF
LASER
RADIATION
.
34
A)
ABSORPTION
AND
TRANSFORMATION
OF
BEAM
ENERGY
.
34
B)
FILM
TEMPERATURE
.
35
C)
HEAT
TRANSFER
TO
THE
SUBSTRATE
.
38
D)
LATERAL
HEAT
TRANSFER
(IN
THE
FILM)
.
39
E)
FILM-TO-SUBSTRATE
ADHESION
.
41
F)
HEATING
NON-UNIFORMITY
ALONG
THE
FILM
THICKNESS
.
.
42
G)
TRANSVERSE
NON-UNIFORMITY
OF
THE
LIGHT-BEAM
INTENSITY
DISTRIBUTION
.
42
H)
TEMPERATURE
DEPENDENCE
OF
THE
ABSORBANCE
.
43
I)
TEMPORAL
VARIATIONS
OF
THE
LIGHT
FLUX
DENSITY
.
44
J)
COOLING
OF
THIN
FILMS
.
45
3.1.2
FILM
REMOVAL
UNDER
THE
ACTION
OF
LASER
RADIATION
.
46
A)
QUALITATIVE
DISCUSSION
.
46
B)
THEORETICAL
ANALYSIS
OF
THE
REMOVAL
PROCESS
.
48
C)
PHENOMENOLOGICAL
T
WO-PHASE
REMOVAL
MODEL
.
51
D)
EXPERIMENTAL
INVESTIGATION
OF
TAF
REMOVAL
PROCESS
.
52
3.2
ACCURACY
AND
QUALITY
OF
LASER
THIN-FILM
MICROMACHINING
.
55
3.2.1
THERMAL
DISTORTIONS
.
56
3.2.2
HYDRODYNAMIC
DISTORTIONS
.
58
3.2.3
CHANGES
OF
SUBSTRATE
PROPERTIES
DUERING
LASER
THIN
FILM
TREATMENT
.
61
A)
SOURCES
OF
CRACKS
FORMATION
.
61
B)
MELTING
OF
THE
SUBSTRATE
SURFACE
LAYERS
.
64
3.3
TECHNOLOGICAL
PROCESSES
IN
LASER
THIN-FILM
MACHINING
.
66
3.3.1
TRIMMING
OF
THIN
FILM
COMPONENTS
.
67
A)
PARAMETER
TRIMMING
AND
REPAIR
OF
HYBRID
INTEGRATED
CIRCUITS
.
67
B)
TUNING
OF
QUARTZ
PIEZOELEMENTS
.
75
C)
FUNCTIONAL
TRIMMING
OF
THIN
FILM
CIRCUITS
.
80
3.3.2
SHAPING
OF
THIN
FILMS
.
83
A)
PHOTOMASK
REPAIR
.
83
B)
PREPARATION
OF
PASSIVE
FILM
CIRCUITS
.
86
C)
MICROMARKING
OF
FILM
COMPONENTS
.
87
3.3.3
INFORMATION
RECORDING
BY
A
LASER
.
88
A)
DIGITAL
DISC
INFORMATION
RECORDING
.
88
B)
ANALOG
DATA
RECORDING
.
97
4.
LOCAL
LASER-INDUCED
HEAT
TREATMENT
.
100
4.1
LASER
HEATING
OF
ABSORBING
MATERIALS
.
100
4.1.1
OVERALL
CHARACTERISTICS
OF
THE
NON-DEMAGING
HEATING
.
100
4.1.2
EXCITATION
OF
SURFACE
ELECTROMAGNETIC
WAVES
AND
FORMATION
OF
PERIODIC
SURFACE
STRUCTURES
.
107
4.2
APPLICATIONS
OF
LASER
HEATING
.
108
4.2.1
LASER-ASSISTED
HARDENING
.
109
4.2.2
LOCAL
LASER
ALLOYING
.
111
4.2.3
LOCAL
LASER-INDUCED
SYNTHESIS
OF
COMPOUNDS
.
114
4.2.4
LASER
ANNEALING
OF
LON-IMPLANTED
SEMICONDUCTORS
.
117
A)
CHARACTERISTICS
OF
LASER
ANNEALING
.
118
B)
MECHANISMS
OF
LASER
ANNEALING
.
127
C)
LASER
ANNEALING
CAPABILITIES
AS
COMPARED
WITH
OTHER
METHODS
.
