Advanced metallization for devices and circuits - science, technology and manufacturability: symposium held April 4 - 8, 1994, San Francisco, Calif., USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Pittsburgh, Penn.
Materials Research Soc.
1994
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
337 |
| Schlagworte: | |
| Beschreibung: | XIV, 768 S. Ill., graph. Darst. |
| ISBN: | 1558992375 |
Internformat
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Datensatz im Suchindex
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| discipline | Elektrotechnik Fertigungstechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1994 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1994 San Francisco Calif. |
| id | DE-604.BV010375843 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:51:25Z |
| institution | BVB |
| isbn | 1558992375 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006907722 |
| oclc_num | 634360632 |
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| owner_facet | DE-91G DE-BY-TUM |
| physical | XIV, 768 S. Ill., graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, Calif., USA eds. S. P. Murarka ... Pittsburgh, Penn. Materials Research Soc. 1994 XIV, 768 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 337 Metallisieren (DE-588)4169599-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1994 San Francisco Calif. gnd-content Metallisieren (DE-588)4169599-9 s DE-604 Murarka, Shyam P. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 337 (DE-604)BV001899105 337 |
| spellingShingle | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, Calif., USA Materials Research Society: Materials Research Society symposia proceedings Metallisieren (DE-588)4169599-9 gnd |
| subject_GND | (DE-588)4169599-9 (DE-588)1071861417 |
| title | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, Calif., USA |
| title_auth | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, Calif., USA |
| title_exact_search | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, Calif., USA |
| title_full | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, Calif., USA eds. S. P. Murarka ... |
| title_fullStr | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, Calif., USA eds. S. P. Murarka ... |
| title_full_unstemmed | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, Calif., USA eds. S. P. Murarka ... |
| title_short | Advanced metallization for devices and circuits - science, technology and manufacturability |
| title_sort | advanced metallization for devices and circuits science technology and manufacturability symposium held april 4 8 1994 san francisco calif usa |
| title_sub | symposium held April 4 - 8, 1994, San Francisco, Calif., USA |
| topic | Metallisieren (DE-588)4169599-9 gnd |
| topic_facet | Metallisieren Konferenzschrift 1994 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT murarkashyamp advancedmetallizationfordevicesandcircuitssciencetechnologyandmanufacturabilitysymposiumheldapril481994sanfranciscocalifusa |