Proceedings of the Workshop on Silicides and Metals for VLSI Applications V: 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Institute of Physics
1987
|
| Schriftenreihe: | Journal of vacuum science & technology / B
5,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. e. Zeitschr.-Heftes |
| Beschreibung: | S. 1661 - 1832 Ill., graph. Darst. |
Internformat
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| 111 | 2 | |a Workshop on Silicides and Metals for VLSI Applications |n 5 |d 1987 |c San Juan Bautista, Calif. |j Verfasser |0 (DE-588)810594-7 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the Workshop on Silicides and Metals for VLSI Applications V |b 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California |c special ed.: Michael D. Strathman |
| 264 | 1 | |a New York, NY |b American Institute of Physics |c 1987 | |
| 300 | |a S. 1661 - 1832 |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift 1987 San Juan Bautista Calif. |
| id | DE-604.BV011155606 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:04:56Z |
| institution | BVB |
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| language | English |
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| physical | S. 1661 - 1832 Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | American Institute of Physics |
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| series2 | Journal of vacuum science & technology / B |
| spelling | Workshop on Silicides and Metals for VLSI Applications 5 1987 San Juan Bautista, Calif. Verfasser (DE-588)810594-7 aut Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California special ed.: Michael D. Strathman New York, NY American Institute of Physics 1987 S. 1661 - 1832 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 5,6 Einzelaufn. e. Zeitschr.-Heftes Feuerfestigkeit (DE-588)4154266-6 gnd rswk-swf Metall (DE-588)4038860-8 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Siliciumverbindungen (DE-588)4124194-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 San Juan Bautista Calif. gnd-content VLSI (DE-588)4117388-0 s Siliciumverbindungen (DE-588)4124194-0 s DE-604 Feuerfestigkeit (DE-588)4154266-6 s Metall (DE-588)4038860-8 s Strathman, Michael D. Sonstige oth |
| spellingShingle | Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California Feuerfestigkeit (DE-588)4154266-6 gnd Metall (DE-588)4038860-8 gnd VLSI (DE-588)4117388-0 gnd Siliciumverbindungen (DE-588)4124194-0 gnd |
| subject_GND | (DE-588)4154266-6 (DE-588)4038860-8 (DE-588)4117388-0 (DE-588)4124194-0 (DE-588)1071861417 |
| title | Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California |
| title_auth | Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California |
| title_exact_search | Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California |
| title_full | Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California special ed.: Michael D. Strathman |
| title_fullStr | Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California special ed.: Michael D. Strathman |
| title_full_unstemmed | Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California special ed.: Michael D. Strathman |
| title_short | Proceedings of the Workshop on Silicides and Metals for VLSI Applications V |
| title_sort | proceedings of the workshop on silicides and metals for vlsi applications v 11 14 may 1987 st francis retreat center san juan bautista california |
| title_sub | 11 - 14 May 1987, St. Francis Retreat Center, San Juan Bautista, California |
| topic | Feuerfestigkeit (DE-588)4154266-6 gnd Metall (DE-588)4038860-8 gnd VLSI (DE-588)4117388-0 gnd Siliciumverbindungen (DE-588)4124194-0 gnd |
| topic_facet | Feuerfestigkeit Metall VLSI Siliciumverbindungen Konferenzschrift 1987 San Juan Bautista Calif. |
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