Specialty gas analysis: a practical guidebook
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | German |
| Veröffentlicht: |
New York [u.a.]
Wiley-VCH
1997
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XII, 200 S. Ill., graph. Darst. |
| ISBN: | 0471185981 |
Internformat
MARC
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| 245 | 1 | 0 | |a Specialty gas analysis |b a practical guidebook |c ed. by Jeremiah D. Hogan |
| 264 | 1 | |a New York [u.a.] |b Wiley-VCH |c 1997 | |
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Datensatz im Suchindex
| _version_ | 1804126116694196224 |
|---|---|
| adam_text | SPECIALTY GAS ANALYSIS A PRACTICAL GUIDEBOOK EDITED BY JEREMIAH D. HOGAN
( GWILEY-VCH NEW YORK * CHICHESTER * WEINHEIM * BRISBANE * SINGAPORE *
TORONTO CONTENTS PREFACE IX CONTRIBUTORS XI 1. A HISTORY OF GAS ANALYSIS
1 JOHN B. GODDARD 1.1 SCOPE 1 1.2 THE BEGINNING 1 1.3 VOLUMETRIE METHODS
2 1.4 OTHER CLASSICAL METHODS 2 1.5 THEMAL CONDUCTLVITY 3 1.6 INFRARED
SPECTROSCOPY 3 1.7 PARAMAGNETIC SUSCEPTIBILITY (OXYGEN) 6 1.8 MASS
SPECTROMETRY 6 1.9 EMISSION SPECTROSCOPY 8 1.10 GAS CHROMATOGRAPHY 9
1.11 ELECTROCHEMISTRY (TRACE OXYGEN/TRACE MOISTURE) 11 1.12
PIEZOELECTRIC SENSORS 12 1.13 RESONANCE IONIZATION SPECTROSCOPY 14 1.14
HISTORICAL TIMELINE 14 1.15 THEFUTURE 15 V VI CONTENTS 2. HUMIDITY
MEASUREMENT IN GASES FOR SEMICONDUCTOR PROCESSING 21 JAMES J. F.
MCANDREW 2.1 INTRODUCTION 21 2.2 MOISTURE CONCENTRATION UNITS 22 2.3
HUMIDITY SENSORS 22 2.4 FROST-POINT MEASUREMENT 23 2.5 CONVENTIONAL
HYGROMETERS 25 2.6 ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETRY
(APIMS) 30 2.7 FTIR AND OTHER LIGHT ABSORPTION METHODS 32 2.8 MOISTURE
GENERATION AND CALIBRATION OF MOISTURE ANALYZERS 35 2.9 SAMPLING
TECHNIQUE IN HUMIDITY MEASUREMENTS 36 2.10 FUTURE DIRECTIONS IN HUMIDITY
MEASUREMENT 41 3. THE CHROMATOGRAPHIE ANALYSIS OF TRACE ATMOSPHERIC
GASES 43 CAROL J. MEYER AND WILLIAM M. GEIGER 3.1 INTRODUCTION 43 3.2
CHROMATOGRAPHIE HARDWARE 44 3.3 CHROMATOGRAPHIE SEPARATIONS 53 3.4
DETECTOR TECHNOLOGY 66 4. ULTRAPURE SAMPLING OF CORROSIVE-GAS CYLINDERS
81 ANTHONY J. SCHLEISMAN AND DAVID BOLLINGER 4.1 INTRODUCTION 81 4.2
INITIAL CONSIDERATIONS 82 4.3 EXPERI MENTAL 84 4.4 PROCEDURE 87 4.5
RESULTS 90 4.6 CONCLUSION 91 5. DETERMINING MOISTURE IN CORROSIVE GASES
93 DAVID L. GRIEBLE AND PHILIP B. HENDERSON 5.1 INTRODUCTION 93 5.2
CORROSION: CAUSES AND PREVENTION 94 5.3 DELIVERY AND SAMPLING SYSTEM
CONSTRUCTION 98 5.4 REVIEW OF MOISTURE ANALYSIS METHODS FOR CORROSIVE
GASES 100 CONTENTS VII 6. METHODS OF ANALYSIS USING HELIUM-IONIZATION
AND DISCHARGE-IONIZATION DETECTOR/GAS CHROMATOGRAPHY 111 MARY LOU
MARKOWSKI 6.1 INTRODUCTION 111 6.2 PRINCIPLE OF OPERATION OF THE
HELIUM-IONIZATION/DISCHARGE- IONIZATION DETECTORS 112 6.3 OPERATING THE
HID/DID GAS CHROMATOGRAPH 115 6.4 GC TROUBLESHOOTING GUIDE 127 6.5
