Electron beam, X-ray, and ion beam lithographies VI: 5 - 6 March 1987 Santa Clara, Calif.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE, The Internat. Soc. for Optical Engineering
1987
|
| Schriftenreihe: | International Society for Optical Engineering: Proceedings of SPIE
773 |
| Schlagworte: | |
| Beschreibung: | VI, 265 S.: Ill., graph. Darst. |
| ISBN: | 0892528087 |
Internformat
MARC
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| 245 | 1 | 0 | |a Electron beam, X-ray, and ion beam lithographies VI |b 5 - 6 March 1987 Santa Clara, Calif. |c Phillip D. Blais, chair/ed. |
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| 264 | 1 | |a Bellingham, Wash. |b SPIE, The Internat. Soc. for Optical Engineering |c 1987 | |
| 300 | |a VI, 265 S.: Ill., graph. Darst. | ||
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| 490 | 1 | |a International Society for Optical Engineering: Proceedings of SPIE |v 773 | |
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| 650 | 4 | |a Lithography, Electron beam |v Congresses | |
| 650 | 4 | |a Microlithography |v Congresses | |
| 650 | 4 | |a X-ray lithography |v Congresses | |
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Datensatz im Suchindex
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| genre | (DE-588)1071861417 Konferenzschrift 1987 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 1987 Santa Clara Calif. |
| id | DE-604.BV010738696 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T17:58:03Z |
| institution | BVB |
| isbn | 0892528087 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007170184 |
| oclc_num | 506773759 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | VI, 265 S.: Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | SPIE, The Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | International Society for Optical Engineering: Proceedings of SPIE |
| series2 | International Society for Optical Engineering: Proceedings of SPIE |
| spelling | Electron beam, X-ray, and ion beam lithographies VI 5 - 6 March 1987 Santa Clara, Calif. Phillip D. Blais, chair/ed. Electron-beam, X-ray, and ion-beam lithographies VI Bellingham, Wash. SPIE, The Internat. Soc. for Optical Engineering 1987 VI, 265 S.: Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier International Society for Optical Engineering: Proceedings of SPIE 773 Ion beam lithography Congresses Lithography, Electron beam Congresses Microlithography Congresses X-ray lithography Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 Santa Clara Calif. gnd-content Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Blais, Phillip D. Sonstige oth International Society for Optical Engineering: Proceedings of SPIE 773 (DE-604)BV000010887 773 |
| spellingShingle | Electron beam, X-ray, and ion beam lithographies VI 5 - 6 March 1987 Santa Clara, Calif. International Society for Optical Engineering: Proceedings of SPIE Ion beam lithography Congresses Lithography, Electron beam Congresses Microlithography Congresses X-ray lithography Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4174516-4 (DE-588)1071861417 |
| title | Electron beam, X-ray, and ion beam lithographies VI 5 - 6 March 1987 Santa Clara, Calif. |
| title_alt | Electron-beam, X-ray, and ion-beam lithographies VI |
| title_auth | Electron beam, X-ray, and ion beam lithographies VI 5 - 6 March 1987 Santa Clara, Calif. |
| title_exact_search | Electron beam, X-ray, and ion beam lithographies VI 5 - 6 March 1987 Santa Clara, Calif. |
| title_full | Electron beam, X-ray, and ion beam lithographies VI 5 - 6 March 1987 Santa Clara, Calif. Phillip D. Blais, chair/ed. |
| title_fullStr | Electron beam, X-ray, and ion beam lithographies VI 5 - 6 March 1987 Santa Clara, Calif. Phillip D. Blais, chair/ed. |
| title_full_unstemmed | Electron beam, X-ray, and ion beam lithographies VI 5 - 6 March 1987 Santa Clara, Calif. Phillip D. Blais, chair/ed. |
| title_short | Electron beam, X-ray, and ion beam lithographies VI |
| title_sort | electron beam x ray and ion beam lithographies vi 5 6 march 1987 santa clara calif |
| title_sub | 5 - 6 March 1987 Santa Clara, Calif. |
| topic | Ion beam lithography Congresses Lithography, Electron beam Congresses Microlithography Congresses X-ray lithography Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Ion beam lithography Congresses Lithography, Electron beam Congresses Microlithography Congresses X-ray lithography Congresses Fotolithografie Halbleitertechnologie Konferenzschrift 1987 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
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