129
5.
LASER
MELTING
AND
MICROWELDING
.
132
5.1
CHARACTERISTICS
OF
THE
LASER-INDUCED
MELTING
PROCESS
.
133
5.2
LASER-SPOT
MICROWELDING
.
137
5.2.1
WIRE
WELDING
.
137
5.2.2
WIRE
WELDING
TO
CONTACT
PLATES
.
140
5.2.3
WIRE
WELDING
TO
THIN
FILMS
.
142
5.2.4
WELDING
OF
THIN
SHEETS
.
144
5.2.5
LASER
MELT-ALLOYING
OF
METAL-TO-SEMICONDUCTOR
CONTACTS
146
5.3
LASER
SEAM-WELDING
.
149
5.4
FACTORS
AFFECTING
THE
LASER-WELDING
RESULTS
.
153
6.
LASER
MICROSHAPING
.
157
6.1
LASER
HOLE-DRILLING
.
157
6.1.1
THE
PROCESS
OF
MATERIAL
REMOVAL
IN
LASER
HOLE-DRILLING
157
6.1.2
RELATIONSHIPS
FOR
THE
HOLE
FORMATION
IN
ABSORBING
MEDIA
161
6.1.3
ACCURACY
AND
REPRODUCIBILITY
IN
SINGLE
LASER-PULSE
HOLE-DRILLING
.
164
A)
USING
A
PULSE
OF
PREDETERMINED
SHAPE
AND
STRUCTURE
.
166
B)
USING
THE
PROJECTION
TECHNIQUE
.
168
C)
PROCESSING
IN
A
CYLINIDRICAL
LIGHT
TUBE
.
168
D)
ADDITIONAL
MEANS
AND
PROCEDURES
INCREASING
THE
TREATMENT
PRECISION
.
169
E)
MULTIPLE-PULSE
HOLE
DRILLING
.
170
6.2
LASER-DRIVEN
MATERIALS
SEPARATION
.
175
6.2.1
LASER
CUTTING
.
175
6.2.2
LASER
SCRIBING
.
179
6.2.3
LASER
THERMAL
CLEAVING
.
183
7.
MASKLESS
LASER
MICROPATTERNING
.
187
7.1
THERMOCHEMICAL
METHODS
FOR
LASER
PATTERNING
.
187
7.1.1
LASER-INDUCED
OXIDATION
OF
THIN
METAL
FILMS
.
188
A)
OXIDATION
LITHOGRAPHY.
ACCURACY
AND
RESOLUTION
.
189
B)
APPLICATION
OF
OXIDATION
LITHOGRAPHY
.
195
7.1.2
LASER-INDUCED
REDUCTION
OF
METAL
OXIDES
.
196
7.1.3
LASER-INDUCED
THERMAL
DECOMPOSITION
OF
ORGANOMETALLIC
COMPOUNDS
.
199
A)
THERMAL
DECOMPOSITION
OF
SOLID-PHASE
OMC
.
199
B)
THERMAL
DECOMPOSITION
OF
GAS-PHASE
OMC
.
204
7.1.4
LASER-INDUCED
LIQUID-PHASE
ELECTROCHEMICAL
DEPOSITION
AND
ETCHING
.
208
A)
DEPOSITION
.
208
B)
ETCHING
.
210
7.1.5
THERMOCHEMICAL
ACTION
OF
LASER
RADIATION
ON
POLYMER
MATERIALS
.
217
7.2
PHOTOCHEMICAL
METHODS
OF
LASER
PATTERNING
.
220
7.2.1
LASER-INDUCED
PHOTO-DECOMPOSITION
OF
GAS-PHASE
ORGANOMETALLIC
COMPOUNDS
.
221
7.2.2
SELECTIVE
LASER-ASSISTED
PHOTO-ETCHING
.
224
8.
PULSED
LASER-PLASMA
DEPOSITION
OF
THIN
FILMS,
AND
FILM
STRUCTURES
.
228
8.1
ESSENTIALS
OF
THE
PULSED-LASER
PLASMA-DEPOSITION
TECHNIQUE
.
228
8.2
CHARACTERISTICS
OF
THE
PULSED-LASER
PLASMA-DEPOSITION
PROCESS
.
230
8.2.1
LASER
RADIATION
INTERACTION
WITH
THE
TARGET
.
230
A)
FREE-RUNNING
MODE
.
