Gate dielectrics and MOS ULSIs: principles, technologies and applications
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Bibliographic Details
Main Author: Hori, Takashi (Author)
Format: Book
Language:German
Published: Berlin [u.a.] Springer 1997
Series:Springer series in electronics and photonics 34
Subjects:
Physical Description:XIV, 352 S. graph. Darst.
ISBN:3540631828

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