Molecular beam epitaxy: fundamentals and current status
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | German |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1996
|
| Ausgabe: | 2., rev. and updated ed. |
| Schriftenreihe: | Springer series in materials science
7 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XIV, 453 S. Ill., graph. Darst. |
| ISBN: | 3540605940 |
Internformat
MARC
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| 245 | 1 | 0 | |a Molecular beam epitaxy |b fundamentals and current status |c M. A. Herman ; H. Sitter |
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Datensatz im Suchindex
| _version_ | 1804125173889105920 |
|---|---|
| adam_text | M. A. HERMAN H. SITTER MOLECULAR BEAM EPITAXY FUNDAMENTALS AND CURRENT
STATUS SECOND, REVISED AND UPDATED EDITION WITH 260 FIGURES, 25 IN
COLOUR *GP SPRINGER CONTENTS BACKGROUND INFORMATION 1. INTRODUCTION 1
1.1 THIN FILM GROWTH FROM BEAMS IN A HIGH VACUUM ENVIRONMENT 2 1.1.1
VACUUM CONDITIONS FOR MBE 3 1.1.2 BASIC PHYSICAL PROCESSES IN THE MBE
VACUUM CHAMBER . 6 1.2 EVOLUTION OF THE MBE TECHNIQUE 13 1.2.1 EARLY
STAGES OF MBE 14 1.2.2 MBE IN THE 1980S 16 1.2.3 MBE IN THE 1990S 17 1.3
MODIFICATIONS OF THE MBE TECHNIQUE 20 1.3.1 GAS SOURCE MBE 21 1.3.2
MODULATED-BEAMS MBE 23 1.3.3 FIBI-MBE PROCESSING TECHNOLOGY 29 1.3.4
GUIDE TO THE MBE LITERATURE 31 TECHNOLOGICAL EQUIPMENT 2. SOURCES OF
ATOMIC AND MOLECULAR BEAMS 33 2.1 EFFUSION PROCESS AND THE IDEAL
EFFUSION CELL 34 2.1.1 LANGMUIR AND KNUDSEN MODES OF EVAPORATION 35
2.1.2 COSINE LAW OF EFFUSION 36 2.2 EFFUSION FROM REAL EFFUSION CELLS 39
2.2.1 NEAR-IDEAL CYLINDRICAL EFFUSION CELL 39 2.2.2 CYLINDRICAL CHANNEL
EFFUSION CELL 47 2.2.3 HOT-WALL BEAM CYLINDRICAL SOURCE 49 2.2.4 CONICAL
EFFUSION CELL 53 2.3 EFFUSION CELLS USED IN SOLID SOURCE MBE SYSTEMS 59
2.3.1 CONVENTIONAL EFFUSION CELLS 59 2.3.2 DISSOCIATION (CRACKER)
EFFUSION CELLS 64 2.3.3 ELECTRON BEAM AND LASER RADIATION HEATED SOURCES
. . 68 2.4 BEAM SOURCES USED IN GS MBE SYSTEMS 75 2.4.1 ARSINE AND
PHOSPHINE GAS SOURCE CRACKERS 75 2.4.2 GAS SOURCES USED IN MO MBE 78 ~.
