Chemical mechanical planarization of microelectronic materials:
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
Wiley
1997
|
| Schriftenreihe: | A Wiley interscience publication
|
| Schlagworte: | |
| Beschreibung: | XIII, 324 S. Ill., graph. Darst. |
| ISBN: | 0471138274 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV011393226 | ||
| 003 | DE-604 | ||
| 005 | 19970620 | ||
| 007 | t | ||
| 008 | 970620s1997 ad|| |||| 00||| eng d | ||
| 020 | |a 0471138274 |9 0-471-13827-4 | ||
| 035 | |a (OCoLC)832737001 | ||
| 035 | |a (DE-599)BVBBV011393226 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-83 | ||
| 082 | 0 | |a 621.38152 | |
| 084 | |a ZM 7660 |0 (DE-625)157138: |2 rvk | ||
| 084 | |a ZN 3400 |0 (DE-625)157307: |2 rvk | ||
| 100 | 1 | |a Steigerwald, Joseph M. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Chemical mechanical planarization of microelectronic materials |c Joseph M. Steigerwald ; Shyam P. Murarka ; Ronald J. Gutmann |
| 264 | 1 | |a New York [u.a.] |b Wiley |c 1997 | |
| 300 | |a XIII, 324 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a A Wiley interscience publication | |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Planartechnik |0 (DE-588)4174785-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | 1 | |a Planartechnik |0 (DE-588)4174785-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Murarka, Shyam P. |e Verfasser |4 aut | |
| 700 | 1 | |a Gutmann, Ronald J. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-007658396 | ||
Datensatz im Suchindex
| _version_ | 1804125905762648064 |
|---|---|
| any_adam_object | |
| author | Steigerwald, Joseph M. Murarka, Shyam P. Gutmann, Ronald J. |
| author_facet | Steigerwald, Joseph M. Murarka, Shyam P. Gutmann, Ronald J. |
| author_role | aut aut aut |
| author_sort | Steigerwald, Joseph M. |
| author_variant | j m s jm jms s p m sp spm r j g rj rjg |
| building | Verbundindex |
| bvnumber | BV011393226 |
| classification_rvk | ZM 7660 ZN 3400 |
| ctrlnum | (OCoLC)832737001 (DE-599)BVBBV011393226 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01331nam a2200385 c 4500</leader><controlfield tag="001">BV011393226</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19970620 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">970620s1997 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0471138274</subfield><subfield code="9">0-471-13827-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)832737001</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011393226</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.38152</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 7660</subfield><subfield code="0">(DE-625)157138:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3400</subfield><subfield code="0">(DE-625)157307:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Steigerwald, Joseph M.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Chemical mechanical planarization of microelectronic materials</subfield><subfield code="c">Joseph M. Steigerwald ; Shyam P. Murarka ; Ronald J. Gutmann</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York [u.a.]</subfield><subfield code="b">Wiley</subfield><subfield code="c">1997</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIII, 324 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">A Wiley interscience publication</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Planartechnik</subfield><subfield code="0">(DE-588)4174785-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Planartechnik</subfield><subfield code="0">(DE-588)4174785-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Murarka, Shyam P.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gutmann, Ronald J.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-007658396</subfield></datafield></record></collection> |
| id | DE-604.BV011393226 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:08:59Z |
| institution | BVB |
| isbn | 0471138274 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007658396 |
| oclc_num | 832737001 |
| open_access_boolean | |
| owner | DE-703 DE-83 |
| owner_facet | DE-703 DE-83 |
| physical | XIII, 324 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Wiley |
| record_format | marc |
| series2 | A Wiley interscience publication |
| spelling | Steigerwald, Joseph M. Verfasser aut Chemical mechanical planarization of microelectronic materials Joseph M. Steigerwald ; Shyam P. Murarka ; Ronald J. Gutmann New York [u.a.] Wiley 1997 XIII, 324 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier A Wiley interscience publication Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Planartechnik (DE-588)4174785-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 s Planartechnik (DE-588)4174785-9 s DE-604 Murarka, Shyam P. Verfasser aut Gutmann, Ronald J. Verfasser aut |
| spellingShingle | Steigerwald, Joseph M. Murarka, Shyam P. Gutmann, Ronald J. Chemical mechanical planarization of microelectronic materials Mikroelektronik (DE-588)4039207-7 gnd Planartechnik (DE-588)4174785-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4174785-9 |
| title | Chemical mechanical planarization of microelectronic materials |
| title_auth | Chemical mechanical planarization of microelectronic materials |
| title_exact_search | Chemical mechanical planarization of microelectronic materials |
| title_full | Chemical mechanical planarization of microelectronic materials Joseph M. Steigerwald ; Shyam P. Murarka ; Ronald J. Gutmann |
| title_fullStr | Chemical mechanical planarization of microelectronic materials Joseph M. Steigerwald ; Shyam P. Murarka ; Ronald J. Gutmann |
| title_full_unstemmed | Chemical mechanical planarization of microelectronic materials Joseph M. Steigerwald ; Shyam P. Murarka ; Ronald J. Gutmann |
| title_short | Chemical mechanical planarization of microelectronic materials |
| title_sort | chemical mechanical planarization of microelectronic materials |
| topic | Mikroelektronik (DE-588)4039207-7 gnd Planartechnik (DE-588)4174785-9 gnd |
| topic_facet | Mikroelektronik Planartechnik |
| work_keys_str_mv | AT steigerwaldjosephm chemicalmechanicalplanarizationofmicroelectronicmaterials AT murarkashyamp chemicalmechanicalplanarizationofmicroelectronicmaterials AT gutmannronaldj chemicalmechanicalplanarizationofmicroelectronicmaterials |