Mask technology for integrated circuits and micro-components: lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | German |
| Veröffentlicht: |
Berlin u.a.
VDE-Verl.
1997
|
| Schriftenreihe: | GMM-Fachbericht
21 |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | 205 S. Ill., zahlr. graph. Darst. |
| ISBN: | 3800723107 |
Internformat
MARC
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| 300 | |a 205 S. |b Ill., zahlr. graph. Darst. | ||
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Datensatz im Suchindex
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| bvnumber | BV011563560 |
| ctrlnum | (OCoLC)45514854 (DE-599)BVBBV011563560 |
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| genre | (DE-588)1071861417 Konferenzschrift 1997 München gnd-content |
| genre_facet | Konferenzschrift 1997 München |
| id | DE-604.BV011563560 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:11:55Z |
| institution | BVB |
| isbn | 3800723107 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007786988 |
| oclc_num | 45514854 |
| open_access_boolean | |
| owner | DE-898 DE-BY-UBR |
| owner_facet | DE-898 DE-BY-UBR |
| physical | 205 S. Ill., zahlr. graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | VDE-Verl. |
| record_format | marc |
| series | GMM-Fachbericht |
| series2 | GMM-Fachbericht |
| spelling | Mask technology for integrated circuits and micro-components lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany organizer: VDE/VDI-Society Microelectronics ... Conference chairperson: U. Behringer Berlin u.a. VDE-Verl. 1997 205 S. Ill., zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier GMM-Fachbericht 21 Literaturangaben Maskentechnik (DE-588)4125845-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 München gnd-content Maskentechnik (DE-588)4125845-9 s DE-604 Behringer, Uwe Sonstige oth GMM-Fachbericht 21 (DE-604)BV011091581 21 |
| spellingShingle | Mask technology for integrated circuits and micro-components lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany GMM-Fachbericht Maskentechnik (DE-588)4125845-9 gnd |
| subject_GND | (DE-588)4125845-9 (DE-588)1071861417 |
| title | Mask technology for integrated circuits and micro-components lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany |
| title_auth | Mask technology for integrated circuits and micro-components lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany |
| title_exact_search | Mask technology for integrated circuits and micro-components lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany |
| title_full | Mask technology for integrated circuits and micro-components lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany organizer: VDE/VDI-Society Microelectronics ... Conference chairperson: U. Behringer |
| title_fullStr | Mask technology for integrated circuits and micro-components lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany organizer: VDE/VDI-Society Microelectronics ... Conference chairperson: U. Behringer |
| title_full_unstemmed | Mask technology for integrated circuits and micro-components lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany organizer: VDE/VDI-Society Microelectronics ... Conference chairperson: U. Behringer |
| title_short | Mask technology for integrated circuits and micro-components |
| title_sort | mask technology for integrated circuits and micro components lectures held at the gmm conference october 22 23 1997 in munich germany |
| title_sub | lectures held at the GMM-conference, October 22 - 23, 1997 in Munich, Germany |
| topic | Maskentechnik (DE-588)4125845-9 gnd |
| topic_facet | Maskentechnik Konferenzschrift 1997 München |
| volume_link | (DE-604)BV011091581 |
| work_keys_str_mv | AT behringeruwe masktechnologyforintegratedcircuitsandmicrocomponentslecturesheldatthegmmconferenceoctober22231997inmunichgermany |