Stress induced phenomena in metallization: third international workshop, Palo Alto, CA, June 1995
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York
AIP Press
1996
|
| Schriftenreihe: | American Institute of Physics <New York, NY>: AIP conference proceedings
373 |
| Schlagworte: | |
| Beschreibung: | VII, 304 S. Ill., graph. Darst. |
| ISBN: | 1563964392 |
Internformat
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| 246 | 1 | 3 | |a Stress-induced phenomena in metallization |
| 264 | 1 | |a New York |b AIP Press |c 1996 | |
| 300 | |a VII, 304 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a American Institute of Physics <New York, NY>: AIP conference proceedings |v 373 | |
| 650 | 4 | |a Couches minces d'aluminium - Congrès | |
| 650 | 4 | |a Couches minces métalliques - Congrès | |
| 650 | 7 | |a Couches minces semiconductrices - Congrès |2 ram | |
| 650 | 4 | |a Dispositifs à couches minces - Défauts - Congrès | |
| 650 | 7 | |a Microélectronique - Congrès |2 ram | |
| 650 | 4 | |a Métallisation - Congrès | |
| 650 | 4 | |a Semiconducteurs - Défauts - Congrès | |
| 650 | 4 | |a Électromigration - Congrès | |
| 650 | 4 | |a Aluminum films |x Defects |v Congresses | |
| 650 | 4 | |a Electrodiffusion |v Congresses | |
| 650 | 4 | |a Integrated circuits |x Defects |v Congresses | |
| 650 | 4 | |a Interconnects (Integrated circuit technology) |x Defects |v Congresses | |
| 650 | 4 | |a Metallic films |x Defects |v Congresses | |
| 650 | 4 | |a Metallizing |v Congresses | |
| 650 | 4 | |a Semiconductors |x Defects |v Congresses | |
| 650 | 4 | |a Thin film devices |x Defects |v Congresses | |
| 650 | 0 | 7 | |a Stress |0 (DE-588)4058047-7 |2 gnd |9 rswk-swf |
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-007410438 | ||
Datensatz im Suchindex
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| classification_rvk | UP 7560 |
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| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
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| genre_facet | Konferenzschrift 1995 Palo Alto Calif. |
| id | DE-604.BV011064493 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:03:23Z |
| institution | BVB |
| isbn | 1563964392 |
| language | English |
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| physical | VII, 304 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | AIP Press |
| record_format | marc |
| series | American Institute of Physics <New York, NY>: AIP conference proceedings |
| series2 | American Institute of Physics <New York, NY>: AIP conference proceedings |
| spelling | Stress induced phenomena in metallization third international workshop, Palo Alto, CA, June 1995 eds.: Paul S. Ho ... Stress-induced phenomena in metallization New York AIP Press 1996 VII, 304 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier American Institute of Physics <New York, NY>: AIP conference proceedings 373 Couches minces d'aluminium - Congrès Couches minces métalliques - Congrès Couches minces semiconductrices - Congrès ram Dispositifs à couches minces - Défauts - Congrès Microélectronique - Congrès ram Métallisation - Congrès Semiconducteurs - Défauts - Congrès Électromigration - Congrès Aluminum films Defects Congresses Electrodiffusion Congresses Integrated circuits Defects Congresses Interconnects (Integrated circuit technology) Defects Congresses Metallic films Defects Congresses Metallizing Congresses Semiconductors Defects Congresses Thin film devices Defects Congresses Stress (DE-588)4058047-7 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Palo Alto Calif. gnd-content Metallisieren (DE-588)4169599-9 s Stress (DE-588)4058047-7 s DE-604 Ho, Paul S. Sonstige oth American Institute of Physics <New York, NY>: AIP conference proceedings 373 (DE-604)BV001899984 373 |
| spellingShingle | Stress induced phenomena in metallization third international workshop, Palo Alto, CA, June 1995 American Institute of Physics <New York, NY>: AIP conference proceedings Couches minces d'aluminium - Congrès Couches minces métalliques - Congrès Couches minces semiconductrices - Congrès ram Dispositifs à couches minces - Défauts - Congrès Microélectronique - Congrès ram Métallisation - Congrès Semiconducteurs - Défauts - Congrès Électromigration - Congrès Aluminum films Defects Congresses Electrodiffusion Congresses Integrated circuits Defects Congresses Interconnects (Integrated circuit technology) Defects Congresses Metallic films Defects Congresses Metallizing Congresses Semiconductors Defects Congresses Thin film devices Defects Congresses Stress (DE-588)4058047-7 gnd Metallisieren (DE-588)4169599-9 gnd |
| subject_GND | (DE-588)4058047-7 (DE-588)4169599-9 (DE-588)1071861417 |
| title | Stress induced phenomena in metallization third international workshop, Palo Alto, CA, June 1995 |
| title_alt | Stress-induced phenomena in metallization |
| title_auth | Stress induced phenomena in metallization third international workshop, Palo Alto, CA, June 1995 |
| title_exact_search | Stress induced phenomena in metallization third international workshop, Palo Alto, CA, June 1995 |
| title_full | Stress induced phenomena in metallization third international workshop, Palo Alto, CA, June 1995 eds.: Paul S. Ho ... |
| title_fullStr | Stress induced phenomena in metallization third international workshop, Palo Alto, CA, June 1995 eds.: Paul S. Ho ... |
| title_full_unstemmed | Stress induced phenomena in metallization third international workshop, Palo Alto, CA, June 1995 eds.: Paul S. Ho ... |
| title_short | Stress induced phenomena in metallization |
| title_sort | stress induced phenomena in metallization third international workshop palo alto ca june 1995 |
| title_sub | third international workshop, Palo Alto, CA, June 1995 |
| topic | Couches minces d'aluminium - Congrès Couches minces métalliques - Congrès Couches minces semiconductrices - Congrès ram Dispositifs à couches minces - Défauts - Congrès Microélectronique - Congrès ram Métallisation - Congrès Semiconducteurs - Défauts - Congrès Électromigration - Congrès Aluminum films Defects Congresses Electrodiffusion Congresses Integrated circuits Defects Congresses Interconnects (Integrated circuit technology) Defects Congresses Metallic films Defects Congresses Metallizing Congresses Semiconductors Defects Congresses Thin film devices Defects Congresses Stress (DE-588)4058047-7 gnd Metallisieren (DE-588)4169599-9 gnd |
| topic_facet | Couches minces d'aluminium - Congrès Couches minces métalliques - Congrès Couches minces semiconductrices - Congrès Dispositifs à couches minces - Défauts - Congrès Microélectronique - Congrès Métallisation - Congrès Semiconducteurs - Défauts - Congrès Électromigration - Congrès Aluminum films Defects Congresses Electrodiffusion Congresses Integrated circuits Defects Congresses Interconnects (Integrated circuit technology) Defects Congresses Metallic films Defects Congresses Metallizing Congresses Semiconductors Defects Congresses Thin film devices Defects Congresses Stress Metallisieren Konferenzschrift 1995 Palo Alto Calif. |
| volume_link | (DE-604)BV001899984 |
| work_keys_str_mv | AT hopauls stressinducedphenomenainmetallizationthirdinternationalworkshoppaloaltocajune1995 AT hopauls stressinducedphenomenainmetallization |