Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors: 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York
American Inst. of Physics
1996
|
| Schriftenreihe: | Journal of vacuum sciene & technology / B
14,1 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme zu e. Zeitschr.-Bd. |
| Beschreibung: | S. 191 - 462 Ill., graph. Darst. |
Internformat
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| 111 | 2 | |a International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors |n 3 |d 1995 |c Research Triangle Park, NC |j Verfasser |0 (DE-588)5169301-X |4 aut | |
| 245 | 1 | 0 | |a Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |b 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |c proceedings ed.: James Ehrstein |
| 264 | 1 | |a New York |b American Inst. of Physics |c 1996 | |
| 300 | |a S. 191 - 462 |b Ill., graph. Darst. | ||
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| 490 | 0 | |a Journal of vacuum sciene & technology / B |v 14,1 | |
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1995 |z Research Triangle Park NC |2 gnd-content | |
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| 700 | 1 | |a Ehrstein, James |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| author_sort | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors Research Triangle Park, NC |
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| id | DE-604.BV010676183 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:57:02Z |
| institution | BVB |
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| physical | S. 191 - 462 Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum sciene & technology / B |
| spelling | International Workshop on the Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors 3 1995 Research Triangle Park, NC Verfasser (DE-588)5169301-X aut Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings ed.: James Ehrstein New York American Inst. of Physics 1996 S. 191 - 462 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum sciene & technology / B 14,1 Einzelaufnahme zu e. Zeitschr.-Bd. Dotierung (DE-588)4130672-7 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Research Triangle Park NC gnd-content Halbleiter (DE-588)4022993-2 s Dotierung (DE-588)4130672-7 s DE-604 Ehrstein, James Sonstige oth |
| spellingShingle | Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina Dotierung (DE-588)4130672-7 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4130672-7 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_auth | Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_exact_search | Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| title_full | Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings ed.: James Ehrstein |
| title_fullStr | Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings ed.: James Ehrstein |
| title_full_unstemmed | Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina proceedings ed.: James Ehrstein |
| title_short | Papers from the Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors |
| title_sort | papers from the third international workshop on the measurement and characterization of ultra shallow doping profiles in semiconductors 20 22 march 1995 mcnc center for microelectronics research triangle park north carolina |
| title_sub | 20 - 22 March 1995, MCNC, Center for Microelectronics, Research Triangle Park, North Carolina |
| topic | Dotierung (DE-588)4130672-7 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Dotierung Halbleiter Konferenzschrift 1995 Research Triangle Park NC |
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