Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry: Charleston, South Carolina, USA ; May 12 - 15, 1997
Gespeichert in:
Körperschaft: | |
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Format: | Tagungsbericht Buch |
Sprache: | English |
Veröffentlicht: |
Amsterdam u.a.
Elsevier
1998
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Schriftenreihe: | Thin solid films
313/314 |
Schlagworte: | |
Beschreibung: | Einzelaufnahme eines Zeitschr.-Bd. |
Beschreibung: | XIII, 850 S. Ill., graph. Darst. |
Internformat
MARC
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111 | 2 | |a International Conference on Spectroscopic Ellipsometry |n 2 |d 1997 |c Charleston, SC |j Verfasser |0 (DE-588)5288742-X |4 aut | |
245 | 1 | 0 | |a Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry |b Charleston, South Carolina, USA ; May 12 - 15, 1997 |c guest eds.: R. W. Collins ... |
246 | 1 | 3 | |a Spectroscopic ellipsometry |
264 | 1 | |a Amsterdam u.a. |b Elsevier |c 1998 | |
300 | |a XIII, 850 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
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490 | 0 | |a Thin solid films |v 313/314 | |
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655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1997 |z Charleston SC |2 gnd-content | |
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Datensatz im Suchindex
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any_adam_object | |
author_corporate | International Conference on Spectroscopic Ellipsometry Charleston, SC |
author_corporate_role | aut |
author_facet | International Conference on Spectroscopic Ellipsometry Charleston, SC |
author_sort | International Conference on Spectroscopic Ellipsometry Charleston, SC |
building | Verbundindex |
bvnumber | BV011947300 |
classification_tum | PHY 120f MSR 372f |
ctrlnum | (OCoLC)263869921 (DE-599)BVBBV011947300 |
discipline | Physik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik |
format | Conference Proceeding Book |
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genre | (DE-588)1071861417 Konferenzschrift 1997 Charleston SC gnd-content |
genre_facet | Konferenzschrift 1997 Charleston SC |
id | DE-604.BV011947300 |
illustrated | Illustrated |
indexdate | 2024-07-09T18:18:59Z |
institution | BVB |
institution_GND | (DE-588)5288742-X |
language | English |
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owner_facet | DE-384 |
physical | XIII, 850 S. Ill., graph. Darst. |
publishDate | 1998 |
publishDateSearch | 1998 |
publishDateSort | 1998 |
publisher | Elsevier |
record_format | marc |
series2 | Thin solid films |
spelling | International Conference on Spectroscopic Ellipsometry 2 1997 Charleston, SC Verfasser (DE-588)5288742-X aut Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry Charleston, South Carolina, USA ; May 12 - 15, 1997 guest eds.: R. W. Collins ... Spectroscopic ellipsometry Amsterdam u.a. Elsevier 1998 XIII, 850 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Thin solid films 313/314 Einzelaufnahme eines Zeitschr.-Bd. Spektroskopie (DE-588)4056138-0 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 Charleston SC gnd-content Spektroskopie (DE-588)4056138-0 s Ellipsometrie (DE-588)4152025-7 s DE-604 Collins, Robert W. Sonstige oth |
spellingShingle | Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry Charleston, South Carolina, USA ; May 12 - 15, 1997 Spektroskopie (DE-588)4056138-0 gnd Ellipsometrie (DE-588)4152025-7 gnd |
subject_GND | (DE-588)4056138-0 (DE-588)4152025-7 (DE-588)1071861417 |
title | Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry Charleston, South Carolina, USA ; May 12 - 15, 1997 |
title_alt | Spectroscopic ellipsometry |
title_auth | Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry Charleston, South Carolina, USA ; May 12 - 15, 1997 |
title_exact_search | Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry Charleston, South Carolina, USA ; May 12 - 15, 1997 |
title_full | Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry Charleston, South Carolina, USA ; May 12 - 15, 1997 guest eds.: R. W. Collins ... |
title_fullStr | Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry Charleston, South Carolina, USA ; May 12 - 15, 1997 guest eds.: R. W. Collins ... |
title_full_unstemmed | Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry Charleston, South Carolina, USA ; May 12 - 15, 1997 guest eds.: R. W. Collins ... |
title_short | Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry |
title_sort | proceedings of the 2nd international conference on spectroscopic ellipsometry charleston south carolina usa may 12 15 1997 |
title_sub | Charleston, South Carolina, USA ; May 12 - 15, 1997 |
topic | Spektroskopie (DE-588)4056138-0 gnd Ellipsometrie (DE-588)4152025-7 gnd |
topic_facet | Spektroskopie Ellipsometrie Konferenzschrift 1997 Charleston SC |
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