Small scale structures: proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam [u. a.]
Elsevier
1996
|
| Schriftenreihe: | European Materials Research Society: European Materials Research Society symposia proceedings
52 |
| Schlagworte: | |
| Beschreibung: | Aus: Sensors and actuators ; A 51 (Symposium A). - Sensors and actuators ; B31 (Symposium B). - Thin solid films ; 275 (Symposium E) |
| Beschreibung: | 111, 138, 277 S. |
| ISBN: | 0444823123 |
Internformat
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| 245 | 1 | 0 | |a Small scale structures |b proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 |c Ed. by N. F. de Rooij ... |
| 264 | 1 | |a Amsterdam [u. a.] |b Elsevier |c 1996 | |
| 300 | |a 111, 138, 277 S. | ||
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| 490 | 1 | |a European Materials Research Society: European Materials Research Society symposia proceedings |v 52 | |
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| 650 | 4 | |a Micromechanics |v Congresses | |
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| 650 | 4 | |a Nanostructures |v Congresses | |
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Datensatz im Suchindex
| _version_ | 1804125657954779136 |
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| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV011164679 |
| classification_tum | MAS 990f PHY 803f FER 782f ELT 279f |
| ctrlnum | (OCoLC)36121032 (DE-599)BVBBV011164679 |
| dewey-full | 620.11299 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.11299 |
| dewey-search | 620.11299 |
| dewey-sort | 3620.11299 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Fertigungstechnik Maschinenbau |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1995 Straßburg gnd-content |
| genre_facet | Konferenzschrift 1995 Straßburg |
| id | DE-604.BV011164679 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T18:05:03Z |
| institution | BVB |
| institution_GND | (DE-588)5168116-X (DE-588)5173141-1 (DE-588)5179871-2 |
| isbn | 0444823123 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007483949 |
| oclc_num | 36121032 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-188 |
| owner_facet | DE-91G DE-BY-TUM DE-188 |
| physical | 111, 138, 277 S. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Elsevier |
| record_format | marc |
| series | European Materials Research Society: European Materials Research Society symposia proceedings |
| series2 | European Materials Research Society: European Materials Research Society symposia proceedings |
| spelling | Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 Ed. by N. F. de Rooij ... Amsterdam [u. a.] Elsevier 1996 111, 138, 277 S. txt rdacontent n rdamedia nc rdacarrier European Materials Research Society: European Materials Research Society symposia proceedings 52 Aus: Sensors and actuators ; A 51 (Symposium A). - Sensors and actuators ; B31 (Symposium B). - Thin solid films ; 275 (Symposium E) Chemical detectors Congresses Micromechanics Congresses Microstructure Congresses Nanostructures Congresses Thin films Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Metallschicht (DE-588)4252858-6 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Mehrschichtsystem (DE-588)4244347-7 gnd rswk-swf Nanostrukturiertes Material (DE-588)4342626-8 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Straßburg gnd-content Sensor (DE-588)4038824-4 s Nanostrukturiertes Material (DE-588)4342626-8 s DE-604 Mikrosystemtechnik (DE-588)4221617-5 s Metallschicht (DE-588)4252858-6 s Dünne Schicht (DE-588)4136925-7 s Mehrschichtsystem (DE-588)4244347-7 s Rooij, N. F. de Sonstige oth Symposium on Microstructuring and Microsystems 1995 Straßburg Sonstige (DE-588)5168116-X oth Symposium on Materials for Sensors: Functional Nanoscaled Structures 1995 Straßburg Sonstige (DE-588)5173141-1 oth Symposium Structure and Properties of Metallic Thin Films and Multilayers 1995 Straßburg Sonstige (DE-588)5179871-2 oth European Materials Research Society: European Materials Research Society symposia proceedings 52 (DE-604)BV004201591 52 |
| spellingShingle | Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 European Materials Research Society: European Materials Research Society symposia proceedings Chemical detectors Congresses Micromechanics Congresses Microstructure Congresses Nanostructures Congresses Thin films Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd Metallschicht (DE-588)4252858-6 gnd Sensor (DE-588)4038824-4 gnd Mehrschichtsystem (DE-588)4244347-7 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4252858-6 (DE-588)4038824-4 (DE-588)4244347-7 (DE-588)4342626-8 (DE-588)4136925-7 (DE-588)1071861417 |
| title | Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 |
| title_auth | Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 |
| title_exact_search | Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 |
| title_full | Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 Ed. by N. F. de Rooij ... |
| title_fullStr | Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 Ed. by N. F. de Rooij ... |
| title_full_unstemmed | Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 Ed. by N. F. de Rooij ... |
| title_short | Small scale structures |
| title_sort | small scale structures proceedings of symposium a on microstructuring and microsystems symposium b on materials for sensors functional nanoscaled structures and symposium e on structure and properties of metallic thin films and multilayers of the 1995 e mrs spring conference strasbourg france may 22 26 1995 |
| title_sub | proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995 |
| topic | Chemical detectors Congresses Micromechanics Congresses Microstructure Congresses Nanostructures Congresses Thin films Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd Metallschicht (DE-588)4252858-6 gnd Sensor (DE-588)4038824-4 gnd Mehrschichtsystem (DE-588)4244347-7 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Chemical detectors Congresses Micromechanics Congresses Microstructure Congresses Nanostructures Congresses Thin films Congresses Mikrosystemtechnik Metallschicht Sensor Mehrschichtsystem Nanostrukturiertes Material Dünne Schicht Konferenzschrift 1995 Straßburg |
| volume_link | (DE-604)BV004201591 |
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