Holdings: Specialty gas analysis

Specialty gas analysis: a practical guidebook

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Bibliographic Details
Format:	Book
Language:	German
Published:	New York [u.a.] Wiley-VCH 1997
Subjects:	Gaz - Analyse Gases > Analysis Gasanalyse
Online Access:	Inhaltsverzeichnis
Physical Description:	XII, 200 S. Ill., graph. Darst.
ISBN:	0471185981

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MARC


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Record in the Search Index

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adam_text	SPECIALTY GAS ANALYSIS A PRACTICAL GUIDEBOOK EDITED BY JEREMIAH D. HOGAN ( GWILEY-VCH NEW YORK * CHICHESTER * WEINHEIM * BRISBANE * SINGAPORE * TORONTO CONTENTS PREFACE IX CONTRIBUTORS XI 1. A HISTORY OF GAS ANALYSIS 1 JOHN B. GODDARD 1.1 SCOPE 1 1.2 THE BEGINNING 1 1.3 VOLUMETRIE METHODS 2 1.4 OTHER CLASSICAL METHODS 2 1.5 THEMAL CONDUCTLVITY 3 1.6 INFRARED SPECTROSCOPY 3 1.7 PARAMAGNETIC SUSCEPTIBILITY (OXYGEN) 6 1.8 MASS SPECTROMETRY 6 1.9 EMISSION SPECTROSCOPY 8 1.10 GAS CHROMATOGRAPHY 9 1.11 ELECTROCHEMISTRY (TRACE OXYGEN/TRACE MOISTURE) 11 1.12 PIEZOELECTRIC SENSORS 12 1.13 RESONANCE IONIZATION SPECTROSCOPY 14 1.14 HISTORICAL TIMELINE 14 1.15 THEFUTURE 15 V VI CONTENTS 2. HUMIDITY MEASUREMENT IN GASES FOR SEMICONDUCTOR PROCESSING 21 JAMES J. F. MCANDREW 2.1 INTRODUCTION 21 2.2 MOISTURE CONCENTRATION UNITS 22 2.3 HUMIDITY SENSORS 22 2.4 FROST-POINT MEASUREMENT 23 2.5 CONVENTIONAL HYGROMETERS 25 2.6 ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETRY (APIMS) 30 2.7 FTIR AND OTHER LIGHT ABSORPTION METHODS 32 2.8 MOISTURE GENERATION AND CALIBRATION OF MOISTURE ANALYZERS 35 2.9 SAMPLING TECHNIQUE IN HUMIDITY MEASUREMENTS 36 2.10 FUTURE DIRECTIONS IN HUMIDITY MEASUREMENT 41 3. THE CHROMATOGRAPHIE ANALYSIS OF TRACE ATMOSPHERIC GASES 43 CAROL J. MEYER AND WILLIAM M. GEIGER 3.1 INTRODUCTION 43 3.2 CHROMATOGRAPHIE HARDWARE 44 3.3 CHROMATOGRAPHIE SEPARATIONS 53 3.4 DETECTOR TECHNOLOGY 66 4. ULTRAPURE SAMPLING OF CORROSIVE-GAS CYLINDERS 81 ANTHONY J. SCHLEISMAN AND DAVID BOLLINGER 4.1 INTRODUCTION 81 4.2 INITIAL CONSIDERATIONS 82 4.3 EXPERI MENTAL 84 4.4 PROCEDURE 87 4.5 RESULTS 90 4.6 CONCLUSION 91 5. DETERMINING MOISTURE IN CORROSIVE GASES 93 DAVID L. GRIEBLE AND PHILIP B. HENDERSON 5.1 INTRODUCTION 93 5.2 CORROSION: CAUSES AND PREVENTION 94 5.3 DELIVERY AND SAMPLING SYSTEM CONSTRUCTION 98 5.4 REVIEW OF MOISTURE ANALYSIS METHODS FOR CORROSIVE GASES 100 CONTENTS VII 6. METHODS OF ANALYSIS USING HELIUM-IONIZATION AND DISCHARGE-IONIZATION DETECTOR/GAS CHROMATOGRAPHY 111 MARY LOU MARKOWSKI 6.1 INTRODUCTION 111 6.2 PRINCIPLE OF OPERATION OF THE HELIUM-IONIZATION/DISCHARGE- IONIZATION DETECTORS 112 6.3 OPERATING THE HID/DID GAS CHROMATOGRAPH 115 6.4 GC TROUBLESHOOTING GUIDE 127 6.5 APPLICATIONS OF THE HID/DID 130 6.6 CONCLUSIONS 135 7. ION CHROMATOGRAPHY FOR GAS ANALYSIS 139 ANN MARIE BRZYCHCY, BRIAN P TWOMBLY AND LIMIN ZHANG 7.1 THE ION CHROMATOGRAPHY SYSTEM 140 7.2 APPLICATION OF IC TO GAS ANALYSIS 143 7.3 BASIC SAMPLING TECHNIQUES 143 7.4 CALCULATIONS WITH IC DATA 147 7.5 SAMPLE METHODS FOR GAS ANALYSIS 148 7.6 ANALYSIS OF MIXTURE COMPONENT CONCENTRATION 158 7.7 CONCLUSION 161 8. LIMIT OF DETECTION 163 T. J. BZIK, G. H. SMUDDE, JR., D. A. ZATKO, AND J. V. MARTINEZ DE PINILLOS 8.1 OVERVIEW 163 8.2 INTRODUCTION 163 8.3 LIMIT-OF-DETECTION DEFMITIONS 8.4 DATA COLLECTION AND HANDLING 8.5 ADDITIONAL STATISTICAL ISSUES 8.6 SUMMARY 189 ACKNOWLEDGEMENTS 190 APPENDIX A HYDROGEN CALIBRATION DATA 191 APPENDIX B 192 B.L LOD REG PROCEDURE 192 164 173 182 INDEX 197
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illustrated	Illustrated
indexdate	2024-07-09T18:12:20Z
institution	BVB
isbn	0471185981
language	German
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physical	XII, 200 S. Ill., graph. Darst.
publishDate	1997
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publisher	Wiley-VCH
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spelling	Specialty gas analysis a practical guidebook ed. by Jeremiah D. Hogan New York [u.a.] Wiley-VCH 1997 XII, 200 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Gaz - Analyse ram Gases Analysis Gasanalyse (DE-588)4155993-9 gnd rswk-swf Gasanalyse (DE-588)4155993-9 s DE-604 Hogan, Jeremiah D. Sonstige oth GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007805237&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Specialty gas analysis a practical guidebook Gaz - Analyse ram Gases Analysis Gasanalyse (DE-588)4155993-9 gnd
subject_GND	(DE-588)4155993-9
title	Specialty gas analysis a practical guidebook
title_auth	Specialty gas analysis a practical guidebook
title_exact_search	Specialty gas analysis a practical guidebook
title_full	Specialty gas analysis a practical guidebook ed. by Jeremiah D. Hogan
title_fullStr	Specialty gas analysis a practical guidebook ed. by Jeremiah D. Hogan
title_full_unstemmed	Specialty gas analysis a practical guidebook ed. by Jeremiah D. Hogan
title_short	Specialty gas analysis
title_sort	specialty gas analysis a practical guidebook
title_sub	a practical guidebook
topic	Gaz - Analyse ram Gases Analysis Gasanalyse (DE-588)4155993-9 gnd
topic_facet	Gaz - Analyse Gases Analysis Gasanalyse
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007805237&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
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