Principles of plasma discharges and materials processing:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
Wiley
1994
|
| Schriftenreihe: | A Wiley-Interscience publication
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XXVI, 572 S. Ill., graph. Darst. |
| ISBN: | 0471005770 |
Internformat
MARC
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| 100 | 1 | |a Lieberman, Michael A. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Principles of plasma discharges and materials processing |c Michael A. Lieberman ; Allan J. Lichtenberg |
| 264 | 1 | |a New York [u.a.] |b Wiley |c 1994 | |
| 300 | |a XXVI, 572 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-007028078 | ||
Datensatz im Suchindex
| _version_ | 1804125012380090368 |
|---|---|
| adam_text | Vi CONTENTS
2 3 The Conservation Equations / 31
Boltzmann’s Equation / 31
Macroscopic Quantities / 32
Particle Conservation / 33
Momentum Conservation / 34
Energy Conservation / 36
Summary / 37
2 4 Equilibrium Properties / 37
Boltzmann’s Relation / 39
Debye Length / 40
Quasineutrality / 42
3 ATOMIC COLLISIONS
3 1 Basic’Concepts / 45
Elastic and Inelastic Collisions / 45
Collision Parameters / 46
Differential Scattering Cross Section / 48
3 2 Collision Dynamics / 51
Center-of-Mass Coordinates / 51
Energy Transfer / 54
Small-Angle Scattering / 55
3 3 Elastic Scattering / 57
Coulomb Collisions / 57
Polarization Scattering / 60
3 4 Inelastic Collisions / 64
Atomic Energy Levels / 64
Electric Dipole Radiation and Metastable Atoms / 68
Electron Ionization Cross Section / 71
Electron Excitation Cross Section / 72
Ion-Atom Charge Transfer / 73
Ion-Atom Ionization / 77
3 5 Averaging Over Distributions and Surface Effects / 77
Averaging Over a Maxwellian Distribution / 77
Energy Loss per Electron-Ion Pair Created / 81
Surface Effects / 82
4 PLASMA DYNAMICS
4 1 Basic Motions / 85
Motion in Constant Fields / 85
|
| any_adam_object | 1 |
| author | Lieberman, Michael A. Lichtenberg, Allan J. |
| author_facet | Lieberman, Michael A. Lichtenberg, Allan J. |
| author_role | aut aut |
| author_sort | Lieberman, Michael A. |
| author_variant | m a l ma mal a j l aj ajl |
| building | Verbundindex |
| bvnumber | BV010544844 |
| classification_rvk | UR 8000 |
| classification_tum | FER 786f PHY 570f ELT 279f |
| ctrlnum | (OCoLC)832195174 (DE-599)BVBBV010544844 |
| dewey-full | 530.44 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.44 |
| dewey-search | 530.44 |
| dewey-sort | 3530.44 |
| dewey-tens | 530 - Physics |
| discipline | Physik Elektrotechnik Fertigungstechnik |
| format | Book |
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| id | DE-604.BV010544844 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:54:47Z |
| institution | BVB |
| isbn | 0471005770 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007028078 |
| oclc_num | 832195174 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-703 DE-29T DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-703 DE-29T DE-83 |
| physical | XXVI, 572 S. Ill., graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Wiley |
| record_format | marc |
| series2 | A Wiley-Interscience publication |
| spelling | Lieberman, Michael A. Verfasser aut Principles of plasma discharges and materials processing Michael A. Lieberman ; Allan J. Lichtenberg New York [u.a.] Wiley 1994 XXVI, 572 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier A Wiley-Interscience publication Niederdruckplasma (DE-588)4274388-6 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Festkörperoberfläche (DE-588)4127823-9 gnd rswk-swf Plasmadynamik (DE-588)4123952-0 gnd rswk-swf Plasmadynamik (DE-588)4123952-0 s Festkörperoberfläche (DE-588)4127823-9 s Dünne Schicht (DE-588)4136925-7 s DE-604 Niederdruckplasma (DE-588)4274388-6 s Dünnschichttechnik (DE-588)4136339-5 s Lichtenberg, Allan J. Verfasser aut HEBIS Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007028078&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Lieberman, Michael A. Lichtenberg, Allan J. Principles of plasma discharges and materials processing Niederdruckplasma (DE-588)4274388-6 gnd Dünne Schicht (DE-588)4136925-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Festkörperoberfläche (DE-588)4127823-9 gnd Plasmadynamik (DE-588)4123952-0 gnd |
| subject_GND | (DE-588)4274388-6 (DE-588)4136925-7 (DE-588)4136339-5 (DE-588)4127823-9 (DE-588)4123952-0 |
| title | Principles of plasma discharges and materials processing |
| title_auth | Principles of plasma discharges and materials processing |
| title_exact_search | Principles of plasma discharges and materials processing |
| title_full | Principles of plasma discharges and materials processing Michael A. Lieberman ; Allan J. Lichtenberg |
| title_fullStr | Principles of plasma discharges and materials processing Michael A. Lieberman ; Allan J. Lichtenberg |
| title_full_unstemmed | Principles of plasma discharges and materials processing Michael A. Lieberman ; Allan J. Lichtenberg |
| title_short | Principles of plasma discharges and materials processing |
| title_sort | principles of plasma discharges and materials processing |
| topic | Niederdruckplasma (DE-588)4274388-6 gnd Dünne Schicht (DE-588)4136925-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Festkörperoberfläche (DE-588)4127823-9 gnd Plasmadynamik (DE-588)4123952-0 gnd |
| topic_facet | Niederdruckplasma Dünne Schicht Dünnschichttechnik Festkörperoberfläche Plasmadynamik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=007028078&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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