XII CONTENTS 3. HIGH-VACUUM GROWTH AND PROCESSING SYSTEMS 81 3.1
BUILDING BLOCKS OF MODULAR MBE SYSTEMS 85 3.1.1 CASSETTE ENTRY STAGE 85
3.1.2 INTERSTAGE SUBSTRATE TRANSFER SYSTEM 87 3.1.3 PREPARATION AND
ANALYSIS STAGES 89 3.1.4 MBE DEPOSITION CHAMBER 96 3.1.5 BEAM SOURCES
101 3.1.6 MONITORING AND ANALYTICAL FACILITIES 111 3.2 MULTIPLE-GROWTH
AND MULTIPLE-PROCESS FACILITIES IN MBE SYSTEMS 123 3.2.1 HOT-WALL BEAM
EPITAXY GROWTH SYSTEM 123 3.2.2 FOCUSED ION BEAM TECHNOLOGY 128
CHARACTERIZATION METHODS 4. CHARACTERIZATION TECHNIQUES 135 4.1 RHEED
136 4.1.1 FUNDAMENTALS OF ELECTRON DIFFRACTION 137 4.1.2 ORIGIN OF RHEED
FEATURES 145 4.1.3 RHEED DATA FROM RECONSTRUCTED SEMICONDUCTOR SURFACES
150 4.1.4 RHEED ROCKING CURVES 154 4.1.5 RHEED INTENSITY OSCILLATIONS
157 4.1.6 MICROPROBE RHEED 163 4.2 OPTICAL CHARACTERIZATION TECHNIQUES
167 4.2.1 ELLIPSOMETRY 168 4.2.2 REFLECTANCE-DIFFERENCE SPECTROSCOPY 177
4.2.3 LASER INTERFEROMETRY 180 4.3 POSTGROWTH CHARACTERIZATION METHODS
183 4.3.1 AUGER ELECTRON SPECTROSCOPY 184 4.3.2 X-RAY DIFFRACTION 191
4.3.3 PHOTOLUMINESCENCE 204 4.3.4 ELECTRICAL CHARACTERIZATION 209 4.3.5
SCANNING PROBE MICROSCOPY 215 4.3.6 SOPHISTICATED CHARACTERIZATION
METHODS 220 MBE GROWTH PROCESS 5. MBE GROWTH PROCESSES OF
LATTICE-MATCHED STRUCTURES . . . 229 5.1 GENERAL VIEW OF THE MBE GROWTH
PROCESS 229 5.1.1 EQUILIBRIUM STATES IN MBE 231 5.1.2 RELATIONS BETWEEN
SUBSTRATE AND EPILAYER 232 5.2 GROWTH MECHANISMS IN LATTICE-MATCHED MBE
245 CONTENTS XIII 5.2.1 GROWTH ON NOMINALLY-ORIENTED SUBSTRATES 247
5.2.2 GROWTH ON VICINAL SURFACES 250 5.2.3 GROWTH INTERRUPTION EFFECTS
256 5.3 MODULATED BEAMS GROWTH TECHNIQUES 260 5.3.1 UHV ATOMIC LAYER
EPITAXY 260 5.3.2 MIGRATION ENHANCED EPITAXY 265 5.3.3 MOLECULAR LAYER
EPITAXY 267 5.3.4 MISCELLANY ON MODULATED BEAMS GROWTH TECHNIQUES . .
272 5.4 DOPING DURING MBE PROCESSES 274 5.4.1 UNINTENTIONAL DOPING 274
5.4.2 THERMODYNAMICS OF DOPING BY CO-DEPOSITION 277 5.4.3
DELTA-FUNCTION-LIKE DOPING PROFILES 281 5.4.4 IN-GROWTH DOPING WITH
IONIZED BEAMS 284 GROWTH PROCESSES IN STRAINED-LAYER MBE 289 6.1
CRITICAL THICKNESS 289 6.1.1 THEORETICAL TREATMENT 290 6.1.2 MBE-RELATED
EXPERIMENTAL DATA 294 6.2 SURFACE KINETIC EFFECTS 301 6.2.1 IDEA OF
SURFACTANTS 301 6.2.2 MBE GROWTH WITH SURFACTANTS 304 6.2.3
SELF-ORGANIZATION EFFECTS 309 6.3 MULTILAYER STRUCTURES AS BUFFERS 319
6.3.1 STRAINED-LAYER SUPERLATTICES 320 6.3.2 DIGITAL ALLOY COMPOSITION
GRADING TECHNIQUE 322 MATERIAL-RELATED GROWTH CHARACTERISTICS IN MBE 327
7.1 SI AND IV-IV HETEROSTRUCTURES 327 7.1.1 SI SUBSTRATE PREPARATION
PROCEDURES 328 7.1.2 MBE GROWTH OF SI FILMS 329 7.1.3 HETEROEPITAXY OF
GE AND SN ON SI SUBSTRATES 335 7.1.4 GE X SII_ X /SI HETEROSTRUCTURES
AND SUPERLATTICES 338 7.1.5 DEVICES GROWN BY SI MBE 342 7.2 GAAS- AND
AS-CONTAINING COMPOUNDS 348 7.2.1 PREPARATION OF THE GAAS(100) SUBSTRATE
SURFACE 349 7.2.2 GROWTH OF GAAS ON GAAS(100) SUBSTRATES 352 7.2.3
GROWTH OF AL X GAI_ X AS/GAAS HETEROSTRUCTURES 355 7.2.4 GROWTH OF GAAS
ON SI SUBSTRATES 359 7.2.5 DEVICE STRUCTURES GROWN BY GAAS MBE 365 7.3
NARROW-GAP II-VI COMPOUNDS CONTAINING HG 371 7.3.1 SUBSTRATES FOR MBE OF
HG COMPOUNDS 372 7.3.2 HG-COMPOUND HETEROSTRUCTURES GROWN BY MBE 375
