Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | German |
| Veröffentlicht: |
1996
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| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | München, Techn. Univ., Diss., 1996 |
| Beschreibung: | VIII, 200 S. Ill., graph. Darst. |
Internformat
MARC
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Datensatz im Suchindex
| _version_ | 1804125402938998784 |
|---|---|
| any_adam_object | 1 |
| author | Scheiter, Thomas |
| author_facet | Scheiter, Thomas |
| author_role | aut |
| author_sort | Scheiter, Thomas |
| author_variant | t s ts |
| building | Verbundindex |
| bvnumber | BV010910799 |
| classification_tum | FER 792d |
| ctrlnum | (OCoLC)164820547 (DE-599)BVBBV010910799 |
| discipline | Fertigungstechnik |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV010910799 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:01:00Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007298710 |
| oclc_num | 164820547 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-12 DE-29T DE-83 DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-12 DE-29T DE-83 DE-11 |
| physical | VIII, 200 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| record_format | marc |
| spelling | Scheiter, Thomas Verfasser aut Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung Thomas Scheiter 1996 VIII, 200 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier München, Techn. Univ., Diss., 1996 Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf BICMOS (DE-588)4234781-6 gnd rswk-swf Kapazitiver Sensor (DE-588)4209035-0 gnd rswk-swf CMOS-Schaltung (DE-588)4148111-2 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Integrierter Sensor (DE-588)4235815-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Mikromechanik (DE-588)4205811-9 s Halbleitertechnologie (DE-588)4158814-9 s DE-604 Kapazitiver Sensor (DE-588)4209035-0 s Integrierter Sensor (DE-588)4235815-2 s BICMOS (DE-588)4234781-6 s Siliciumbauelement (DE-588)4181368-6 s VLSI (DE-588)4117388-0 s Sensor (DE-588)4038824-4 s 1\p DE-604 CMOS-Schaltung (DE-588)4148111-2 s 2\p DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007298710&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Scheiter, Thomas Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung Halbleitertechnologie (DE-588)4158814-9 gnd Mikromechanik (DE-588)4205811-9 gnd VLSI (DE-588)4117388-0 gnd BICMOS (DE-588)4234781-6 gnd Kapazitiver Sensor (DE-588)4209035-0 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Sensor (DE-588)4038824-4 gnd Siliciumbauelement (DE-588)4181368-6 gnd Integrierter Sensor (DE-588)4235815-2 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4205811-9 (DE-588)4117388-0 (DE-588)4234781-6 (DE-588)4209035-0 (DE-588)4148111-2 (DE-588)4038824-4 (DE-588)4181368-6 (DE-588)4235815-2 (DE-588)4113937-9 |
| title | Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung |
| title_auth | Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung |
| title_exact_search | Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung |
| title_full | Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung Thomas Scheiter |
| title_fullStr | Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung Thomas Scheiter |
| title_full_unstemmed | Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung Thomas Scheiter |
| title_short | Integration mikromechanischer Sensoren in einer CMOS-BiCMOS-Prozeßumgebung |
| title_sort | integration mikromechanischer sensoren in einer cmos bicmos prozeßumgebung |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Mikromechanik (DE-588)4205811-9 gnd VLSI (DE-588)4117388-0 gnd BICMOS (DE-588)4234781-6 gnd Kapazitiver Sensor (DE-588)4209035-0 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Sensor (DE-588)4038824-4 gnd Siliciumbauelement (DE-588)4181368-6 gnd Integrierter Sensor (DE-588)4235815-2 gnd |
| topic_facet | Halbleitertechnologie Mikromechanik VLSI BICMOS Kapazitiver Sensor CMOS-Schaltung Sensor Siliciumbauelement Integrierter Sensor Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007298710&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT scheiterthomas integrationmikromechanischersensorenineinercmosbicmosprozeßumgebung |