Polycrystalline thin films: structure, texture, properties and applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Pittsburgh, Penn.
Materials Research Soc.
1994
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| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
343 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVII, 772 S. Ill., graph. Darst. |
| ISBN: | 155899243X |
Internformat
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| 245 | 1 | 0 | |a Polycrystalline thin films |b structure, texture, properties and applications |c eds. Katayun (Katy) Barmak ... |
| 264 | 1 | |a Pittsburgh, Penn. |b Materials Research Soc. |c 1994 | |
| 300 | |a XVII, 772 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 343 | |
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Datensatz im Suchindex
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| adam_text | Contents
PREFACE
.....................................................xv
ACKNOWLEDGMENTS
...........................................xvii
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
............... xviii
PART I: PHENOMENOLOGY OF
MICROSTRUCTURAL
EVOLUTION IN THIN FILMS
»GRAIN GROWTH IN POLYCRYSTALLINE THIN FILMS
....................... 3
Carl V. Thompson
»TOWARD REALIZING THE STRUCTURE-PROPERTY LINK
IN POLYCRYSTALLINE THIN FILMS
...................................13
C.S. Nichols
»ORIENTATION IMAGING OF THE
MICROSTRUCTURE
OF
POLYCRYSTALLINE MATERIALS
.....................................23
Brent L. Adams
»GRAIN GROWTH SUPPRESSION AND ENHANCEMENT BY
INTERDIFFUSION IN
THIN FILMS
.....................................33
Alexander H. King and Karen E. Harris
THE GEOMETRY OF GRAIN DISAPPEARANCE IN THIN
POLYCRYSTALLINE FILMS
.........................................43
S.J. Townsend and C.S. Nichols
COMPUTER SIMULATION OF STRAIN ENERGY AND SURFACE-
AND INTERFACE-ENERGY ON GRAIN GROWTH IN THIN FILMS
................49
R.
Carel,
C.V.
Thompson, and H.J. Frost
ASYMPTOTIC BEHAVIOR IN GRAIN GROWTH
............................55
David T. Wu
MASS CONSERVATION IN GRAIN GROWTH
..............................61
David T. Wu
MEAN FIELD ANALYSIS OF ORIENTATION SELECTIVE
GRAIN GROWTH DRIVEN BY INTERFACE-ENERGY ANISOTROPY
...............65
J.A.
Floro
and
C.V.
Thompson
GRAIN GROWTH KINETICS IN MICROCRYSTALLINE
MATERIALS
...................................................71
V.G.
Sursaeva
COMPUTATIONAL AND EXPERIMENTAL STUDIES OF
GRAIN GROWTH
................................................77
Tue T.
Ngo,
Reza
Ahmadi, A. Alec Talin, and R. Stanley Williams
ON THE RELATIONSHIP BETWEEN CALCULATIONS AND
MEASUREMENTS OF THE FREE VOLUME OF GRAIN BOUNDARIES
.............83
S.C. Mehta and D.A. Smith
»EVOLUTION OF CRYSTALLINE
MICROSTRUCTURE
IN GeTe
THIN FILMS FOR OPTICAL STORAGE APPLICATIONS
.......................89
M.
Libera
»Invited Paper
»EFFECTS OF POST-DEPOSITION PROCESSING ON THE
ULTIMATE GRAIN SIZE IN
METASTABILE
SEMICONDUCTOR THIN
FILMS TO BE USED IN
IR
DETECTORS
................................101
Susanne
M.
Lee
PLASMA EFFECTS ON THIN FILM
MICROSTRUCTURE
.....................113
Munir D.
Naeem, Stephen
M.
Rossnagel,
and Krishna
Rajan
A STUDY OF THE SURFACE TEXTURE OF POLYCRYSTALLINE
PHOSPHOR FILMS USING ATOMIC FORCE MICROSCOPY
....................119
R. Revay, J. Schneir, D. Brower, J. Villarrubia, J.
Fu,
J.
Cline,
T.J. Hsieh, and W. Wong-Ng
NANOCRYSTALLINE
MICROSTRUCTURES
BY THIN-FILM
SYNTHESIS METHODS
...........................................125
M.
Libera
and D.A. Smith
TEXTURE DEVELOPMENT IN THIN NICKEL OXIDE FILMS
...................131
F. Czerwinski and J.A. Szpunar
MODELLING OF THE TEXTURE FORMATION IN
ELECTRO-DEPOSITED METAL FILMS
.................................137
D.Y. Li and J.A. Szpunar
A MICROSTRUCTURAL
COMPARISON OF CuGn.GaiSe, THIN
FILMS GROWN FROM Cu^e AND (In,Ga),Se, PRECURSORS
...................143
Andrew M.
