International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. (1996). Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina. American Inst. of Physics.
Chicago-Zitierstil (17. Ausg.)International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina. New York: American Inst. of Physics, 1996.
MLA-Zitierstil (9. Ausg.)International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC. Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina. American Inst. of Physics, 1996.