Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1996
|
| Schriftenreihe: | Journal of vacuum science and technology / B
14,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-H. |
| Beschreibung: | S. 3607 - 4370 Ill., graph. Darst. |
Internformat
MARC
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| 111 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 40 |d 1996 |c Atlanta, Ga. |j Verfasser |0 (DE-588)5201002-8 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia |c special ed. for the proceedings: Stella W. Pang |
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| genre | (DE-588)1071861417 Konferenzschrift Atlanta Marriott Marquis 28.05.1996-31.05.1996 Atlanta Ga. gnd-content |
| genre_facet | Konferenzschrift Atlanta Marriott Marquis 28.05.1996-31.05.1996 Atlanta Ga. |
| id | DE-604.BV011156451 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:04:56Z |
| institution | BVB |
| institution_GND | (DE-588)5201002-8 |
| language | English |
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| physical | S. 3607 - 4370 Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science and technology / B |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 40 1996 Atlanta, Ga. Verfasser (DE-588)5201002-8 aut Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia special ed. for the proceedings: Stella W. Pang New York American Inst. of Physics 1996 S. 3607 - 4370 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 14,6 Einzelaufnahme eines Zeitschr.-H. Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift Atlanta Marriott Marquis 28.05.1996-31.05.1996 Atlanta Ga. gnd-content Teilchenstrahl (DE-588)4165339-7 s DE-604 Pang, Stella W. Sonstige oth |
| spellingShingle | Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia Teilchenstrahl (DE-588)4165339-7 gnd |
| subject_GND | (DE-588)4165339-7 (DE-588)1071861417 |
| title | Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia |
| title_auth | Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia |
| title_exact_search | Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia |
| title_full | Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia special ed. for the proceedings: Stella W. Pang |
| title_fullStr | Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia special ed. for the proceedings: Stella W. Pang |
| title_full_unstemmed | Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia special ed. for the proceedings: Stella W. Pang |
| title_short | Papers from the 40th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 40th international conference on electron ion and photon beam technology and nanofabrication 28 31 may 1996 atlanta marriott marquis atlanta georgia |
| title_sub | 28 - 31 May 1996, Atlanta Marriott Marquis, Atlanta, Georgia |
| topic | Teilchenstrahl (DE-588)4165339-7 gnd |
| topic_facet | Teilchenstrahl Konferenzschrift Atlanta Marriott Marquis 28.05.1996-31.05.1996 Atlanta Ga. |
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