Ellipsometry and polarized light:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam u.a.
North-Holland
1996
|
| Ausgabe: | 3. impression |
| Schriftenreihe: | North-Holland personal library
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVII, 539 S. graph. Darst. |
| ISBN: | 0444870164 |
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Datensatz im Suchindex
| _version_ | 1804125522663309312 |
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| adam_text | ELLIPSOMETRY AND POLARIZED LIGHT R.M.A.AZZAM DEPARTMENT OF ELECTRICAL
ENGINEERING UNIVERSITY OF NEW ORLEANS LAKEFRONT, NEW ORLEANS, LOUISIANA,
USA AND N.M. * ASH AR A ELECTRICAL MATERIALS LABORATORY, ENGINEERING
RESEARCH CENTER, COLLEGE OF ENGINEERING, UNIVERSITY OF NEBRASKA,
LINCOLN, USA NIL JJFFL M ELSEVIER AMSTERDAM * LAUSANNE * NEW YORK *
OXFORD * SHANNON * TOKYO CONTENTS PREFACE ** THE PAPERBACK EDITION V
PREFACE VI ACKNOWLEDGEMENTS VIII CONTENTS XI CHAPTER L. THE POLARIZATION
OF LIGHT WAVES 1 1.1. THE CONCEPT OF POLARIZATION 1 1.2. POLYCHROMATIC
AND MONOCHROMATIC WAVES OF LIGHT 2 1.3. POLARIZATION OF MONOCHROMATIC
WAVES OF ARBITRARY SPATIAL STRUCTURE . . 2 1.3.1. ELLIPTICAL
POLARIZATION 6 1.3.2. LINEAR AND CIRCULAR POLARIZATIONS 9 1.4. THE
PHASOR (COMPLEX) REPRESENTATION OF TIME-HARMONIC FIELDS 10 1.5. UNIFORM
** PLANE WAVES OF LIGHT 11 1.6. THE JONES VECTOR OF A UNIFORM ** PLANE
WAVE 13 1.6.1. WAVE INTENSITY 16 1.6.2. JONES VECTORS OF SOME STATES OF
POLARIZATION 17 1.6.3. ORTHOGONAL AND ORTHONORMAL PAIRS OF JONES VECTORS
19 1.6.4. TRANSFORMATION OF THE JONES VECTOR UNDER THE EFFECT OF A
COORDINATE ROTATION 19 1.6.5. BASIS JONES VECTORS AND BASIS STATES OF
POLARIZATION 22 1.6.5.1. CARTESIAN BASIS VECTORS 22 1.6.5.2. CIRCULAR
BASIS VECTORS 22 1.6.5.3. ARBITRARY BASIS VECTORS 25 1.6.6. THE
CARTESIAN AND CIRCULAR JONES VECTORS OF A GIVEN ELLIPTICAL POLARIZATION
STATE 26 1.7. REPRESENTATION OF THE POLARIZATION STATES OF LIGHT BY
COMPLEX NUMBERS 28 1.7.1. THE CARTESIAN COMPLEX-PLANE REPRESENTATION OF
POLARIZED LIGHT 28 1.7.1.1. ORTHOGONAL STATES 30 1.7.1.2. EQUI-AZIMUTH
AND EQUI-ELLIPTICITY CONTOURS 33 XLL CONTENTS 1.7.2. THE CIRCULAR
COMPLEX-PLANE REPRESENTATION OF POLARIZED LIGHT . . 39 1.7.3. THE
GENERALIZED COMPLEX-PLANE REPRESENTATION OF POLARIZED LIGHT 43 1.8. THE
POINCARE-SPHERE REPRESENTATION OF POLARIZED LIGHT 47 1.9. THE
POLARIZATION OF QUASI-MONOCHROMATIC WAVES 52 1.9.1. THE JONES VECTOR OF
A QUASI-MONOCHROMATIC WAVE 53 1.9.2. THE STOKES PARAMETERS AND THE
STOKES VECTOR 55 1.9.3. THE COHERENCY-MATRIX REPRESENTATION 60 CHAPTER
2. PROPAGATION OF POLARIZED LIGHT THROUGH POLARIZING OPTICAL SYSTEMS 66
2.1. POLARIZING OPTICAL SYSTEMS 66 2.2. THE JONES-MATRIX FORMULATION . .
67 2.2.1. THE SIGNIFICANCE OF THE ELEMENTS ** OF THE JONES MATRIX . . .
