Fundamentals of microfabrication:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boca Raton [u.a.]
CRC Press
1997
|
| Schlagworte: | |
| Beschreibung: | 589 S. Ill., graph. Darst. |
| ISBN: | 0849394511 |
Internformat
MARC
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| 100 | 1 | |a Madou, Marc J. |e Verfasser |0 (DE-588)153885297 |4 aut | |
| 245 | 1 | 0 | |a Fundamentals of microfabrication |c Marc Madou |
| 264 | 1 | |a Boca Raton [u.a.] |b CRC Press |c 1997 | |
| 300 | |a 589 S. |b Ill., graph. Darst. | ||
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| 650 | 7 | |a Circuitos integrados |2 larpcal | |
| 650 | 4 | |a Lasers - Applications industrielles | |
| 650 | 7 | |a Microlithografie |2 gtt | |
| 650 | 7 | |a Microtechniek |2 gtt | |
| 650 | 4 | |a Microélectronique - Conception et construction | |
| 650 | 4 | |a Mise sous boîtier (Microélectronique) | |
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| 650 | 4 | |a Usinage | |
| 650 | 4 | |a Integrated circuits |x Design and construction | |
| 650 | 4 | |a Lasers |x Industrial applications | |
| 650 | 4 | |a Machining | |
| 650 | 4 | |a Microelectromechanical systems |x Design and construction | |
| 650 | 4 | |a Microelectronic packaging | |
| 650 | 4 | |a Microelectronics | |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
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| any_adam_object | |
| author | Madou, Marc J. |
| author_GND | (DE-588)153885297 |
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| building | Verbundindex |
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| callnumber-first | T - Technology |
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| callnumber-search | TK7836 |
| callnumber-sort | TK 47836 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.3815/2 |
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV011689941 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:14:06Z |
| institution | BVB |
| isbn | 0849394511 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007882198 |
| oclc_num | 35397909 |
| open_access_boolean | |
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| owner_facet | DE-91G DE-BY-TUM DE-703 DE-92 DE-1050 DE-29T DE-858 DE-522 DE-523 DE-634 DE-83 |
| physical | 589 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | CRC Press |
| record_format | marc |
| spelling | Madou, Marc J. Verfasser (DE-588)153885297 aut Fundamentals of microfabrication Marc Madou Boca Raton [u.a.] CRC Press 1997 589 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Circuitos integrados larpcal Lasers - Applications industrielles Microlithografie gtt Microtechniek gtt Microélectronique - Conception et construction Mise sous boîtier (Microélectronique) Nanostructuren gtt Usinage Integrated circuits Design and construction Lasers Industrial applications Machining Microelectromechanical systems Design and construction Microelectronic packaging Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Fertigungstechnik (DE-588)4329079-6 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Fertigungstechnik (DE-588)4329079-6 s DE-604 Lithografie Halbleitertechnologie (DE-588)4191584-7 s |
| spellingShingle | Madou, Marc J. Fundamentals of microfabrication Circuitos integrados larpcal Lasers - Applications industrielles Microlithografie gtt Microtechniek gtt Microélectronique - Conception et construction Mise sous boîtier (Microélectronique) Nanostructuren gtt Usinage Integrated circuits Design and construction Lasers Industrial applications Machining Microelectromechanical systems Design and construction Microelectronic packaging Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Fertigungstechnik (DE-588)4329079-6 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)4221617-5 (DE-588)4329079-6 |
| title | Fundamentals of microfabrication |
| title_auth | Fundamentals of microfabrication |
| title_exact_search | Fundamentals of microfabrication |
| title_full | Fundamentals of microfabrication Marc Madou |
| title_fullStr | Fundamentals of microfabrication Marc Madou |
| title_full_unstemmed | Fundamentals of microfabrication Marc Madou |
| title_short | Fundamentals of microfabrication |
| title_sort | fundamentals of microfabrication |
| topic | Circuitos integrados larpcal Lasers - Applications industrielles Microlithografie gtt Microtechniek gtt Microélectronique - Conception et construction Mise sous boîtier (Microélectronique) Nanostructuren gtt Usinage Integrated circuits Design and construction Lasers Industrial applications Machining Microelectromechanical systems Design and construction Microelectronic packaging Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Fertigungstechnik (DE-588)4329079-6 gnd |
| topic_facet | Circuitos integrados Lasers - Applications industrielles Microlithografie Microtechniek Microélectronique - Conception et construction Mise sous boîtier (Microélectronique) Nanostructuren Usinage Integrated circuits Design and construction Lasers Industrial applications Machining Microelectromechanical systems Design and construction Microelectronic packaging Microelectronics Lithografie Halbleitertechnologie Mikrosystemtechnik Fertigungstechnik |
| work_keys_str_mv | AT madoumarcj fundamentalsofmicrofabrication |