Advanced metallization for future ULSI: symposium held April 8 - 11, 1996, San Francisco, California, U.S.A.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1996
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
427 |
| Schlagworte: | |
| Beschreibung: | XIII, 597 S.: Ill., graph. Darst. |
| ISBN: | 1558993304 |
Internformat
MARC
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| 245 | 1 | 0 | |a Advanced metallization for future ULSI |b symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. |c ed.: K. N. Tu ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1996 | |
| 300 | |a XIII, 597 S.: Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 427 | |
| 650 | 4 | |a Integrated circuits |x Ultra large scale integration |x Design and construction |v Congresses | |
| 650 | 4 | |a Metallic films |v Congresses | |
| 650 | 4 | |a Metallizing |v Congresses | |
| 650 | 4 | |a Semiconductors |x Design and construction |v Congresses | |
| 650 | 0 | 7 | |a Metallisieren |0 (DE-588)4169599-9 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
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| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1996 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1996 San Francisco Calif. |
| id | DE-604.BV011190430 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T18:05:30Z |
| institution | BVB |
| isbn | 1558993304 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007504965 |
| oclc_num | 35174758 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-384 DE-703 DE-83 |
| owner_facet | DE-91G DE-BY-TUM DE-384 DE-703 DE-83 |
| physical | XIII, 597 S.: Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Advanced metallization for future ULSI symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. ed.: K. N. Tu ... Pittsburgh, Pa. Materials Research Soc. 1996 XIII, 597 S.: Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 427 Integrated circuits Ultra large scale integration Design and construction Congresses Metallic films Congresses Metallizing Congresses Semiconductors Design and construction Congresses Metallisieren (DE-588)4169599-9 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1996 San Francisco Calif. gnd-content ULSI (DE-588)4226286-0 s Metallisieren (DE-588)4169599-9 s DE-604 Tu, King-Ning Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 427 (DE-604)BV001899105 427 |
| spellingShingle | Advanced metallization for future ULSI symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Integrated circuits Ultra large scale integration Design and construction Congresses Metallic films Congresses Metallizing Congresses Semiconductors Design and construction Congresses Metallisieren (DE-588)4169599-9 gnd ULSI (DE-588)4226286-0 gnd |
| subject_GND | (DE-588)4169599-9 (DE-588)4226286-0 (DE-588)1071861417 |
| title | Advanced metallization for future ULSI symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. |
| title_auth | Advanced metallization for future ULSI symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. |
| title_exact_search | Advanced metallization for future ULSI symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. |
| title_full | Advanced metallization for future ULSI symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. ed.: K. N. Tu ... |
| title_fullStr | Advanced metallization for future ULSI symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. ed.: K. N. Tu ... |
| title_full_unstemmed | Advanced metallization for future ULSI symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. ed.: K. N. Tu ... |
| title_short | Advanced metallization for future ULSI |
| title_sort | advanced metallization for future ulsi symposium held april 8 11 1996 san francisco california u s a |
| title_sub | symposium held April 8 - 11, 1996, San Francisco, California, U.S.A. |
| topic | Integrated circuits Ultra large scale integration Design and construction Congresses Metallic films Congresses Metallizing Congresses Semiconductors Design and construction Congresses Metallisieren (DE-588)4169599-9 gnd ULSI (DE-588)4226286-0 gnd |
| topic_facet | Integrated circuits Ultra large scale integration Design and construction Congresses Metallic films Congresses Metallizing Congresses Semiconductors Design and construction Congresses Metallisieren ULSI Konferenzschrift 1996 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT tukingning advancedmetallizationforfutureulsisymposiumheldapril8111996sanfranciscocaliforniausa |