. 69 2.2.2. CASCADE OF OPTICAL SYSTEMS 70 2.2.3. JONES MATRICES OF BASIC
OPTICAL DEVICES 72 2.2.3.1. TRANSMISSION-TYPE DEVICES 72 2.2.3.2.
REFLECTION-TYPE DEVICES 77 2.2.4. TRANSFORMATION OF THE CARTESIAN JONES
MATRIX UNDER THE EFFECT OF A COORDINATE ROTATION 79 2.2.5. CIRCULAR AND
GENERALIZED JONES MATRICES 81 2.3. SEPARABILITY OF INFORMATION ON THE
ELLIPSE OF POLARIZATION IN THE JONES- MATRIX FORMULATION-THE
POLARIZATION TRANSFER FUNCTION 84 2.4. TRANSFORMATION OF THE ELLIPSE OF
POLARIZATION BY AN OPTICAL SYSTEM IN THE COMPLEX-PLANE REPRESENTATION 85
2.5. TRANSFORMATION OF POLARIZATION BY AN OPTICAL SYSTEM IN THE
POINCARE- SPHERE REPRESENTATION 92 2.6. SEPARABILITY OF INFORMATION ON
AMPLITUDE AND PHASE IN THE JONES-MATRIX FORMULATION-THE AMPLITUDE AND
PHASE TRANSFER FUNCTIONS 94 2.6.1. THE EIGENVALUE PROBLEM-GENERAL
CLASSIFICATION OF OPTICAL DE VICES 97 2.6.1.1. ELLIPTIC RETARDERS 98
2.6.1.2. ELLIPTIC PARTIAL POLARIZERS 100 2.6.1.3. ELLIPTIC IDEAL
POLARIZERS 101 2.6.1.4. OTHERDEVICES 102 2.7. POLARIZATION-DEPENDENT
INTENSITY TRANSMITTANCE OF OPTICAL SYSTEMS . . 103 2.7.1. LOCI OF
POLARIZATION STATES OF EQUAL ATTENUATION OR AMPLIFICATION . 103 2.7.2.
SIMPLIFIED EXPRESSIONS FOR THE INTENSITY TRANSMITTANCE 107 2.7.3.
GENERALIZATION OF THE LAW OF MALUS 110 2.7.4. SPECIAL CASES OF OPTICAL
SYSTEMS ILL 2.8. RESOLUTION OF AN ARBITRARY POLARIZATION STATE INTO TWO
GIVEN ORTHOGONAL STATES IN THE COMPLEX-PLANE REPRESENTATION . . . . . .