7.3.3 DEVICE STRUCTURES 378 XIV CONTENTS CONCLUSION 8. OUTLOOK 381 8.1
MISCELLANEOUS MATERIAL SYSTEMS GROWN BY MBE 381 8.2 MBE-RELATED GROWTH
TECHNIQUES 388 8.3 DEVELOPMENT TRENDS OF THE MBE TECHNIQUE 392 8.4
FURTHER READINGS ON MBE FUNDAMENTALS 394 8.4.1 GROWTH PHENOMENA 394
8.4.2 LAYERED STRUCTURES OF DIFFERENT MATERIAL SYSTEMS 396 REFERENCES
399 SUBJECT INDEX 449
|
| any_adam_object | 1 |
| author | Herman, Marian A. 1936-2015 Sitter, Helmut |
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| author_facet | Herman, Marian A. 1936-2015 Sitter, Helmut |
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| bvnumber | BV010696174 |
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| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2., rev. and updated ed. |
| format | Book |
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| id | DE-604.BV010696174 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:57:21Z |
| institution | BVB |
| isbn | 3540605940 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007139645 |
| oclc_num | 845139089 |
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| owner_facet | DE-355 DE-BY-UBR DE-384 DE-91 DE-BY-TUM DE-703 DE-29T DE-20 DE-91G DE-BY-TUM DE-522 DE-83 DE-11 |
| physical | XIV, 453 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in materials science |
| series2 | Springer series in materials science |
| spelling | Herman, Marian A. 1936-2015 Verfasser (DE-588)111000203 aut Molecular beam epitaxy fundamentals and current status M. A. Herman ; H. Sitter 2., rev. and updated ed. Berlin [u.a.] Springer 1996 XIV, 453 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in materials science 7 Molekularstrahlepitaxie (DE-588)4170399-6 gnd rswk-swf Molekularstrahlepitaxie (DE-588)4170399-6 s DE-604 Sitter, Helmut Verfasser aut Springer series in materials science 7 (DE-604)BV000683335 7 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007139645&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Herman, Marian A. 1936-2015 Sitter, Helmut Molecular beam epitaxy fundamentals and current status Springer series in materials science Molekularstrahlepitaxie (DE-588)4170399-6 gnd |
| subject_GND | (DE-588)4170399-6 |
| title | Molecular beam epitaxy fundamentals and current status |
| title_auth | Molecular beam epitaxy fundamentals and current status |
| title_exact_search | Molecular beam epitaxy fundamentals and current status |
| title_full | Molecular beam epitaxy fundamentals and current status M. A. Herman ; H. Sitter |
| title_fullStr | Molecular beam epitaxy fundamentals and current status M. A. Herman ; H. Sitter |
| title_full_unstemmed | Molecular beam epitaxy fundamentals and current status M. A. Herman ; H. Sitter |
| title_short | Molecular beam epitaxy |
| title_sort | molecular beam epitaxy fundamentals and current status |
| title_sub | fundamentals and current status |
| topic | Molekularstrahlepitaxie (DE-588)4170399-6 gnd |
| topic_facet | Molekularstrahlepitaxie |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007139645&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000683335 |
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