APPLICATIONS OF THE HID/DID 130 6.6 CONCLUSIONS 135 7. ION
CHROMATOGRAPHY FOR GAS ANALYSIS 139 ANN MARIE BRZYCHCY, BRIAN P TWOMBLY
AND LIMIN ZHANG 7.1 THE ION CHROMATOGRAPHY SYSTEM 140 7.2 APPLICATION OF
IC TO GAS ANALYSIS 143 7.3 BASIC SAMPLING TECHNIQUES 143 7.4
CALCULATIONS WITH IC DATA 147 7.5 SAMPLE METHODS FOR GAS ANALYSIS 148
7.6 ANALYSIS OF MIXTURE COMPONENT CONCENTRATION 158 7.7 CONCLUSION 161
8. LIMIT OF DETECTION 163 T. J. BZIK, G. H. SMUDDE, JR., D. A. ZATKO,
AND J. V. MARTINEZ DE PINILLOS 8.1 OVERVIEW 163 8.2 INTRODUCTION 163 8.3
LIMIT-OF-DETECTION DEFMITIONS 8.4 DATA COLLECTION AND HANDLING 8.5
ADDITIONAL STATISTICAL ISSUES 8.6 SUMMARY 189 ACKNOWLEDGEMENTS 190
APPENDIX A HYDROGEN CALIBRATION DATA 191 APPENDIX B 192 B.L LOD REG
PROCEDURE 192 164 173 182 INDEX 197
|
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| dewey-full | 665.8 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 665 - Industrial oils, fats, waxes & gases |
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| discipline | Chemie / Pharmazie Physik Chemie |
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| id | DE-604.BV011588483 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:12:20Z |
| institution | BVB |
| isbn | 0471185981 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007805237 |
| oclc_num | 34839743 |
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| owner_facet | DE-703 DE-91G DE-BY-TUM |
| physical | XII, 200 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Specialty gas analysis a practical guidebook ed. by Jeremiah D. Hogan New York [u.a.] Wiley-VCH 1997 XII, 200 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Gaz - Analyse ram Gases Analysis Gasanalyse (DE-588)4155993-9 gnd rswk-swf Gasanalyse (DE-588)4155993-9 s DE-604 Hogan, Jeremiah D. Sonstige oth GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007805237&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Specialty gas analysis a practical guidebook Gaz - Analyse ram Gases Analysis Gasanalyse (DE-588)4155993-9 gnd |
| subject_GND | (DE-588)4155993-9 |
| title | Specialty gas analysis a practical guidebook |
| title_auth | Specialty gas analysis a practical guidebook |
| title_exact_search | Specialty gas analysis a practical guidebook |
| title_full | Specialty gas analysis a practical guidebook ed. by Jeremiah D. Hogan |
| title_fullStr | Specialty gas analysis a practical guidebook ed. by Jeremiah D. Hogan |
| title_full_unstemmed | Specialty gas analysis a practical guidebook ed. by Jeremiah D. Hogan |
| title_short | Specialty gas analysis |
| title_sort | specialty gas analysis a practical guidebook |
| title_sub | a practical guidebook |
| topic | Gaz - Analyse ram Gases Analysis Gasanalyse (DE-588)4155993-9 gnd |
| topic_facet | Gaz - Analyse Gases Analysis Gasanalyse |
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