. . . . . . . 113 2.8.1. NEARNESS OF TWO POLARIZATION STATES IN THE
COMPLEX-PLANE REPRESEN TATION 113 CONTENTS XUEI 2.8.2. RESOLUTION OF AN
ARBITRARY POLARIZATION STATE INTO TWO GIVEN OR- THOGONAL STATES IN THE
POINCARE-SPHERE REPRESENTATION 116 2.9. POLARIZATION-DEPENDENT PHASE
SHIFT INTRODUCED BY AN OPTICAL SYSTEM . . 117 2.10. PROPAGATION OF
POLARIZED LIGHT IN ANISOTROPIC MEDIA 119 2.10.1. EVOLUTION OF THE
ELLIPSE OF POLARIZATION 122 2.10.1.1. THE CASE OF HOMOGENEOUS
ANISOTROPIC MEDIA . . . . 123 2.10.1.2. THE CASE OF INHOMOGENEOUS
ANISOTROPIC MEDIA . . . . 131 2.10.2. EVOLUTION OF THE COMPLEX AMPLITUDE
137 2.11. PROPAGATION OF PARTIALLY POLARIZED QUASI-MONOCHROMATIC LIGHT
THROUGH NON-DEPOLARIZING OPTICAL SYSTEMS-THE COHERENCY-MATRIX
FORMULATION . 141 2.11.1. INTENSITY TRANSMITTANCE OF A LINEAR
NON-DEPOLARIZING OPTICAL SYS- TEM FOR PARTIALLY POLARIZED INCIDENT LIGHT
144 2.12. PROPAGATION OF PARTIALLY POLARIZED QUASI-MONOCHROMATIC LIGHT
THROUGH DEPOLARIZING OPTICAL SYSTEMS-THE MUELLER-MATRIX FORMULATION . .
. . 148 CHAPTER 3. THEORY AND ANALYSIS OF MEASUREMENTS IN ELLIPSOMETER
SYSTEMS 153 3.1. INTRODUCTION 153 3.2. ELLIPSOMETRIC MEASUREMENT OF THE
JONES MATRIX OF AN OPTICAL SYSTEM-THE BASIS OF GENERALIZED ELLIPSOMETRY
156 3.3. ELLIPSOMETRY ON OPTICAL SYSTEMS WITH KNOWN EIGENPOLARIZATIONS .
. . . 158 3.4. ELLIPSOMETRIC MEASUREMENT OF THE RATIO OF EIGENVALUES OF
AN OPTICAL SYSTEM WITH ORTHOGONAL LINEAR EIGENPOLARIZATIONS 159 3.4.1.
NULL ELLIPSOMETRY 166 3.4.2. THE FIXED-COMPENSATOR-AZIMUTH NULLING
SCHEME WITH C = W, ** SC = - TT AND TC = 1 167 3.4.3. ALTERNATE
ELLIPSOMETER ARRANGEMENT WITH THE COMPENSATOR PLACED AFTER THE OPTICAL
SYSTEM 169 3.4.4. THE RATIO OF EIGENVALUES PS IN REFLECTION AND
TRANSMISSION ELLIPSOMETRY 173 3.4.5. UNIFIED TREATMENT OF THE PCSA AND
PSCA ELLIPSOMETER ARRANGEMENTS-EXAMPLE OF THE APPLICATION OF THE
BILINEAR POLARIZA- TION TRANSFER FUNCTION 175 3.5. ELLIPSOMETRIC
MEASUREMENT OF THE RATIO OF EIGENVALUES OF AN OPTICAL SYSTEM WITH
ORTHOGONAL CIRCULAR EIGENPOLARIZATIONS 180 3.6. ELLIPSOMETRIC
MEASUREMENT OF THE RATIO OF EIGENVALUES OF AN OPTICAL SYSTEM WITH
ELLIPTIC EIGENPOLARIZATIONS 184 3.7. EFFECT OF AZIMUTH-ANGLE ERRORS AND
COMPONENT IMPERFECTIONS ON THE ELLIPSOMETRIC MEASUREMENT OF PS 186
3.7.1. THE IMPERFECTION PLATE OF A NON-IDEAL OPTICAL COMPONENT . . . .
189 3.7.2. TRANSPOSITION OF TWO OPTICAL COMPONENTS 191 3.7.3. THE
PCWSW A ELLIPSOMETER ARRANGEMENT 192 XIV CONTENTS 3.7.3.1. AZIMUTH-ANGLE
ERRORS 193 3.7.3.2. COMPONENT IMPERFECTIONS 195 3.7.3.3. ERRORS IN THE
ELLIPSOMETRIC ANGLES * AND * 202 3.7.3.4. TWO-ZONE AVERAGES 208 3.7.3.5.
