Ultraclean semiconductor processing technology and surface chemical cleaning and passivation: symposium held April 17 - 19, 1995, San Francisco, California, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1995
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
386 |
| Schlagworte: | |
| Beschreibung: | XIII, 411 S. graph. Darst. |
| ISBN: | 1558992898 |
Internformat
MARC
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| 245 | 1 | 0 | |a Ultraclean semiconductor processing technology and surface chemical cleaning and passivation |b symposium held April 17 - 19, 1995, San Francisco, California, USA |c eds.: Michael Liehr ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1995 | |
| 300 | |a XIII, 411 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 386 | |
| 650 | 4 | |a Integrated circuits |x Design and construction |v Congresses | |
| 650 | 4 | |a Manufacturing processes |v Congresses | |
| 650 | 4 | |a Semiconductors |x Cleaning |v Congresses | |
| 650 | 4 | |a Surface preparation |v Congresses | |
| 650 | 0 | 7 | |a Oberflächenbehandlung |0 (DE-588)4042908-8 |2 gnd |9 rswk-swf |
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| 650 | 0 | 7 | |a Entwurf |0 (DE-588)4121208-3 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
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| dewey-hundreds | 600 - Technology (Applied sciences) |
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| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1995 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1995 San Francisco Calif. |
| id | DE-604.BV011336268 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:08:00Z |
| institution | BVB |
| isbn | 1558992898 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007616023 |
| oclc_num | 32894996 |
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| owner_facet | DE-29T DE-703 DE-83 |
| physical | XIII, 411 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held April 17 - 19, 1995, San Francisco, California, USA eds.: Michael Liehr ... Pittsburgh, Pa. Materials Research Soc. 1995 XIII, 411 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 386 Integrated circuits Design and construction Congresses Manufacturing processes Congresses Semiconductors Cleaning Congresses Surface preparation Congresses Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Passivierung (DE-588)4173500-6 gnd rswk-swf Entwurf (DE-588)4121208-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 San Francisco Calif. gnd-content Halbleiter (DE-588)4022993-2 s Passivierung (DE-588)4173500-6 s DE-604 Oberflächenreinigung (DE-588)4204243-4 s Integrierte Schaltung (DE-588)4027242-4 s Entwurf (DE-588)4121208-3 s Oberflächenbehandlung (DE-588)4042908-8 s Liehr, Michael Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 386 (DE-604)BV001899105 386 |
| spellingShingle | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held April 17 - 19, 1995, San Francisco, California, USA Materials Research Society: Materials Research Society symposia proceedings Integrated circuits Design and construction Congresses Manufacturing processes Congresses Semiconductors Cleaning Congresses Surface preparation Congresses Oberflächenbehandlung (DE-588)4042908-8 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Halbleiter (DE-588)4022993-2 gnd Passivierung (DE-588)4173500-6 gnd Entwurf (DE-588)4121208-3 gnd |
| subject_GND | (DE-588)4042908-8 (DE-588)4027242-4 (DE-588)4204243-4 (DE-588)4022993-2 (DE-588)4173500-6 (DE-588)4121208-3 (DE-588)1071861417 |
| title | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held April 17 - 19, 1995, San Francisco, California, USA |
| title_auth | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held April 17 - 19, 1995, San Francisco, California, USA |
| title_exact_search | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held April 17 - 19, 1995, San Francisco, California, USA |
| title_full | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held April 17 - 19, 1995, San Francisco, California, USA eds.: Michael Liehr ... |
| title_fullStr | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held April 17 - 19, 1995, San Francisco, California, USA eds.: Michael Liehr ... |
| title_full_unstemmed | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held April 17 - 19, 1995, San Francisco, California, USA eds.: Michael Liehr ... |
| title_short | Ultraclean semiconductor processing technology and surface chemical cleaning and passivation |
| title_sort | ultraclean semiconductor processing technology and surface chemical cleaning and passivation symposium held april 17 19 1995 san francisco california usa |
| title_sub | symposium held April 17 - 19, 1995, San Francisco, California, USA |
| topic | Integrated circuits Design and construction Congresses Manufacturing processes Congresses Semiconductors Cleaning Congresses Surface preparation Congresses Oberflächenbehandlung (DE-588)4042908-8 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Halbleiter (DE-588)4022993-2 gnd Passivierung (DE-588)4173500-6 gnd Entwurf (DE-588)4121208-3 gnd |
| topic_facet | Integrated circuits Design and construction Congresses Manufacturing processes Congresses Semiconductors Cleaning Congresses Surface preparation Congresses Oberflächenbehandlung Integrierte Schaltung Oberflächenreinigung Halbleiter Passivierung Entwurf Konferenzschrift 1995 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT liehrmichael ultracleansemiconductorprocessingtechnologyandsurfacechemicalcleaningandpassivationsymposiumheldapril17191995sanfranciscocaliforniausa |