Proceedings of the Workshop on Refractory Metal Silicides for VLSI II: 14 - 17 May 1984, San Juan Bautista, California
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York
American Inst. of Physics
1984
|
| Schriftenreihe: | Journal of vacuum science & technology / B
2,4 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. e. Zeitschr.-Bandes |
| Beschreibung: | S. 693 - 784 graph. Darst. |
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| 245 | 1 | 0 | |a Proceedings of the Workshop on Refractory Metal Silicides for VLSI II |b 14 - 17 May 1984, San Juan Bautista, California |c special ed. for the proceedings: Michael D. Strathman |
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Datensatz im Suchindex
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| author_sort | Workshop on Refractory Metal Silicides for VLSI San Juan Bautista, Calif |
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| id | DE-604.BV010803178 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:59:09Z |
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| physical | S. 693 - 784 graph. Darst. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology / B |
| spelling | Workshop on Refractory Metal Silicides for VLSI 2 1984 San Juan Bautista, Calif. Verfasser (DE-588)1500183-0 aut Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 - 17 May 1984, San Juan Bautista, California special ed. for the proceedings: Michael D. Strathman New York American Inst. of Physics 1984 S. 693 - 784 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 2,4 Einzelaufn. e. Zeitschr.-Bandes VLSI (DE-588)4117388-0 gnd rswk-swf Silicide (DE-588)4268288-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1984 San Juan Bautista Calif. gnd-content Silicide (DE-588)4268288-5 s VLSI (DE-588)4117388-0 s DE-604 Strathman, Michael D. Sonstige oth |
| spellingShingle | Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 - 17 May 1984, San Juan Bautista, California VLSI (DE-588)4117388-0 gnd Silicide (DE-588)4268288-5 gnd |
| subject_GND | (DE-588)4117388-0 (DE-588)4268288-5 (DE-588)1071861417 |
| title | Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 - 17 May 1984, San Juan Bautista, California |
| title_auth | Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 - 17 May 1984, San Juan Bautista, California |
| title_exact_search | Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 - 17 May 1984, San Juan Bautista, California |
| title_full | Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 - 17 May 1984, San Juan Bautista, California special ed. for the proceedings: Michael D. Strathman |
| title_fullStr | Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 - 17 May 1984, San Juan Bautista, California special ed. for the proceedings: Michael D. Strathman |
| title_full_unstemmed | Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 - 17 May 1984, San Juan Bautista, California special ed. for the proceedings: Michael D. Strathman |
| title_short | Proceedings of the Workshop on Refractory Metal Silicides for VLSI II |
| title_sort | proceedings of the workshop on refractory metal silicides for vlsi ii 14 17 may 1984 san juan bautista california |
| title_sub | 14 - 17 May 1984, San Juan Bautista, California |
| topic | VLSI (DE-588)4117388-0 gnd Silicide (DE-588)4268288-5 gnd |
| topic_facet | VLSI Silicide Konferenzschrift 1984 San Juan Bautista Calif. |
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