FOUR-ZONE AVERAGES 210 3.7.3.6. CHOICE OF COMPENSATOR AZIMUTH AND
POSITION 211 3.8. EUIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING
INCOHERENT EFFECTS . 213 3.8.1. APPLICATION TO THE PCWSW A ELLIPSOMETER
ARRANGEMENT . . . 216 3.8.1.1. POLARIZER AND ANALYZER IMPERFECTIONS 219
3.8.1.2. COMPENSATOR IMPERFECTION 224 3.8.1.3. ENTRANCE-WINDOW, SYSTEM,
AND EXIT-WINDOW IMPERFEC TIONS 225 3.8.2. ZONE AVERAGING 226 3.8.3.
COMPONENT DEPOLARIZATION 229 3.8.4. DISCUSSION 231 3.9. GENERALIZED
ELLIPSOMETRY 233 3.9.1. THE POLARIZER-COMPENSATOR COMBINATION AS A
CONTROLLED POLARIZA- TIONFILTER 234 3.9.2. NULLING SCHEMES AND
CONDITIONS OF COMPENSATION 238 3.9.2.1. THE FIXED-ANALYZER NULLING
SCHEME 239 3.9.2.2. THE FIXED-COMPENSATOR NULLING SCHEME 240 3.9.2.3.
THE FIXED-POLARIZER NULLING SCHEME 242 3.9.3. MULTIPLE-NULL MEASUREMENTS
245 3.9.4. ALTERNATE PSCA ELLIPSOMETER ARRANGEMENT 246 3.10. OTHER
ELLIPSOMETER ARRANGEMENTS 247 3.10.1. NULL ELLIPSOMETERS THAT DO NOT
EMPLOY COMPENSATORS 248 3.10.1.1. AN ELLIPSOMETER BASED ON THE DETECTION
OF THE AZIMUTH OF THE POLARIZATION ELLIPSE ONLY, WITH NO MEASUREMENT OF
ELLIPTICITY 248 3.10.1.2. SELF-COMPENSATED ELLIPSOMETERS BASED ON THE
ANGLE-OF- INCIDENCE TUNABILITY OF THE REFLECTION PHASE DIFFERENCE * 251
3.10.2. PHOTOMETRIC ELLIPSOMETERS 255 3.10.2.1. STATIC PHOTOMETRIC
ELLIPSOMETERS 256 3.10.2.2. DYNAMIC PHOTOMETRIC ELLIPSOMETERS 257
3.10.3. INTERFEROMETRIC ELLIPSOMETERS (IE) 262 3.11. MODULATED
ELLIPSOMETRY 265 3.11.1. PSA ARRANGEMENT 266 3.11.2. PCSA ARRANGEMENT
267 CHAPTER 4. REFLECTION AND TRANSMISSION OF POLARIZED LIGHT BY
STRATIFIED PLANAR STRUCTURES 269 4.1. INTRODUCTION 269 CONTENTS XV 4.2.
REFLECTION AND REFRACTION AT THE PLANAR INTERFACE BETWEEN TWO ISOTROPIC
MEDIA 270 4.3. REFLECTION AND TRANSMISSION BY AN AMBIENT-FILM-SUBSTRATE
SYSTEM . . . 283 4.4. THE EQUATIONS OF REFLECTION AND TRANSMISSION
ELLIPSOMETRY FOR AMBIENT- FILM-SUBSTRATE SYSTEMS 288 4.4.1. REFLECTION
ELLIPSOMETRY 288 4.4.1.1. CONSTANT-ANGLE-OF-INCIDENCE CONTOURS (CAIC) OF
THE EL- LIPSOMETRIC FUNCTION ** ,*) 289 4.4.1.2. CONSTANT-THICKNESS
CONTOURS (CTC) OF THE ELLIPSOMETRIC FUNCTION *(*, D) . . 293 4.4.1.3.
