Processing of semiconductors:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Weinheim [u.a.]
VCH
1996
|
| Schriftenreihe: | Materials science and technology
16 |
| Schlagworte: | |
| Beschreibung: | 689 S. Ill., graph. Darst. |
| ISBN: | 3527268294 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV011076064 | ||
| 003 | DE-604 | ||
| 005 | 20160913 | ||
| 007 | t | ||
| 008 | 961125s1996 ad|| |||| 00||| eng d | ||
| 020 | |a 3527268294 |9 3-527-26829-4 | ||
| 035 | |a (OCoLC)36080318 | ||
| 035 | |a (DE-599)BVBBV011076064 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-355 |a DE-384 |a DE-92 |a DE-91G |a DE-29T |a DE-M347 |a DE-863 |a DE-19 |a DE-703 |a DE-1046 |a DE-522 |a DE-11 | ||
| 050 | 0 | |a TA403 | |
| 082 | 0 | |a 620.1 |b MAT | |
| 084 | |a UQ 8000 |0 (DE-625)146584: |2 rvk | ||
| 084 | |a VN 6020 |0 (DE-625)147589:253 |2 rvk | ||
| 084 | |a ZM 2550 |0 (DE-625)157008: |2 rvk | ||
| 084 | |a ZM 3000 |0 (DE-625)157020: |2 rvk | ||
| 084 | |a ZN 5410 |0 (DE-625)157456: |2 rvk | ||
| 084 | |a ELT 072b |2 stub | ||
| 084 | |a ELT 270b |2 stub | ||
| 084 | |a WER 001b |2 stub | ||
| 245 | 1 | 0 | |a Processing of semiconductors |c vol. ed. : Kenneth A. Jackson |
| 264 | 1 | |a Weinheim [u.a.] |b VCH |c 1996 | |
| 300 | |a 689 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials science and technology |v 16 | |
| 650 | 7 | |a Epitaxie |2 gtt | |
| 650 | 7 | |a Etstechnieken |2 gtt | |
| 650 | 7 | |a Fotolithografie |2 gtt | |
| 650 | 7 | |a Halfgeleiders |2 gtt | |
| 650 | 7 | |a Micro-elektronica |2 gtt | |
| 650 | 7 | |a Semiconducteurs |2 ram | |
| 650 | 4 | |a Semiconductors | |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Jackson, Kenneth A. |e Sonstige |0 (DE-588)114714126 |4 oth | |
| 830 | 0 | |a Materials science and technology |v 16 |w (DE-604)BV006632717 |9 16 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-007419863 | ||
Datensatz im Suchindex
| DE-BY-863_location | 1000 |
|---|---|
| DE-BY-FWS_call_number | 1000/ZM 2550 C132 -16 |
| DE-BY-FWS_katkey | 153922 |
| DE-BY-FWS_media_number | 083100294969 |
| _version_ | 1806174152488386560 |
| any_adam_object | |
| author_GND | (DE-588)114714126 |
| building | Verbundindex |
| bvnumber | BV011076064 |
| callnumber-first | T - Technology |
| callnumber-label | TA403 |
| callnumber-raw | TA403 |
| callnumber-search | TA403 |
| callnumber-sort | TA 3403 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UQ 8000 VN 6020 ZM 2550 ZM 3000 ZN 5410 |
| classification_tum | ELT 072b ELT 270b WER 001b |
| ctrlnum | (OCoLC)36080318 (DE-599)BVBBV011076064 |
| dewey-full | 620.1 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.1 |
| dewey-search | 620.1 |
| dewey-sort | 3620.1 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Chemie / Pharmazie Physik Werkstoffwissenschaften Elektrotechnik Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01726nam a2200517 cb4500</leader><controlfield tag="001">BV011076064</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20160913 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">961125s1996 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3527268294</subfield><subfield code="9">3-527-26829-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)36080318</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011076064</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-355</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-M347</subfield><subfield code="a">DE-863</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-1046</subfield><subfield code="a">DE-522</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA403</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.1</subfield><subfield code="b">MAT</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UQ 8000</subfield><subfield code="0">(DE-625)146584:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">VN 6020</subfield><subfield code="0">(DE-625)147589:253</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 2550</subfield><subfield code="0">(DE-625)157008:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 3000</subfield><subfield code="0">(DE-625)157020:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 5410</subfield><subfield code="0">(DE-625)157456:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 072b</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 270b</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">WER 001b</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Processing of semiconductors</subfield><subfield code="c">vol. ed. : Kenneth A. Jackson</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Weinheim [u.a.]</subfield><subfield code="b">VCH</subfield><subfield code="c">1996</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">689 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials science and technology</subfield><subfield code="v">16</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Epitaxie</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Etstechnieken</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Fotolithografie</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Halfgeleiders</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Micro-elektronica</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconducteurs</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jackson, Kenneth A.</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)114714126</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials science and technology</subfield><subfield code="v">16</subfield><subfield code="w">(DE-604)BV006632717</subfield><subfield code="9">16</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-007419863</subfield></datafield></record></collection> |
| id | DE-604.BV011076064 |
| illustrated | Illustrated |
| indexdate | 2024-08-01T10:45:00Z |
| institution | BVB |
| isbn | 3527268294 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007419863 |
| oclc_num | 36080318 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR DE-384 DE-92 DE-91G DE-BY-TUM DE-29T DE-M347 DE-863 DE-BY-FWS DE-19 DE-BY-UBM DE-703 DE-1046 DE-522 DE-11 |
| owner_facet | DE-355 DE-BY-UBR DE-384 DE-92 DE-91G DE-BY-TUM DE-29T DE-M347 DE-863 DE-BY-FWS DE-19 DE-BY-UBM DE-703 DE-1046 DE-522 DE-11 |
| physical | 689 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | VCH |
| record_format | marc |
| series | Materials science and technology |
| series2 | Materials science and technology |
| spellingShingle | Processing of semiconductors Materials science and technology Epitaxie gtt Etstechnieken gtt Fotolithografie gtt Halfgeleiders gtt Micro-elektronica gtt Semiconducteurs ram Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 |
| title | Processing of semiconductors |
| title_auth | Processing of semiconductors |
| title_exact_search | Processing of semiconductors |
| title_full | Processing of semiconductors vol. ed. : Kenneth A. Jackson |
| title_fullStr | Processing of semiconductors vol. ed. : Kenneth A. Jackson |
| title_full_unstemmed | Processing of semiconductors vol. ed. : Kenneth A. Jackson |
| title_short | Processing of semiconductors |
| title_sort | processing of semiconductors |
| topic | Epitaxie gtt Etstechnieken gtt Fotolithografie gtt Halfgeleiders gtt Micro-elektronica gtt Semiconducteurs ram Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Epitaxie Etstechnieken Fotolithografie Halfgeleiders Micro-elektronica Semiconducteurs Semiconductors Halbleitertechnologie |
| volume_link | (DE-604)BV006632717 |
| work_keys_str_mv | AT jacksonkennetha processingofsemiconductors |
THWS Würzburg Zentralbibliothek Lesesaal
| Signatur: |
1000 ZM 2550 C132 |
|---|---|
| Exemplar 1 | ausleihbar Verfügbar Bestellen |