Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
1993
|
| Schlagworte: | |
| Beschreibung: | Neuchâtel, Univ., Diss., 1993 |
| Beschreibung: | V, 106 S. Ill., graph. Darst. |
Internformat
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| 100 | 1 | |a Linder, Christian |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |c by Christian Linder |
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Datensatz im Suchindex
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| author | Linder, Christian |
| author_facet | Linder, Christian |
| author_role | aut |
| author_sort | Linder, Christian |
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| building | Verbundindex |
| bvnumber | BV010386281 |
| ctrlnum | (OCoLC)257761648 (DE-599)BVBBV010386281 |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV010386281 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:51:36Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006915586 |
| oclc_num | 257761648 |
| open_access_boolean | |
| owner | DE-29T DE-355 DE-BY-UBR |
| owner_facet | DE-29T DE-355 DE-BY-UBR |
| physical | V, 106 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| record_format | marc |
| spelling | Linder, Christian Verfasser aut Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications by Christian Linder 1993 V, 106 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Neuchâtel, Univ., Diss., 1993 Aktor (DE-588)4198914-4 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Siliciumbauelement (DE-588)4181368-6 s Sensor (DE-588)4038824-4 s Aktor (DE-588)4198914-4 s DE-604 Mikromechanik (DE-588)4205811-9 s |
| spellingShingle | Linder, Christian Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications Aktor (DE-588)4198914-4 gnd Sensor (DE-588)4038824-4 gnd Siliciumbauelement (DE-588)4181368-6 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4198914-4 (DE-588)4038824-4 (DE-588)4181368-6 (DE-588)4205811-9 (DE-588)4113937-9 |
| title | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| title_auth | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| title_exact_search | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| title_full | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications by Christian Linder |
| title_fullStr | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications by Christian Linder |
| title_full_unstemmed | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications by Christian Linder |
| title_short | Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| title_sort | electromechanical polysilicon structures and micromachining processes for sensor and actuator applications |
| topic | Aktor (DE-588)4198914-4 gnd Sensor (DE-588)4038824-4 gnd Siliciumbauelement (DE-588)4181368-6 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Aktor Sensor Siliciumbauelement Mikromechanik Hochschulschrift |
| work_keys_str_mv | AT linderchristian electromechanicalpolysiliconstructuresandmicromachiningprocessesforsensorandactuatorapplications |