CARTESIAN CURVES 298 4.4.2. TRANSMISSION ELLIPSOMETRY 299 4.4.3. LINEAR
APPROXIMATION OF THE EQUATIONS OF REFLECTION AND TRANSMIS SION
ELLIPSOMETRY FOR AMBIENT-FILM-SUBSTRATE SYSTEMS 301 4.4.3.1. REFLECTION
301 4.4.3.2. TRANSMISSION 304 4.4.3.3. * AND * SENSITIVITY FACTORS 305
4.4.3.4. VALIDITY OF THE LINEAR APPROXIMATIONS 312 4.5. NUMERICAL
INVERSION OF THE EXACT EQUATION OF REFLECTION ELLIPSOMETRY . . 315
4.5.1. CASES THAT ALLOW ANALYTICAL INVERSION 315 4.5.2. GENERAL
FORMULATION OF THE NUMERICAL-INVERSION PROBLEM AND CHOICE OF ERROR
FUNCTION 317 4.5.3. MULTIPLE-ANGLE-OF-INCIDENCE (MAI) ELLIPSOMETRY 320
4.5.3.1. INDEPENDENCE (OR INTERDEPENDENCE) OF THE MAI SYSTEM OF
EQUATIONS: THE PARAMETER CORRELATION TEST 321 4.5.3.2. THE HESSIAN
MATRIX AND RATE OF CONVERGENCE 324 4.5.3.3. THE AIR-SI0 2 -SI SYSTEM -
AN EXAMPLE 326 4.6. REFLECTION AND TRANSMISSION BY ISOTROPIC STRATIFIED
PLANAR STRUCTURES . . 332 4.7. REFLECTION AND TRANSMISSION BY
ANISOTROPIC STRATIFIED PLANAR STRUCTURES . 340 4.7.1. REFLECTION AND
TRANSMISSION BY A FINITE ANISOTROPIC LAYER BETWEEN SEMI-INFINITE
ISOTROPIC AMBIENT AND SUBSTRATE MEDIA 348 4.7.2. REFLECTION AND
TRANSMISSION BY A SEMI-INFINITE ANISOTROPIC SUBSTRATE IN AN ISOTROPIC
AMBIENT 352 4.7.3. EXPLICIT EXPRESSIONS FOR THE REFLECTION MATRIX IN
SIMPLE SPECIAL CASES 354 4.7.3.1. ISOTROPIC AMBIENT AND UNIAXIALLY
ANISOTROPIC SUBSTRATE . 354 4.7.3.2. ISOTROPIC AMBIENT AND BIAXIALLY
ANISOTROPIC SUBSTRATE . . 355 4.7.3.3. UNIAXIALLY ANISOTROPIC FILM ON AN
ISOTROPIC SUBSTRATE IN AN ISOTROPIC AMBIENT 356 4.7.3.4. BIAXIALLY
ANISOTROPIC FILM ON AN ISOTROPIC SUBSTRATE IN AN ISOTROPIC AMBIENT 357
4.7.3.5. UNIAXIAL FILM ON A UNIAXIAL SUBSTRATE IN AN ISOTROPIC AM BIENT
358 4.8. ELLIPSOMETRY ON SURFACES COVERED WITH DISCONTINUOUS FILMS AND
ON SUR FACES WITH ROUGH BOUNDARIES 359 XVJ CONTENTS CHAPTER 5.
