Microlithography and metrology in micromachining: 23 - 24 October 1995 Austin, Texas
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1995
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
2640 |
| Schlagworte: | |
| Beschreibung: | IXVI, 246 S. Ill., graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Microlithography and metrology in micromachining |b 23 - 24 October 1995 Austin, Texas |c Michael T,. Postek chair/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1995 | |
| 300 | |a IXVI, 246 S. |b Ill., graph. Darst. | ||
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| 490 | 1 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |v 2640 | |
| 650 | 4 | |a Measurement |v Congresses | |
| 650 | 4 | |a Microlithography |v Congresses | |
| 650 | 4 | |a Micromachining |v Congresses | |
| 650 | 0 | 7 | |a Metrologie |0 (DE-588)4169749-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 24.10.1995-25.10.1995 |z Austin, Tex. |2 gnd-content | |
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| 689 | 1 | 1 | |a Metrologie |0 (DE-588)4169749-2 |D s |
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Datensatz im Suchindex
| _version_ | 1804126292162904064 |
|---|---|
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| callnumber-subject | TJ - Mechanical Engineering and Machinery |
| ctrlnum | (OCoLC)33310898 (DE-599)BVBBV011749294 |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 24.10.1995-25.10.1995 Austin, Tex. gnd-content |
| genre_facet | Konferenzschrift 24.10.1995-25.10.1995 Austin, Tex. |
| id | DE-604.BV011749294 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:15:08Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007927869 |
| oclc_num | 33310898 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | IXVI, 246 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | SPIE |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Michael T,. Postek chair/ed. Bellingham, Wash. SPIE 1995 IXVI, 246 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 2640 Measurement Congresses Microlithography Congresses Micromachining Congresses Metrologie (DE-588)4169749-2 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 24.10.1995-25.10.1995 Austin, Tex. gnd-content Mikromechanik (DE-588)4205811-9 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Metrologie (DE-588)4169749-2 s Postek, Michael T. Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 2640 (DE-604)BV000010887 2640 |
| spellingShingle | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Measurement Congresses Microlithography Congresses Micromachining Congresses Metrologie (DE-588)4169749-2 gnd Mikromechanik (DE-588)4205811-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4169749-2 (DE-588)4205811-9 (DE-588)4191584-7 (DE-588)1071861417 |
| title | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas |
| title_auth | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas |
| title_exact_search | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas |
| title_full | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Michael T,. Postek chair/ed. |
| title_fullStr | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Michael T,. Postek chair/ed. |
| title_full_unstemmed | Microlithography and metrology in micromachining 23 - 24 October 1995 Austin, Texas Michael T,. Postek chair/ed. |
| title_short | Microlithography and metrology in micromachining |
| title_sort | microlithography and metrology in micromachining 23 24 october 1995 austin texas |
| title_sub | 23 - 24 October 1995 Austin, Texas |
| topic | Measurement Congresses Microlithography Congresses Micromachining Congresses Metrologie (DE-588)4169749-2 gnd Mikromechanik (DE-588)4205811-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Measurement Congresses Microlithography Congresses Micromachining Congresses Metrologie Mikromechanik Lithografie Halbleitertechnologie Konferenzschrift 24.10.1995-25.10.1995 Austin, Tex. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT postekmichaelt microlithographyandmetrologyinmicromachining2324october1995austintexas |