Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1995
|
| Schriftenreihe: | Journal of vacuum science & technology / B
13,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zs.-Heftes |
| Beschreibung: | S. 2307 - 3123 graph. Darst. |
Internformat
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| 111 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 39 |d 1995 |c Scottsdale, Ariz. |j Verfasser |0 (DE-588)5165726-0 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona |c special ed. for the proceedings: Dieter Kern |
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| genre_facet | Konferenzschrift 1995 Scottsdale Ariz. |
| id | DE-604.BV010570837 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:55:12Z |
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| language | English |
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| physical | S. 2307 - 3123 graph. Darst. |
| publishDate | 1995 |
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| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology / B |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 39 1995 Scottsdale, Ariz. Verfasser (DE-588)5165726-0 aut Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona special ed. for the proceedings: Dieter Kern New York American Inst. of Physics 1995 S. 2307 - 3123 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 13,6 Einzelaufnahme eines Zs.-Heftes Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Scottsdale Ariz. gnd-content Teilchenstrahl (DE-588)4165339-7 s DE-604 Kern, Dieter Sonstige oth |
| spellingShingle | Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona Teilchenstrahl (DE-588)4165339-7 gnd |
| subject_GND | (DE-588)4165339-7 (DE-588)1071861417 |
| title | Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona |
| title_auth | Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona |
| title_exact_search | Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona |
| title_full | Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona special ed. for the proceedings: Dieter Kern |
| title_fullStr | Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona special ed. for the proceedings: Dieter Kern |
| title_full_unstemmed | Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona special ed. for the proceedings: Dieter Kern |
| title_short | Papers from the 39th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 39th international conference on electron ion and photon beam technology and nanofabrication 30 may 2 june 1995 scottsdale conference resort scottsdale arizona |
| title_sub | 30 May - 2 June 1995, Scottsdale Conference Resort, Scottsdale, Arizona |
| topic | Teilchenstrahl (DE-588)4165339-7 gnd |
| topic_facet | Teilchenstrahl Konferenzschrift 1995 Scottsdale Ariz. |
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