Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium:
Saved in:
| Main Author: | |
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| Format: | Book |
| Language: | German |
| Published: |
1995
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| Subjects: | |
| Item Description: | München, Univ. der Bundeswehr, Diss., 1995 |
| Physical Description: | 4, 124 S. Ill., graph. Darst. |
Staff View
MARC
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Record in the Search Index
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| any_adam_object | |
| author | Keimel, Josef |
| author_facet | Keimel, Josef |
| author_role | aut |
| author_sort | Keimel, Josef |
| author_variant | j k jk |
| building | Verbundindex |
| bvnumber | BV010423787 |
| classification_tum | PHY 606d PHY 696d |
| ctrlnum | (OCoLC)75654597 (DE-599)BVBBV010423787 |
| discipline | Physik |
| format | Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV010423787 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:52:17Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006944651 |
| oclc_num | 75654597 |
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| physical | 4, 124 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| record_format | marc |
| spelling | Keimel, Josef Verfasser aut Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium von Josef Keimel 1995 4, 124 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier München, Univ. der Bundeswehr, Diss., 1995 Deltadotierung (DE-588)4290571-0 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Röntgenstrukturanalyse (DE-588)4137203-7 gnd rswk-swf Röntgenstrahlung (DE-588)4129728-3 gnd rswk-swf Tiefenprofilmessung (DE-588)4185422-6 gnd rswk-swf Vergrabene Schicht (DE-588)4271267-1 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Deltadotierung (DE-588)4290571-0 s Tiefenprofilmessung (DE-588)4185422-6 s Röntgenstrahlung (DE-588)4129728-3 s DE-604 Vergrabene Schicht (DE-588)4271267-1 s Röntgenstrukturanalyse (DE-588)4137203-7 s |
| spellingShingle | Keimel, Josef Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium Deltadotierung (DE-588)4290571-0 gnd Silicium (DE-588)4077445-4 gnd Röntgenstrukturanalyse (DE-588)4137203-7 gnd Röntgenstrahlung (DE-588)4129728-3 gnd Tiefenprofilmessung (DE-588)4185422-6 gnd Vergrabene Schicht (DE-588)4271267-1 gnd |
| subject_GND | (DE-588)4290571-0 (DE-588)4077445-4 (DE-588)4137203-7 (DE-588)4129728-3 (DE-588)4185422-6 (DE-588)4271267-1 (DE-588)4113937-9 |
| title | Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium |
| title_auth | Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium |
| title_exact_search | Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium |
| title_full | Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium von Josef Keimel |
| title_fullStr | Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium von Josef Keimel |
| title_full_unstemmed | Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium von Josef Keimel |
| title_short | Tiefenaufgelöste Röntgenuntersuchungen an epitaktischen Nanometer-Schichten in Silizium |
| title_sort | tiefenaufgeloste rontgenuntersuchungen an epitaktischen nanometer schichten in silizium |
| topic | Deltadotierung (DE-588)4290571-0 gnd Silicium (DE-588)4077445-4 gnd Röntgenstrukturanalyse (DE-588)4137203-7 gnd Röntgenstrahlung (DE-588)4129728-3 gnd Tiefenprofilmessung (DE-588)4185422-6 gnd Vergrabene Schicht (DE-588)4271267-1 gnd |
| topic_facet | Deltadotierung Silicium Röntgenstrukturanalyse Röntgenstrahlung Tiefenprofilmessung Vergrabene Schicht Hochschulschrift |
| work_keys_str_mv | AT keimeljosef tiefenaufgelosterontgenuntersuchungenanepitaktischennanometerschichteninsilizium |