Plasma etching for integrated silicon sensor applictions:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Delft
Univ. Press
1995
|
| Schlagworte: | |
| Beschreibung: | Zugl.: Delft, Techn. Univ., Diss., 1995 |
| Beschreibung: | XI, 221 S. Ill., graph. Darst. |
| ISBN: | 9040711771 |
Internformat
MARC
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| 003 | DE-604 | ||
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| 007 | t | ||
| 008 | 960412s1995 ad|| m||| 00||| engod | ||
| 020 | |a 9040711771 |9 90-407-1177-1 | ||
| 035 | |a (OCoLC)34556198 | ||
| 035 | |a (DE-599)BVBBV010706131 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
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| 050 | 0 | |a TK7874 | |
| 084 | |a ELT 285d |2 stub | ||
| 100 | 1 | |a Li, Yuan Xiong |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Plasma etching for integrated silicon sensor applictions |c door Yuan Xiong Li |
| 264 | 1 | |a Delft |b Univ. Press |c 1995 | |
| 300 | |a XI, 221 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Zugl.: Delft, Techn. Univ., Diss., 1995 | ||
| 650 | 4 | |a Detectors | |
| 650 | 4 | |a Plasma etching | |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasmaätzen |0 (DE-588)4174821-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Integrierter Sensor |0 (DE-588)4235815-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Integrierter Sensor |0 (DE-588)4235815-2 |D s |
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| 689 | 0 | 2 | |a Plasmaätzen |0 (DE-588)4174821-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-007147053 | ||
Datensatz im Suchindex
| _version_ | 1804125184309854208 |
|---|---|
| any_adam_object | |
| author | Li, Yuan Xiong |
| author_facet | Li, Yuan Xiong |
| author_role | aut |
| author_sort | Li, Yuan Xiong |
| author_variant | y x l yx yxl |
| building | Verbundindex |
| bvnumber | BV010706131 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_tum | ELT 285d |
| ctrlnum | (OCoLC)34556198 (DE-599)BVBBV010706131 |
| discipline | Elektrotechnik |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV010706131 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:57:31Z |
| institution | BVB |
| isbn | 9040711771 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007147053 |
| oclc_num | 34556198 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | XI, 221 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Univ. Press |
| record_format | marc |
| spelling | Li, Yuan Xiong Verfasser aut Plasma etching for integrated silicon sensor applictions door Yuan Xiong Li Delft Univ. Press 1995 XI, 221 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zugl.: Delft, Techn. Univ., Diss., 1995 Detectors Plasma etching Silicium (DE-588)4077445-4 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Integrierter Sensor (DE-588)4235815-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Integrierter Sensor (DE-588)4235815-2 s Silicium (DE-588)4077445-4 s Plasmaätzen (DE-588)4174821-9 s DE-604 |
| spellingShingle | Li, Yuan Xiong Plasma etching for integrated silicon sensor applictions Detectors Plasma etching Silicium (DE-588)4077445-4 gnd Plasmaätzen (DE-588)4174821-9 gnd Integrierter Sensor (DE-588)4235815-2 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4174821-9 (DE-588)4235815-2 (DE-588)4113937-9 |
| title | Plasma etching for integrated silicon sensor applictions |
| title_auth | Plasma etching for integrated silicon sensor applictions |
| title_exact_search | Plasma etching for integrated silicon sensor applictions |
| title_full | Plasma etching for integrated silicon sensor applictions door Yuan Xiong Li |
| title_fullStr | Plasma etching for integrated silicon sensor applictions door Yuan Xiong Li |
| title_full_unstemmed | Plasma etching for integrated silicon sensor applictions door Yuan Xiong Li |
| title_short | Plasma etching for integrated silicon sensor applictions |
| title_sort | plasma etching for integrated silicon sensor applictions |
| topic | Detectors Plasma etching Silicium (DE-588)4077445-4 gnd Plasmaätzen (DE-588)4174821-9 gnd Integrierter Sensor (DE-588)4235815-2 gnd |
| topic_facet | Detectors Plasma etching Silicium Plasmaätzen Integrierter Sensor Hochschulschrift |
| work_keys_str_mv | AT liyuanxiong plasmaetchingforintegratedsiliconsensorapplictions |