Rapid thermal processing of semiconductors:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
Plenum Press
1997
|
| Schriftenreihe: | Microdevices
|
| Schlagworte: | |
| Beschreibung: | XXII, 358 S. graph. Darst. |
| ISBN: | 0306450542 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV011526021 | ||
| 003 | DE-604 | ||
| 005 | 20070308 | ||
| 007 | t | ||
| 008 | 970909s1997 d||| |||| 00||| eng d | ||
| 020 | |a 0306450542 |9 0-306-45054-2 | ||
| 035 | |a (OCoLC)36327442 | ||
| 035 | |a (DE-599)BVBBV011526021 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T |a DE-703 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2 |2 21 | |
| 084 | |a UP 3200 |0 (DE-625)146379: |2 rvk | ||
| 100 | 1 | |a Borisenko, Viktor E. |d 1951- |e Verfasser |0 (DE-588)121568083 |4 aut | |
| 245 | 1 | 0 | |a Rapid thermal processing of semiconductors |c Viktor E. Borisenko ; Peter J. Hesketh |
| 264 | 1 | |a New York [u.a.] |b Plenum Press |c 1997 | |
| 300 | |a XXII, 358 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Microdevices | |
| 650 | 4 | |a Recuit thermique rapide | |
| 650 | 4 | |a Semiconducteurs - Conception et construction | |
| 650 | 7 | |a Semiconducteurs - Dopage |2 ram | |
| 650 | 7 | |a Semiconducteurs - Traitement thermique |2 ram | |
| 650 | 7 | |a Silicium |2 ram | |
| 650 | 4 | |a Rapid thermal processing | |
| 650 | 4 | |a Semiconductors |x Design and construction | |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Thermische Verfahrenstechnik |0 (DE-588)4117203-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Supraleiter |0 (DE-588)4184140-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Rapid thermal processing |0 (DE-588)4347011-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Supraleiter |0 (DE-588)4184140-2 |D s |
| 689 | 0 | 1 | |a Thermische Verfahrenstechnik |0 (DE-588)4117203-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 1 | 1 | |a Rapid thermal processing |0 (DE-588)4347011-7 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Hesketh, Peter J. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-007756409 | ||
Datensatz im Suchindex
| _version_ | 1804126046364106752 |
|---|---|
| any_adam_object | |
| author | Borisenko, Viktor E. 1951- Hesketh, Peter J. |
| author_GND | (DE-588)121568083 |
| author_facet | Borisenko, Viktor E. 1951- Hesketh, Peter J. |
| author_role | aut aut |
| author_sort | Borisenko, Viktor E. 1951- |
| author_variant | v e b ve veb p j h pj pjh |
| building | Verbundindex |
| bvnumber | BV011526021 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 3200 |
| ctrlnum | (OCoLC)36327442 (DE-599)BVBBV011526021 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01851nam a2200517 c 4500</leader><controlfield tag="001">BV011526021</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20070308 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">970909s1997 d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0306450542</subfield><subfield code="9">0-306-45054-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)36327442</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011526021</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3200</subfield><subfield code="0">(DE-625)146379:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Borisenko, Viktor E.</subfield><subfield code="d">1951-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)121568083</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Rapid thermal processing of semiconductors</subfield><subfield code="c">Viktor E. Borisenko ; Peter J. Hesketh</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York [u.a.]</subfield><subfield code="b">Plenum Press</subfield><subfield code="c">1997</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XXII, 358 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Microdevices</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Recuit thermique rapide</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconducteurs - Conception et construction</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconducteurs - Dopage</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconducteurs - Traitement thermique</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Silicium</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Rapid thermal processing</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Thermische Verfahrenstechnik</subfield><subfield code="0">(DE-588)4117203-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Supraleiter</subfield><subfield code="0">(DE-588)4184140-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Rapid thermal processing</subfield><subfield code="0">(DE-588)4347011-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Supraleiter</subfield><subfield code="0">(DE-588)4184140-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Thermische Verfahrenstechnik</subfield><subfield code="0">(DE-588)4117203-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Rapid thermal processing</subfield><subfield code="0">(DE-588)4347011-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hesketh, Peter J.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-007756409</subfield></datafield></record></collection> |
| id | DE-604.BV011526021 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:11:13Z |
| institution | BVB |
| isbn | 0306450542 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007756409 |
| oclc_num | 36327442 |
| open_access_boolean | |
| owner | DE-29T DE-703 |
| owner_facet | DE-29T DE-703 |
| physical | XXII, 358 S. graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Plenum Press |
| record_format | marc |
| series2 | Microdevices |
| spelling | Borisenko, Viktor E. 1951- Verfasser (DE-588)121568083 aut Rapid thermal processing of semiconductors Viktor E. Borisenko ; Peter J. Hesketh New York [u.a.] Plenum Press 1997 XXII, 358 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microdevices Recuit thermique rapide Semiconducteurs - Conception et construction Semiconducteurs - Dopage ram Semiconducteurs - Traitement thermique ram Silicium ram Rapid thermal processing Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd rswk-swf Thermische Verfahrenstechnik (DE-588)4117203-6 gnd rswk-swf Supraleiter (DE-588)4184140-2 gnd rswk-swf Rapid thermal processing (DE-588)4347011-7 gnd rswk-swf Supraleiter (DE-588)4184140-2 s Thermische Verfahrenstechnik (DE-588)4117203-6 s DE-604 Halbleiter (DE-588)4022993-2 s Rapid thermal processing (DE-588)4347011-7 s Hesketh, Peter J. Verfasser aut |
| spellingShingle | Borisenko, Viktor E. 1951- Hesketh, Peter J. Rapid thermal processing of semiconductors Recuit thermique rapide Semiconducteurs - Conception et construction Semiconducteurs - Dopage ram Semiconducteurs - Traitement thermique ram Silicium ram Rapid thermal processing Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd Thermische Verfahrenstechnik (DE-588)4117203-6 gnd Supraleiter (DE-588)4184140-2 gnd Rapid thermal processing (DE-588)4347011-7 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4117203-6 (DE-588)4184140-2 (DE-588)4347011-7 |
| title | Rapid thermal processing of semiconductors |
| title_auth | Rapid thermal processing of semiconductors |
| title_exact_search | Rapid thermal processing of semiconductors |
| title_full | Rapid thermal processing of semiconductors Viktor E. Borisenko ; Peter J. Hesketh |
| title_fullStr | Rapid thermal processing of semiconductors Viktor E. Borisenko ; Peter J. Hesketh |
| title_full_unstemmed | Rapid thermal processing of semiconductors Viktor E. Borisenko ; Peter J. Hesketh |
| title_short | Rapid thermal processing of semiconductors |
| title_sort | rapid thermal processing of semiconductors |
| topic | Recuit thermique rapide Semiconducteurs - Conception et construction Semiconducteurs - Dopage ram Semiconducteurs - Traitement thermique ram Silicium ram Rapid thermal processing Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd Thermische Verfahrenstechnik (DE-588)4117203-6 gnd Supraleiter (DE-588)4184140-2 gnd Rapid thermal processing (DE-588)4347011-7 gnd |
| topic_facet | Recuit thermique rapide Semiconducteurs - Conception et construction Semiconducteurs - Dopage Semiconducteurs - Traitement thermique Silicium Rapid thermal processing Semiconductors Design and construction Halbleiter Thermische Verfahrenstechnik Supraleiter |
| work_keys_str_mv | AT borisenkoviktore rapidthermalprocessingofsemiconductors AT heskethpeterj rapidthermalprocessingofsemiconductors |