INSTRUMENTATION AND TECHNIQUES OF ELLIPSOMETRY 364 5.1. INTRODUCTION 364
5.2. THE BASIC INSTRUMENT-THE NULL ELLIPSOMETER 364 5.2.1. THE OPTICAL
DEVICES . 366 5.2.1.1. LINEAR POLARIZERS 367 5.2.1.2. RETARDERS 370
5.2.1.3. OTHER POLARIZING OPTICAL DEVICES 372 5.2.2. OPTICAL COMPONENTS
OF AN ELLIPSOMETER THAT PERFORM NO POLARIZING FUNCTION 373 5.2.3. LIGHT
SOURCES AND DETECTORS 375 5.3. OPERATION OF THE NULL ELLIPSOMETER 376
5.3.1. ALIGNMENT OF THE TELESCOPES 376 5.3.2. CALIBRATION OF THE
ELLIPSOMETER DIVIDED CIRCLES 380 5.3.3. NULLING SCHEMES 385 5.4. SOURCES
OF ERROR AND THEIR CORRECTION 386 5.4.1. AZIMUTH-ANGLE ERRORS, COMPONENT
AND CELL-WINDOW IMPERFEC- TIONS 388 5.4.2. MEASUREMENT OF ELLIPSOMETER
IMPERFECTION PARAMETERS . . . . 389 5.4.3. BEAM DEVIATION ERRORS 392
5.4.4. EFFECT OF AUTO-COLLIMATED PARASITIC BEAMS FROM MULTIPLE REFLEC-
TIONS 397 5.4.5. ERRORS THAT ARISE FROM CERTAIN ASSUMPTIONS CONCERNING
THE ELLIP- SOMETER LIGHT BEAM 398 5.4.5.1. BANDWIDTH 398 5.4.5.2. SOURCE
POLARIZATION AND COMPONENT DEPOLARIZATION . . . 398 5.4.5.3. COLLIMATION
AND NON-UNIFORM POLARIZATION 400 5.4.6. POLARIZATION-DEPENDENT
PHOTODETECTOR SENSITIVITY 401 5.4.7. RESIDUAL MECHANICAL IMPERFECTIONS
402 5.4.8. OTHERERRORS 402 5.4.9. MODEL ERRORS 402 5.5. PRECISION OF
NULL ELLIPSOMETERS 403 5.6. AUTOMATION OF NULL ELLIPSOMETERS 405 5.6.1.
MOTOR-DRIVEN SELF-NULLED ELLIPSOMETERS 406 5.6.2. ELECTRO-OPTIC
SELF-NULLED ELLIPSOMETERS 408 5.7. AUTOMATIC PHOTOMETRIC ELLIPSOMETERS
411 5.7.1. THE ROTATING-ANALYZER ELLIPSOMETER 411 5.7.2. THE
POLARIZATION-MODULATED ELLIPSOMETER 415 CHAPTER 6. APPLICATIONS OF
ELLIPSOMETRY 417 6.1. INTRODUCTION 417 6.2. OPTICAL PROPERTIES OF
MATERIALS AND SPECTROSCOPIC ELLIPSOMETRY . . . . 417 6.2.1. OPTICAL
PROPERTIES OF MATERIALS IN BULK PHASE 417 6.2.2. OPTICAL PROPERTIES OF
MATERIALS IN THIN-FILM PHASE 428 CONTENTS XVUE 6.3. PHYSICAL AND CHEMICAL
ADSORPTION 433 6.4. OXIDATION OF SEMICONDUCTOR AND METAL SURF ACES 443
6.5. ELECTROCHEMISTRY 452 6.6. APPLICATIONS OF ELLIPSOMETRY IN BIOLOGY
AND MEDICINE 464 6.6.1. INTERACTION OF BLOOD WITH FOREIGN SURFACES-BLOOD
COAGULATION . 465 6.6.2. ANTIGEN-ANTIBODY IMMUNOLOGICAL REACTIONS IN
THIN FILMS . . . . 466 6.6.3. THE IMMUNOELECTROADSORPTION TEST 468
6.6.4. MEASUREMENT OF CELL-SURFACE (COAT) MATERIALS 469 6.7. OTHER
APPLICATIONS OF ELLIPSOMETRY 473 APPENDIX 487 REFERENCES 493 LISTINGS OF
THE CONTENTS OF THE INTERNATIONAL ELLIPSOMETRY CONFERENCES 501 AUTHOR
INDEX 517 SUBJECT INDEX 522
|
| any_adam_object | 1 |
| author | Azzam, Rasheed M. Bashara, Nicholas M. |
| author_facet | Azzam, Rasheed M. Bashara, Nicholas M. |
| author_role | aut aut |
| author_sort | Azzam, Rasheed M. |
| author_variant | r m a rm rma n m b nm nmb |
| building | Verbundindex |
| bvnumber | BV011032291 |
| classification_rvk | UP 8300 |
| ctrlnum | (OCoLC)614409925 (DE-599)BVBBV011032291 |
| discipline | Physik |
| edition | 3. impression |
| format | Book |
