Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications:
Saved in:
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
1993
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| Subjects: | |
| Item Description: | Neuchâtel, Univ., Diss., 1993 |
| Physical Description: | V, 106 S. Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV010386281 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 950918s1993 ad|| m||| 00||| eng d | ||
| 035 | |a (OCoLC)257761648 | ||
| 035 | |a (DE-599)BVBBV010386281 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T |a DE-355 | ||
| 100 | 1 | |a Linder, Christian |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |c by Christian Linder |
| 264 | 1 | |c 1993 | |
| 300 | |a V, 106 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Neuchâtel, Univ., Diss., 1993 | ||
| 650 | 0 | 7 | |a Aktor |0 (DE-588)4198914-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sensor |0 (DE-588)4038824-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Siliciumbauelement |0 (DE-588)4181368-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Siliciumbauelement |0 (DE-588)4181368-6 |D s |
| 689 | 0 | 1 | |a Sensor |0 (DE-588)4038824-4 |D s |
| 689 | 0 | 2 | |a Aktor |0 (DE-588)4198914-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Siliciumbauelement |0 (DE-588)4181368-6 |D s |
| 689 | 1 | 1 | |a Mikromechanik |0 (DE-588)4205811-9 |D s |
| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006915586 | ||
Record in the Search Index
| _version_ | 1804124811693129728 |
|---|---|
| any_adam_object | |
| author | Linder, Christian |
| author_facet | Linder, Christian |
| author_role | aut |
| author_sort | Linder, Christian |
| author_variant | c l cl |
| building | Verbundindex |
| bvnumber | BV010386281 |
| ctrlnum | (OCoLC)257761648 (DE-599)BVBBV010386281 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01389nam a2200397 c 4500</leader><controlfield tag="001">BV010386281</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">950918s1993 ad|| m||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)257761648</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV010386281</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-355</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Linder, Christian</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications</subfield><subfield code="c">by Christian Linder</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1993</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">V, 106 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Neuchâtel, Univ., Diss., 1993</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Aktor</subfield><subfield code="0">(DE-588)4198914-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sensor</subfield><subfield code="0">(DE-588)4038824-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Siliciumbauelement</subfield><subfield code="0">(DE-588)4181368-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Siliciumbauelement</subfield><subfield code="0">(DE-588)4181368-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Sensor</subfield><subfield code="0">(DE-588)4038824-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Aktor</subfield><subfield code="0">(DE-588)4198914-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Siliciumbauelement</subfield><subfield code="0">(DE-588)4181368-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-006915586</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV010386281 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:51:36Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006915586 |
| oclc_num | 257761648 |
| open_access_boolean | |
| owner | DE-29T DE-355 DE-BY-UBR |
| owner_facet | DE-29T DE-355 DE-BY-UBR |
| physical | V, 106 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| record_format | marc |
| spelling | Linder, Christian Verfasser aut Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications by Christian Linder 1993 V, 106 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Neuchâtel, Univ., Diss., 1993 Aktor (DE-588)4198914-4 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Siliciumbauelement (DE-588)4181368-6 s Sensor (DE-588)4038824-4 s Aktor (DE-588)4198914-4 s DE-604 Mikromechanik (DE-588)4205811-9 s |
| spellingShingle | Linder, Christian Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications Aktor (DE-588)4198914-4 gnd Sensor (DE-588)4038824-4 gnd Siliciumbauelement (DE-588)4181368-6 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4198914-4 (DE-588)4038824-4 (DE-588)4181368-6 (DE-588)4205811-9 (DE-588)4113937-9 |
| title | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| title_auth | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| title_exact_search | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| title_full | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications by Christian Linder |
| title_fullStr | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications by Christian Linder |
| title_full_unstemmed | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications by Christian Linder |
| title_short | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| title_sort | electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| topic | Aktor (DE-588)4198914-4 gnd Sensor (DE-588)4038824-4 gnd Siliciumbauelement (DE-588)4181368-6 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Aktor Sensor Siliciumbauelement Mikromechanik Hochschulschrift |
| work_keys_str_mv | AT linderchristian electromechanicalpolysiliconstructuresandmicromachiningprocessesforsensorandactuatorapplications |