Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method:
Gespeichert in:
1. Verfasser: | |
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Format: | Buch |
Sprache: | German |
Veröffentlicht: |
1997
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Schlagworte: | |
Online-Zugang: | Inhaltsverzeichnis |
Beschreibung: | Erlangen, Nürnberg, Univ., Diss., 1997 |
Beschreibung: | XXV, 146 S. Ill., graph. Darst. |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV011699788 | ||
003 | DE-604 | ||
005 | 19980421 | ||
007 | t | ||
008 | 971218s1997 gw ad|| m||| 00||| ger d | ||
016 | 7 | |a 951636111 |2 DE-101 | |
035 | |a (OCoLC)614194074 | ||
035 | |a (DE-599)BVBBV011699788 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a ger | |
044 | |a gw |c DE | ||
049 | |a DE-12 |a DE-29 |a DE-29T |a DE-83 | ||
084 | |a UP 7550 |0 (DE-625)146434: |2 rvk | ||
100 | 1 | |a Wei, Mau-Kuo |d 1965- |e Verfasser |0 (DE-588)115736212 |4 aut | |
245 | 1 | 0 | |a Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method |c vorgelegt von Mau-Kuo Wei |
264 | 1 | |c 1997 | |
300 | |a XXV, 146 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
500 | |a Erlangen, Nürnberg, Univ., Diss., 1997 | ||
650 | 0 | 7 | |a Excimerlaser |0 (DE-588)4153300-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Abscheidung |0 (DE-588)4141100-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Xenonchloridlaser |0 (DE-588)4222246-1 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Diamant |0 (DE-588)4012069-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Kohlenstoff |0 (DE-588)4164538-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a PVD-Verfahren |0 (DE-588)4115673-0 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
689 | 0 | 0 | |a Diamant |0 (DE-588)4012069-7 |D s |
689 | 0 | 1 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
689 | 0 | 2 | |a PVD-Verfahren |0 (DE-588)4115673-0 |D s |
689 | 0 | 3 | |a Xenonchloridlaser |0 (DE-588)4222246-1 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Diamant |0 (DE-588)4012069-7 |D s |
689 | 1 | 1 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
689 | 1 | 2 | |a Kohlenstoff |0 (DE-588)4164538-8 |D s |
689 | 1 | 3 | |a Abscheidung |0 (DE-588)4141100-6 |D s |
689 | 1 | 4 | |a Excimerlaser |0 (DE-588)4153300-8 |D s |
689 | 1 | |5 DE-604 | |
856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007889758&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
999 | |a oai:aleph.bib-bvb.de:BVB01-007889758 |
Datensatz im Suchindex
_version_ | 1804126237870784512 |
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any_adam_object | 1 |
author | Wei, Mau-Kuo 1965- |
author_GND | (DE-588)115736212 |
author_facet | Wei, Mau-Kuo 1965- |
author_role | aut |
author_sort | Wei, Mau-Kuo 1965- |
author_variant | m k w mkw |
building | Verbundindex |
bvnumber | BV011699788 |
classification_rvk | UP 7550 |
ctrlnum | (OCoLC)614194074 (DE-599)BVBBV011699788 |
discipline | Physik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02207nam a2200529 c 4500</leader><controlfield tag="001">BV011699788</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19980421 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">971218s1997 gw ad|| m||| 00||| ger d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">951636111</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)614194074</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011699788</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-29</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7550</subfield><subfield code="0">(DE-625)146434:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Wei, Mau-Kuo</subfield><subfield code="d">1965-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)115736212</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method</subfield><subfield code="c">vorgelegt von Mau-Kuo Wei</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1997</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XXV, 146 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Erlangen, Nürnberg, Univ., Diss., 1997</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Abscheidung</subfield><subfield code="0">(DE-588)4141100-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Xenonchloridlaser</subfield><subfield code="0">(DE-588)4222246-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Diamant</subfield><subfield