Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Leuven u.a.
Acco
1996
|
| Ausgabe: | 1. ed. |
| Schlagworte: | |
| Beschreibung: | 349 S. Ill., zahlr. graph. Darst. |
| ISBN: | 9033437589 |
Internformat
MARC
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| 111 | 2 | |a International Symposium on Ultra Clean Processing of Silicon Surfaces |n 3 |d 1996 |c Antwerpen |j Verfasser |0 (DE-588)1237333-3 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces |c UCPSS '96. Marc Heyns (ed.) |
| 246 | 1 | 3 | |a Ultra clean processing of silicon surfaces |
| 246 | 1 | 3 | |a Proceedings UCPSS '96 |
| 246 | 1 | 3 | |a UCPSS '96 |
| 250 | |a 1. ed. | ||
| 264 | 1 | |a Leuven u.a. |b Acco |c 1996 | |
| 300 | |a 349 S. |b Ill., zahlr. graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Contamination control |v Congresses | |
| 650 | 4 | |a Semiconductor wafers |x Cleaning |v Congresses | |
| 650 | 4 | |a Silicon |x Surfaces |v Congresses | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Heyns, Marc |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. ed. |
| format | Conference Proceeding Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T18:11:48Z |
| institution | BVB |
| institution_GND | (DE-588)1237333-3 |
| isbn | 9033437589 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007782084 |
| oclc_num | 50089863 |
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| physical | 349 S. Ill., zahlr. graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
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| publisher | Acco |
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| spelling | International Symposium on Ultra Clean Processing of Silicon Surfaces 3 1996 Antwerpen Verfasser (DE-588)1237333-3 aut Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces UCPSS '96. Marc Heyns (ed.) Ultra clean processing of silicon surfaces Proceedings UCPSS '96 UCPSS '96 1. ed. Leuven u.a. Acco 1996 349 S. Ill., zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Contamination control Congresses Semiconductor wafers Cleaning Congresses Silicon Surfaces Congresses (DE-588)1071861417 Konferenzschrift gnd-content Heyns, Marc Sonstige oth |
| spellingShingle | Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces Contamination control Congresses Semiconductor wafers Cleaning Congresses Silicon Surfaces Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces |
| title_alt | Ultra clean processing of silicon surfaces Proceedings UCPSS '96 UCPSS '96 |
| title_auth | Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces |
| title_exact_search | Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces |
| title_full | Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces UCPSS '96. Marc Heyns (ed.) |
| title_fullStr | Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces UCPSS '96. Marc Heyns (ed.) |
| title_full_unstemmed | Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces UCPSS '96. Marc Heyns (ed.) |
| title_short | Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces |
| title_sort | proceedings of the third international symposium on ultra clean processing of silicon surfaces |
| topic | Contamination control Congresses Semiconductor wafers Cleaning Congresses Silicon Surfaces Congresses |
| topic_facet | Contamination control Congresses Semiconductor wafers Cleaning Congresses Silicon Surfaces Congresses Konferenzschrift |
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