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| id | DE-604.BV011032291 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:02:54Z |
| institution | BVB |
| isbn | 0444870164 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007387360 |
| oclc_num | 614409925 |
| open_access_boolean | |
| owner | DE-384 DE-634 DE-83 DE-11 |
| owner_facet | DE-384 DE-634 DE-83 DE-11 |
| physical | XVII, 539 S. graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | North-Holland |
| record_format | marc |
| series2 | North-Holland personal library |
| spelling | Azzam, Rasheed M. Verfasser aut Ellipsometry and polarized light R. M. A. Azzam and N. M. Bashara 3. impression Amsterdam u.a. North-Holland 1996 XVII, 539 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier North-Holland personal library Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Optik (DE-588)4043650-0 gnd rswk-swf Optisches Instrument (DE-588)4140457-9 gnd rswk-swf Reflexion Physik (DE-588)4177333-0 gnd rswk-swf Polarisiertes Licht (DE-588)4278185-1 gnd rswk-swf Transmission Physik (DE-588)4275767-8 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 s Polarisiertes Licht (DE-588)4278185-1 s DE-604 Optik (DE-588)4043650-0 s 1\p DE-604 Transmission Physik (DE-588)4275767-8 s 2\p DE-604 Optisches Instrument (DE-588)4140457-9 s 3\p DE-604 Reflexion Physik (DE-588)4177333-0 s 4\p DE-604 Bashara, Nicholas M. Verfasser aut GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007387360&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Azzam, Rasheed M. Bashara, Nicholas M. Ellipsometry and polarized light Ellipsometrie (DE-588)4152025-7 gnd Optik (DE-588)4043650-0 gnd Optisches Instrument (DE-588)4140457-9 gnd Reflexion Physik (DE-588)4177333-0 gnd Polarisiertes Licht (DE-588)4278185-1 gnd Transmission Physik (DE-588)4275767-8 gnd |
| subject_GND | (DE-588)4152025-7 (DE-588)4043650-0 (DE-588)4140457-9 (DE-588)4177333-0 (DE-588)4278185-1 (DE-588)4275767-8 |
| title | Ellipsometry and polarized light |
| title_auth | Ellipsometry and polarized light |
| title_exact_search | Ellipsometry and polarized light |
| title_full | Ellipsometry and polarized light R. M. A. Azzam and N. M. Bashara |
| title_fullStr | Ellipsometry and polarized light R. M. A. Azzam and N. M. Bashara |
| title_full_unstemmed | Ellipsometry and polarized light R. M. A. Azzam and N. M. Bashara |
| title_short | Ellipsometry and polarized light |
| title_sort | ellipsometry and polarized light |
| topic | Ellipsometrie (DE-588)4152025-7 gnd Optik (DE-588)4043650-0 gnd Optisches Instrument (DE-588)4140457-9 gnd Reflexion Physik (DE-588)4177333-0 gnd Polarisiertes Licht (DE-588)4278185-1 gnd Transmission Physik (DE-588)4275767-8 gnd |
| topic_facet | Ellipsometrie Optik Optisches Instrument Reflexion Physik Polarisiertes Licht Transmission Physik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007387360&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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