Processing of semiconductors:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Weinheim [u.a.]
VCH
1996
|
| Series: | Materials science and technology
16 |
| Subjects: | |
| Physical Description: | 689 S. Ill., graph. Darst. |
| ISBN: | 3527268294 |
Staff View
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| dewey-sort | 3620.1 |
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| discipline | Chemie / Pharmazie Physik Werkstoffwissenschaften Elektrotechnik Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV011076064 |
| illustrated | Illustrated |
| indexdate | 2025-02-20T06:37:31Z |
| institution | BVB |
| isbn | 3527268294 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007419863 |
| oclc_num | 36080318 |
| open_access_boolean | |
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| physical | 689 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | VCH |
| record_format | marc |
| series | Materials science and technology |
| series2 | Materials science and technology |
| spellingShingle | Processing of semiconductors Materials science and technology Epitaxie gtt Etstechnieken gtt Fotolithografie gtt Halfgeleiders gtt Micro-elektronica gtt Semiconducteurs ram Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 |
| title | Processing of semiconductors |
| title_auth | Processing of semiconductors |
| title_exact_search | Processing of semiconductors |
| title_full | Processing of semiconductors vol. ed. : Kenneth A. Jackson |
| title_fullStr | Processing of semiconductors vol. ed. : Kenneth A. Jackson |
| title_full_unstemmed | Processing of semiconductors vol. ed. : Kenneth A. Jackson |
| title_short | Processing of semiconductors |
| title_sort | processing of semiconductors |
| topic | Epitaxie gtt Etstechnieken gtt Fotolithografie gtt Halfgeleiders gtt Micro-elektronica gtt Semiconducteurs ram Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Epitaxie Etstechnieken Fotolithografie Halfgeleiders Micro-elektronica Semiconducteurs Semiconductors Halbleitertechnologie |
| volume_link | (DE-604)BV006632717 |
| work_keys_str_mv | AT jacksonkennetha processingofsemiconductors |
THWS Würzburg Zentralbibliothek Lesesaal
| Call Number: |
1000 ZM 2550 C132 |
|---|---|
| Copy 1 | ausleihbar Available Place a Hold |