code="0">(DE-588)4012069-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Kohlenstoff</subfield><subfield code="0">(DE-588)4164538-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Diamant</subfield><subfield code="0">(DE-588)4012069-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Xenonchloridlaser</subfield><subfield code="0">(DE-588)4222246-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Diamant</subfield><subfield code="0">(DE-588)4012069-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Kohlenstoff</subfield><subfield code="0">(DE-588)4164538-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="3"><subfield code="a">Abscheidung</subfield><subfield code="0">(DE-588)4141100-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="4"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007889758&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-007889758</subfield></datafield></record></collection> |
genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
genre_facet | Hochschulschrift |
id | DE-604.BV011699788 |
illustrated | Illustrated |
indexdate | 2024-07-09T18:14:16Z |
institution | BVB |
language | German |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007889758 |
oclc_num | 614194074 |
open_access_boolean | |
owner | DE-12 DE-29 DE-29T DE-83 |
owner_facet | DE-12 DE-29 DE-29T DE-83 |
physical | XXV, 146 S. Ill., graph. Darst. |
publishDate | 1997 |
publishDateSearch | 1997 |
publishDateSort | 1997 |
record_format | marc |
spelling | Wei, Mau-Kuo 1965- Verfasser (DE-588)115736212 aut Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method vorgelegt von Mau-Kuo Wei 1997 XXV, 146 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Erlangen, Nürnberg, Univ., Diss., 1997 Excimerlaser (DE-588)4153300-8 gnd rswk-swf Abscheidung (DE-588)4141100-6 gnd rswk-swf Xenonchloridlaser (DE-588)4222246-1 gnd rswk-swf Diamant (DE-588)4012069-7 gnd rswk-swf Kohlenstoff (DE-588)4164538-8 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Diamant (DE-588)4012069-7 s Dünne Schicht (DE-588)4136925-7 s PVD-Verfahren (DE-588)4115673-0 s Xenonchloridlaser (DE-588)4222246-1 s DE-604 Kohlenstoff (DE-588)4164538-8 s Abscheidung (DE-588)4141100-6 s Excimerlaser (DE-588)4153300-8 s DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007889758&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Wei, Mau-Kuo 1965- Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method Excimerlaser (DE-588)4153300-8 gnd Abscheidung (DE-588)4141100-6 gnd Xenonchloridlaser (DE-588)4222246-1 gnd Diamant (DE-588)4012069-7 gnd Kohlenstoff (DE-588)4164538-8 gnd Dünne Schicht (DE-588)4136925-7 gnd PVD-Verfahren (DE-588)4115673-0 gnd |
subject_GND | (DE-588)4153300-8 (DE-588)4141100-6 (DE-588)4222246-1 (DE-588)4012069-7 (DE-588)4164538-8 (DE-588)4136925-7 (DE-588)4115673-0 (DE-588)4113937-9 |
title | Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method |
title_auth | Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method |
title_exact_search | Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method |
title_full | Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method vorgelegt von Mau-Kuo Wei |
title_fullStr | Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method vorgelegt von Mau-Kuo Wei |
title_full_unstemmed | Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method vorgelegt von Mau-Kuo Wei |
title_short | Diamond like carbon (DLC) films deposited using XeCI-excimer laser with laser assisted physical vapour deposition (LPVD) method |
title_sort | diamond like carbon dlc films deposited using xeci excimer laser with laser assisted physical vapour deposition lpvd method |
topic | Excimerlaser (DE-588)4153300-8 gnd Abscheidung (DE-588)4141100-6 gnd Xenonchloridlaser (DE-588)4222246-1 gnd Diamant (DE-588)4012069-7 gnd Kohlenstoff (DE-588)4164538-8 gnd Dünne Schicht (DE-588)4136925-7 gnd PVD-Verfahren (DE-588)4115673-0 gnd |
topic_facet | Excimerlaser Abscheidung Xenonchloridlaser Diamant Kohlenstoff Dünne Schicht PVD-Verfahren Hochschulschrift |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007889758&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
work_keys_str_mv | AT weimaukuo diamondlikecarbondlcfilmsdepositedusingxeciexcimerlaserwithlaserassistedphysicalvapourdepositionlpvdmethod |