APA (7th ed.) Citation

Linder, C. (1993). Electromechanical polysilicon structures and micromachining processes for sensor and actuator applications.

Chicago Style (17th ed.) Citation

Linder, Christian. Electromechanical Polysilicon Structures and Micromachining Processes for Sensor and Actuator Applications. 1993.

MLA (9th ed.) Citation

Linder, Christian. Electromechanical Polysilicon Structures and Micromachining Processes for Sensor and Actuator Applications. 1993.

Warning: These citations may not always be 100% accurate.