Gabor,
J.R. Tuttle,
D.S.
Albin, R.
Matson, A. Franz,
D.W.
Niles, M.A.
Contreras,
A.M. Hermann, and R. Noufi
STABILITY OF RUTHENIUM-SILICA BILAYER STRUCTURES
..................149
Zara
Weng-Sieh,
Tai
D.
Nguyen, and Ronald
Grónsky
Ag
FILMS DEPOSITED BY IONIZED CLUSTER BEAM DEPOSITION
..............155
Zhong-Min Ren, Yuan-Cheng
Du, Zhi-Feng
Ying, Xia-Xing Xiong,
Mao-Qi He, and Fu-Ming Li
MONOCRYSTALLINE AND POLYCRYSTALLINE THIN FILMS
FORMED BY COBALT ION IMPLANTATION IN THE ORGANIC
SUBSTRATE (POLYESTER)
........................................161
A.L. Stepanov, R.I. Khaibullin, S.N. Abdullin, Yu.N.
Osin,
and I.B. Khaibullin
PART II: REACTIONS, TRANSFORMATIONS,
AND DIFFUSION AT
INTERPHASE
INTERFACES
AND GRAIN BOUNDARIES
»KINETICS OF INTERFACE REACTIONS IN POLYCRYSTALLINE
THIN FILMS
..................................................169
Rüdiger Bormann
»INVESTIGATING THE ROLE OF GRAIN BOUNDARIES IN
INTERFACE REACTIONS
..........................................181
François M.
d Heurle, Patrick Gas, and
Jean Philibert
»A UNIFIED APPROACH TO GRAIN BOUNDARY DIFFUSION
AND NUCLEATION IN THIN FILM REACTIONS
..........................193
K.R. Coft ey and
K. Barmak
»Invited Paper
PHASE FORMATION AND
MICROSTRUCTURAL
DEVELOPMENT
DURING SOLID-STATE REACTIONS IN
Ti
-ΑΙ
MULTILAYER
FILMS ......................................................205
Carsten Michaelsen, Stefan Wöhlert, and Rüdiger Bormann
INTERFACE
REACTION KINETICS FOR PERMALLOY-TANTALUM
THIN FILM COUPLES
....................................... .211
A.J. Kellock, J.E.E. Baglin, K.R. Coffey, J.K. Howard,
M.A. Parker, and D.L. Neiman
GRAIN BOUNDARY DIFFUSION IN NiFe/Ag BILAYER
THIN FILMS
..................................................217
M. Gall, J.G. Pellerin,
P.S.
Ho, K.R. Coffey, and J.K. Howard
HIGH RESOLUTION STUDIES OF THE SOLID STATE AMORPHIZATION
REACTION IN THE ZrCo SYSTEM WITH THE ATOM PROBE/FIELD
ION MICROSCOPE
..............................................223
Susanne
Schneider,
Ralf Busch,
and
Konrad Samwer
THE EARLIEST STAGE OF THE SOLID STATE AMORPHIZATION
REACTION IN THE Zr-Co SYSTEM
...................................229
Ralf Busch,
Frank Gaertner,
Susanne
Schneider,
Rüdiger Bormann,
and the late Peter Haasen
ARTIFICIALLY SYNTHESIZED NON-COHERENT INTERFACES IN
Fe-Ti MULTILAYERS AND THEIR INFLUENCE ON SOLID STATE REACTIONS
......235
Z.H.
Yan, M.L.
Trudeau,
A. Van
Neste, R.
Schulz,
D.H. Ryan,
P. Tessier, R.
Bormann, and J.O. Ström-Olsen
SEGREGATION EFFECT AND ITS INFLUENCE ON GRAIN BOUNDARY
DIFFUSION IN THIN METALLIC FILMS
................................241
A.N.
Aleshin, B.S. Bokstein, V.K. Egorov, and P.V. Kurkin
LIQUID METAL PENETRATION ALONG GRAIN BOUNDARIES
.................247
V.E. Fradkov
CHEMICAL STABILITY OF REACTIVELY SPUTTERED A1N WITH
MA ENHANCED CHEMICAL V/
Jaeshin Cho and Naresh C. Saha
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITED SiO2 AND SiNx
............253
THE THERMAL STABILITY OF Ti-Al-C PVD COATINGS
.....................259
O. Knotek,
F. Löffler,
and
L.
Wolkers
MICROSTRUCTURAL DEVELOPMENT AT Ti-BASED
ALLOY/COATED SiC INTERFACES
...................................265
M.
Strangwood,
C.B. Ponton, M.P. Delplancke,
V.
