APA (7th ed.) Citation

Steigerwald, J. M., Murarka, S. P., & Gutmann, R. J. (1997). Chemical mechanical planarization of microelectronic materials. Wiley.

Chicago Style (17th ed.) Citation

Steigerwald, Joseph M., Shyam P. Murarka, and Ronald J. Gutmann. Chemical Mechanical Planarization of Microelectronic Materials. New York [u.a.]: Wiley, 1997.

MLA (9th ed.) Citation

Steigerwald, Joseph M., et al. Chemical Mechanical Planarization of Microelectronic Materials. Wiley, 1997.