APA (7th ed.) Citation

International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Atlanta, Ga. (1996). Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia. American Inst. of Physics.

Chicago Style (17th ed.) Citation

International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Atlanta, Ga. Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia. New York: American Inst. of Physics, 1996.

MLA (9th ed.) Citation

International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Atlanta, Ga. Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia. American Inst. of Physics, 1996.