Introduction to VLSI process engineering:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English Japanese |
| Veröffentlicht: |
London
Chapman & Hall
1993
|
| Ausgabe: | English language ed. |
| Schlagworte: | |
| Beschreibung: | Aus dem Japan. übers. |
| Beschreibung: | XIII, 210 S. graph. Darst. |
| ISBN: | 0412395509 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV010574235 | ||
| 003 | DE-604 | ||
| 005 | 20021122 | ||
| 007 | t | ||
| 008 | 960119s1993 d||| |||| 00||| eng d | ||
| 020 | |a 0412395509 |9 0-412-39550-9 | ||
| 035 | |a (OCoLC)27434850 | ||
| 035 | |a (DE-599)BVBBV010574235 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 1 | |a eng |h jpn | |
| 049 | |a DE-Aug4 |a DE-91 | ||
| 050 | 0 | |a TK7874 | |
| 082 | 0 | |a 621.39/5 |2 20 | |
| 084 | |a ZN 4950 |0 (DE-625)157424: |2 rvk | ||
| 084 | |a ELT 270f |2 stub | ||
| 245 | 1 | 0 | |a Introduction to VLSI process engineering |c ed. by the Society of Chemical Engineers of Japan |
| 250 | |a English language ed. | ||
| 264 | 1 | |a London |b Chapman & Hall |c 1993 | |
| 300 | |a XIII, 210 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Aus dem Japan. übers. | ||
| 650 | 4 | |a Integrated circuits |x Very large scale integration |x Design and construction | |
| 650 | 4 | |a Manufacturing processes | |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-007049024 | ||
Datensatz im Suchindex
| _version_ | 1804125042911477760 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV010574235 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4950 |
| classification_tum | ELT 270f |
| ctrlnum | (OCoLC)27434850 (DE-599)BVBBV010574235 |
| dewey-full | 621.39/5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.39/5 |
| dewey-search | 621.39/5 |
| dewey-sort | 3621.39 15 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | English language ed. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01168nam a2200373 c 4500</leader><controlfield tag="001">BV010574235</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20021122 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">960119s1993 d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0412395509</subfield><subfield code="9">0-412-39550-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)27434850</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV010574235</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="1" ind2=" "><subfield code="a">eng</subfield><subfield code="h">jpn</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-91</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7874</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.39/5</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4950</subfield><subfield code="0">(DE-625)157424:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 270f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Introduction to VLSI process engineering</subfield><subfield code="c">ed. by the Society of Chemical Engineers of Japan</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">English language ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">London</subfield><subfield code="b">Chapman & Hall</subfield><subfield code="c">1993</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIII, 210 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Aus dem Japan. übers.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Very large scale integration</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Manufacturing processes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-007049024</subfield></datafield></record></collection> |
| id | DE-604.BV010574235 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:55:16Z |
| institution | BVB |
| isbn | 0412395509 |
| language | English Japanese |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007049024 |
| oclc_num | 27434850 |
| open_access_boolean | |
| owner | DE-Aug4 DE-91 DE-BY-TUM |
| owner_facet | DE-Aug4 DE-91 DE-BY-TUM |
| physical | XIII, 210 S. graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Chapman & Hall |
| record_format | marc |
| spelling | Introduction to VLSI process engineering ed. by the Society of Chemical Engineers of Japan English language ed. London Chapman & Hall 1993 XIII, 210 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Aus dem Japan. übers. Integrated circuits Very large scale integration Design and construction Manufacturing processes VLSI (DE-588)4117388-0 gnd rswk-swf VLSI (DE-588)4117388-0 s DE-604 |
| spellingShingle | Introduction to VLSI process engineering Integrated circuits Very large scale integration Design and construction Manufacturing processes VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4117388-0 |
| title | Introduction to VLSI process engineering |
| title_auth | Introduction to VLSI process engineering |
| title_exact_search | Introduction to VLSI process engineering |
| title_full | Introduction to VLSI process engineering ed. by the Society of Chemical Engineers of Japan |
| title_fullStr | Introduction to VLSI process engineering ed. by the Society of Chemical Engineers of Japan |
| title_full_unstemmed | Introduction to VLSI process engineering ed. by the Society of Chemical Engineers of Japan |
| title_short | Introduction to VLSI process engineering |
| title_sort | introduction to vlsi process engineering |
| topic | Integrated circuits Very large scale integration Design and construction Manufacturing processes VLSI (DE-588)4117388-0 gnd |
| topic_facet | Integrated circuits Very large scale integration Design and construction Manufacturing processes VLSI |