Microlithography and metrology in micromachining: 23 - 24 October 1995 Austin, Texas
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
1995
|
| Series: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
2640 |
| Subjects: | |
| Physical Description: | IXVI, 246 S. Ill., graph. Darst. |
Staff View
MARC
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Record in the Search Index
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| genre | (DE-588)1071861417 Konferenzschrift 24.10.1995-25.10.1995 Austin, Tex. gnd-content |
| genre_facet | Konferenzschrift 24.10.1995-25.10.1995 Austin, Tex. |
| id | DE-604.BV011749294 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:15:08Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007927869 |
| oclc_num | 33310898 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | IXVI, 246 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | SPIE |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Michael T,. Postek chair/ed. Bellingham, Wash. SPIE 1995 IXVI, 246 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 2640 Measurement Congresses Microlithography Congresses Micromachining Congresses Metrologie (DE-588)4169749-2 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 24.10.1995-25.10.1995 Austin, Tex. gnd-content Mikromechanik (DE-588)4205811-9 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Metrologie (DE-588)4169749-2 s Postek, Michael T. Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 2640 (DE-604)BV000010887 2640 |
| spellingShingle | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Measurement Congresses Microlithography Congresses Micromachining Congresses Metrologie (DE-588)4169749-2 gnd Mikromechanik (DE-588)4205811-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4169749-2 (DE-588)4205811-9 (DE-588)4191584-7 (DE-588)1071861417 |
| title | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas |
| title_auth | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas |
| title_exact_search | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas |
| title_full | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Michael T,. Postek chair/ed. |
| title_fullStr | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Michael T,. Postek chair/ed. |
| title_full_unstemmed | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Michael T,. Postek chair/ed. |
| title_short | Microlithography and metrology in micromachining |
| title_sort | microlithography and metrology in micromachining 23 24 october 1995 austin texas |
| title_sub | 23 - 24 October 1995 Austin, Texas |
| topic | Measurement Congresses Microlithography Congresses Micromachining Congresses Metrologie (DE-588)4169749-2 gnd Mikromechanik (DE-588)4205811-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Measurement Congresses Microlithography Congresses Micromachining Congresses Metrologie Mikromechanik Lithografie Halbleitertechnologie Konferenzschrift 24.10.1995-25.10.1995 Austin, Tex. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT postekmichaelt microlithographyandmetrologyinmicromachining2324october1995austintexas |