230
B)
Q-SWITCHED
MODE
.
231
8.2.2
INERTIAL
EXPENSION
OF
LASER-ABLATION
PRODUCTS
.
232
8.2.3
PLASMA-SUBSTRATE
INTERACTION
.
234
8.2.4
GROWTH
MECHANISM
AND
FILM
PROPERTIES
.
236
8.3
TYPICAL
APPLICATIONS
OF
THE
PULSED-LASER
PLASMA-DEPOSITION
METHOD
.
241
A)
DEPOSITION
OF
METALS
.
242
B)
SYNTHESIS
OF
POLYCOMPONENT
THIN
FILMS
.
243
C)
LASER-PLASMA
DEPOSITION
OF
MULTILAYER
STRUCTURES
.
.
244
REFERENCES
.
247
SUBJECT
INDEX
.
269 |
| any_adam_object | 1 |
| author | Metev, Simeon M. 1947- Vejko, Vadim P. 1940- |
| author_GND | (DE-588)120188252 (DE-588)120188260 |
| author_facet | Metev, Simeon M. 1947- Vejko, Vadim P. 1940- |
| author_role | aut aut |
| author_sort | Metev, Simeon M. 1947- |
| author_variant | s m m sm smm v p v vp vpv |
| building | Verbundindex |
| bvnumber | BV011985169 |
| classification_rvk | UH 5750 UQ 8100 ZN 4150 |
| classification_tum | FER 729f FER 786f FER 299f |
| ctrlnum | (OCoLC)313451104 (DE-599)BVBBV011985169 |
| discipline | Physik Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2., updated ed. |
| format | Book |
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| id | DE-604.BV011985169 |
| illustrated | Illustrated |
| indexdate | 2024-08-21T00:07:55Z |
| institution | BVB |
| isbn | 354063973X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008110312 |
| oclc_num | 313451104 |
| open_access_boolean | |
| owner | DE-703 DE-29T DE-92 DE-91 DE-BY-TUM DE-898 DE-BY-UBR DE-1051 DE-634 DE-83 DE-188 |
| owner_facet | DE-703 DE-29T DE-92 DE-91 DE-BY-TUM DE-898 DE-BY-UBR DE-1051 DE-634 DE-83 DE-188 |
| physical | XII, 270 S. zahlr. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in materials science |
| series2 | Springer series in materials science |
| spelling | Metev, Simeon M. 1947- Verfasser (DE-588)120188252 aut Laser assisted microtechnology Simeon M. Metev ; Vadim P. Veiko Laser-assisted microtechnology 2., updated ed. Berlin [u.a.] Springer 1998 XII, 270 S. zahlr. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in materials science 19 Laserbearbeitung (DE-588)4139080-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Laser (DE-588)4034610-9 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Laser (DE-588)4034610-9 s Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Laserbearbeitung (DE-588)4139080-5 s Dünnschichttechnik (DE-588)4136339-5 s Vejko, Vadim P. 1940- Verfasser (DE-588)120188260 aut Springer series in materials science 19 (DE-604)BV000683335 19 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008110312&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Metev, Simeon M. 1947- Vejko, Vadim P. 1940- Laser assisted microtechnology Springer series in materials science Laserbearbeitung (DE-588)4139080-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Laser (DE-588)4034610-9 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4139080-5 (DE-588)4221617-5 (DE-588)4034610-9 (DE-588)4136339-5 |
| title | Laser assisted microtechnology |
| title_alt | Laser-assisted microtechnology |
| title_auth | Laser assisted microtechnology |
| title_exact_search | Laser assisted microtechnology |
| title_full | Laser assisted microtechnology Simeon M. Metev ; Vadim P. Veiko |
| title_fullStr | Laser assisted microtechnology Simeon M. Metev ; Vadim P. Veiko |
| title_full_unstemmed | Laser assisted microtechnology Simeon M. Metev ; Vadim P. Veiko |
| title_short | Laser assisted microtechnology |
| title_sort | laser assisted microtechnology |
| topic | Laserbearbeitung (DE-588)4139080-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Laser (DE-588)4034610-9 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | Laserbearbeitung Mikrosystemtechnik Laser Dünnschichttechnik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008110312&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000683335 |
| work_keys_str_mv | AT metevsimeonm laserassistedmicrotechnology AT vejkovadimp laserassistedmicrotechnology |