Vassileris,
and R. Winand
SCANNING
X-RAY
DIFFRACTION: A TECHNIQUE
WITH HIGH
COMPOSITIONAL
RESOLUTION
FOR STUDYING PHASE FORMATION
IN CO-DEPOSITED THIN FILMS
.....................................271
T.I. Selinder, D.J. Miller, K.E. Gray, M.A.
Beno,
and G.S.
Knapp
FINE STRUCTURE OF SPUTTERED
Ni/Ti MULTILA
YERED
THIN FILMS STUDIED BY HREM
....................................277
M.J.
Casanovę,
E. Snoeck,
С
Roucau, J.L. Hutchison,
Z. Jiang, and B.
Vidal
vu
PART III: POLYCRYSTALLINE MAGNETIC THIN FILMS
III. A. GRAIN STRUCTURE, TEXTURE, AND
EPITAXY IN THIN FILM MAGNETIC MEDIA
»THE EFFECT OF
MICROSTRUCTURE ON
THE MAGNETIC PROPERTIES
OF THIN FILM MAGNETIC MEDIA
...................................285
T. Yamashita, R. Ranjan, L.H. Chan,
M. Lu,
CA.
Ross,
J. Chang, and G. Tarnopolsky
CORRELATION OF STRUCTURE AND PROPERTIES IN THIN-FILM
MAGNETIC MEDIA
.............................................297
T.P. Nolan, R. Sinclair, R. Ranjan, T. Yamashita, G. Tarnopolsky,
and W. Bennett
THE EFFECTS OF CROSS HATCH ANGLE
(CHA)
ON MAGNETIC
PROPERTIES AND READ/WRITE CHARACTERISTICS OF CoCrPtTaB
THIN FILM MEDIA
..............................................303
Ga-Lane Chen, H. Do, T.-A. Yeh, J.M. Sivertsen, and J.H. Judy
THE
MICROSTRUCTURE
OF SPUTTERED Co-Cr MAGNETIC
RECORDING MEDIA
.............................................309
Astrid Pundt, Ralf Busch,
and
Carsten Michaelsen
STRESS,
MICROSTRUCTURE
AND MAGNETIC PROPERTIES OF THIN
SPUTTERED Co ALLOY FILMS
......................................315
C.A. Ross, R. Ranjan, and J. Chang
EFFECTS OF
MICROSTRUCTURE
AND CRYSTALLOGRAPHY ON
THE MAGNETIC PROPERTIES OF CoCrPt/Cr THIN FILMS
....................321
G. Choe and S.J. Chung
»EPITAXY AND CRYSTALLOGRAPHIC TEXTURE OF THIN FILMS
FOR MAGNETIC RECORDING
......................................327
David E. Laughlin, Y.C. Feng, Li-Lien Lee, and B. Wong
ROLE OF THE EPITAXY RELATIONS IN THE CoCrPt THIN FILMS
WITH BILAYER V/Cr UNDERLAYERS
.................................339
Pawel
Glijer, John M. Sivertsen, and Jack H. Judy
EFFECTS OF SUBSTRATE TEMPERATURE ON MAGNETIC AND
CRYSTALLOGRAPHIC PROPERTIES OF Co-Cr-Pt/Cr FILMS
DEPOSITED BY LASER ABLATION
...................................345
Aleira Ishikawa,
Yoshihiro Shiroishi, and Robert Sinclair
HCP-FCC PHASE TRANSITION IN Co-Ni ALLOYS STUDIED
WITH MAGNETO-OPTICAL KERR SPECTROSCOPY
........................351
A. Carl, D.
Weiler,
R.
Savoy, and
B. Hillebrands
III. B.
GRAIN STRUCTURE, TEXTURE, AND
EPITAXY IN MAGNETIC MULTILAYERS
»ATOMICALLY LAYERED STRUCTURES FOR PERPENDICULAR
MAGNETIC INFORMATION STORAGE
.................................359
Bruce M. Lairson, M.R. Visokay, R. Sinclair, S.M. Brennan,
B.M. Clemens, J. Perez, and C. Baldwin
ON THE PERPENDICULAR MAGNETIC ANISOTROPY OF Pt/Co
MULTILAYERS: STRUCTURE-PROPERTY RELATIONSHIPS
..................369
G.A. Bertero and R. Sinclair
»Invited Paper
VIII
MICROSTRUCTURE AND CHEMICAL
ORDERING IN UHV-DEPOSITED,
POLYCRYSTALLINE CoxPt,_x ALLOY FILMS FOR MAGNETO-OPTICAL
RECORDING
..................................................375
R.F.C.
Farrow, D.
