Ion implantation technology: proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988
Gespeichert in:
Format: | Tagungsbericht Buch |
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Sprache: | Undetermined |
Veröffentlicht: |
Amsterdam
North-Holland
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Schriftenreihe: | Nuclear instruments & methods in physics research / B
37/38 |
Schlagworte: | |
Beschreibung: | Einzelaufn. von Zs.-Heften |
Internformat
MARC
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Datensatz im Suchindex
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spelling | Ion implantation technology proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 conference chairman: T. Takagi Amsterdam North-Holland txt rdacontent n rdamedia nc rdacarrier Nuclear instruments & methods in physics research / B 37/38 Einzelaufn. von Zs.-Heften Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Kioto gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Takagi, Toshinori Sonstige oth International Conference on Ion Implantation Technology 7 1988 Kyōto Sonstige (DE-588)5003509-5 oth |
spellingShingle | Ion implantation technology proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 Ionenimplantation (DE-588)4027606-5 gnd |
subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
title | Ion implantation technology proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 |
title_auth | Ion implantation technology proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 |
title_exact_search | Ion implantation technology proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 |
title_full | Ion implantation technology proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 conference chairman: T. Takagi |
title_fullStr | Ion implantation technology proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 conference chairman: T. Takagi |
title_full_unstemmed | Ion implantation technology proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 conference chairman: T. Takagi |
title_short | Ion implantation technology |
title_sort | ion implantation technology proceedings of the seventh international conference on ion implantation technology kyoto japan june 7 10 1988 |
title_sub | proceedings of the seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7 - 10, 1988 |
topic | Ionenimplantation (DE-588)4027606-5 gnd |
topic_facet | Ionenimplantation Konferenzschrift 1988 Kioto |
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