Gettering and defect engineering in semiconductor technology: proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Aedermannsdorf
Sci-Tech Publ.
1996
|
| Schriftenreihe: | Diffusion and defect data
Pt. B, Solid state phenomena ; 47/48 |
| Schlagworte: | |
| Beschreibung: | XV, 621 S. Ill., graph. Darst. |
| ISBN: | 390845011X |
Internformat
MARC
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| 245 | 1 | 0 | |a Gettering and defect engineering in semiconductor technology |b proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 |c eds. H. Richter ... |
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| 490 | 1 | |a Diffusion and defect data : Pt. B, Solid state phenomena |v 47/48 | |
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Datensatz im Suchindex
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| discipline | Physik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1995 Wulkow Trebnitz gnd-content |
| genre_facet | Konferenzschrift 1995 Wulkow Trebnitz |
| id | DE-604.BV010397098 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:51:48Z |
| institution | BVB |
| institution_GND | (DE-588)5161063-2 |
| isbn | 390845011X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006924088 |
| oclc_num | 634572802 |
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| owner_facet | DE-29T DE-703 DE-706 DE-91G DE-BY-TUM |
| physical | XV, 621 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Sci-Tech Publ. |
| record_format | marc |
| series | Diffusion and defect data |
| series2 | Diffusion and defect data : Pt. B, Solid state phenomena |
| spelling | Gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 eds. H. Richter ... GADEST '95 Aedermannsdorf Sci-Tech Publ. 1996 XV, 621 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data : Pt. B, Solid state phenomena 47/48 Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Getterung (DE-588)4157223-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Wulkow Trebnitz gnd-content Getterung (DE-588)4157223-3 s Gitterbaufehler (DE-588)4125030-8 s Halbleitertechnologie (DE-588)4158814-9 s DE-604 Richter, Hans Sonstige oth GADEST 6 1995 Wulkow, Trebnitz Sonstige (DE-588)5161063-2 oth Diffusion and defect data Pt. B, Solid state phenomena ; 47/48 (DE-604)BV021637351 47/48 |
| spellingShingle | Gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 Diffusion and defect data Gitterbaufehler (DE-588)4125030-8 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Getterung (DE-588)4157223-3 gnd |
| subject_GND | (DE-588)4125030-8 (DE-588)4158814-9 (DE-588)4157223-3 (DE-588)1071861417 |
| title | Gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 |
| title_alt | GADEST '95 |
| title_auth | Gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 |
| title_exact_search | Gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 |
| title_full | Gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 eds. H. Richter ... |
| title_fullStr | Gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 eds. H. Richter ... |
| title_full_unstemmed | Gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 eds. H. Richter ... |
| title_short | Gettering and defect engineering in semiconductor technology |
| title_sort | gettering and defect engineering in semiconductor technology proceedings of the 6th autumn meeting held in parkhotel schloß wulkow near berlin germany sept 02 07 1995 |
| title_sub | proceedings of the 6th autumn meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, Sept. 02 - 07, 1995 |
| topic | Gitterbaufehler (DE-588)4125030-8 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Getterung (DE-588)4157223-3 gnd |
| topic_facet | Gitterbaufehler Halbleitertechnologie Getterung Konferenzschrift 1995 Wulkow Trebnitz |
| volume_link | (DE-604)BV021637351 |
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