APA (7th ed.) Citation

(1995). Microlithography and metrology in micromachining: 23 - 24 October 1995 Austin, Texas. SPIE.

Chicago Style (17th ed.) Citation

Microlithography and Metrology in Micromachining: 23 - 24 October 1995 Austin, Texas. Bellingham, Wash: SPIE, 1995.

MLA (9th ed.) Citation

Microlithography and Metrology in Micromachining: 23 - 24 October 1995 Austin, Texas. SPIE, 1995.

Warning: These citations may not always be 100% accurate.