Weiler,
M.F.
Toney, T.A. Rabedeau, J.E. Hurst,
G.R. Harp, R.F. Marks, R.H. Geiss, and H. Notarys
EFFECT OF INTERLAYERS UPON TEXTURE AND MAGNETIC PROPERTIES
IN Co ALLOY MULTILAYER FILMS FOR LONGITUDINAL MAGNETIC
RECORDING
..................................................381
M.R. Visokay, M. Kuwabara, H.
Saffari,
H. Hayashi,
R.
Sinclair, and Y. Onishi
MAGNETIC AND MAGNETO-OPTICAL PROPERTIES OF SPUTTER-
DEPOSITED AND ANNEALED Co-Pt ALLOYS
............................387
Sung-Eon Park,
Pu-
Young Jung, Ki-Bum Kim, Seh-Kwang Lee,
and Soon-Gwang Kim
MAGNETIC X-RAY CIRCULAR DICHROISM IN Fe Co Pt MULTILAYERS
..........393
J.G.
Tobin,
A.F.
Jankowski,
G.D.
Waddill,
and
P.A. Sterne
GMR,
STRUCTURAL, AND MAGNETIC STUDIES IN
NiFeCo/Ag
MULTILAYER THIN
FILMS ........................................399
J.D.
Jarratt
and J.A. Barnard
GIANT
MAGNETORESISTANCE IN
AS-SPUTTER-DEPOSITED Au/NiFe
MULTILAYER THIN FILMS
........................................405
W.Y. Lee, G. Gorman, and R. Savoy
GIANT
MAGNETORESISTANCE
STUDIES OF NiFe-BASED SPIN-VALVE
MULTILAYERS
................................................411
Chien-Li Lin, John M. Sivertsen, and Jack H. Judy
TEXTURE AND GRAIN SIZE OF PERMALLOY THIN FILMS
SPUTTERED ON SILICON WITH Cr,
Ta
AND SiO, BUFFER LAYERS
.............417
P. Galtier, R. Jerome, and T. Valet
EFFECT OF ION IRRADIATION ON THE ARTIFICIAL STRUCTURE
AND THE INTERLAYER COUPLING OF COPPER-COBALT MULTILAYERS
.........423
J-F.
Bobo,
E.
Snoeck,
M.
Piecuch,
and
M-J.
Casanovę
PART IV: POLYCRYSTALLINE DIELECTRIC
AND RELATED THIN FILMS
»INTERFACES IN FERROELECTRIC METAL OXIDE HETEROSTRUCTURES
.........431
R. Ramesh, J. Lee, V.G. Keramidas, D.K. Fork, S. Ghonge,
E. Goo, and O. Auciello
CHARACTERIZATION OF SOL-GEL DERIVED (Pb,Ba)(Zr,Ti,Nb)O3
THIN FILMS FOR OPTICAL WAVEGUIDE DEVELOPMENT
...................445
P.F.
Baude,
J.S. Wright,
С
Ye, L.F. Francis, and D.L.
Polla
TEXTURE VARIATIONS IN SOL-GEL DERIVED PZT FILMS
ON SUBSTRATES WITH PLATINUM METALLIZATION
......................451
J.G.E. Gardeniers, M. Elwenspoek, and C. Cobianu
GROWTH AND CHARACTERIZATION OF Ba05Sr05TiO, THIN FILMS
ON Si
(100)
BY
90°
OFF-AXIS SPUTTERING
.............................457
S.Y.
Hou,
J. Kwo, R.K. Watts, D.J.
Werder,
J. Shmulovich,
and H.M. O Bryan
»Invited Paper
THIN FILMS OF SrFeO, ..-EFFECT OF PREFERRED ORIENTATION
ON OXYGEN UPTAKE
...........................................463
Brian W. Sanders, Jianhua Yao, and Michael L. Post
MICRORAMAN STUDY OF PbTiO, THIN FILM PREPARED
BY SOL-GEL TECHNIQUE
.........................................469
E. Ching-Prado,
A. Reynés-Figueroa,
R.
S. Katiyar,
S.B.
Majumder, and
D.C. Agrawal
PULSED LASER DEPOSITION OF Bi.TLO,, THIN FILMS ON
INDIUM TIN OXIDE COATED GLASS
.................................475
Н
-J.
Cho, William Jo, and
T.W. Noh
THE EFFECT OF LAYER THICKNESS ON POLYCRYSTALLINE
ZIRCONIA GROWTH IN ZIRCONIA-ALUMINA MULTILAYER
NANOLAMINATES
..............................................481
CM. Scanlan, M.D. Wiggins, M. Gajdardziska-Josifovska,
and C.R.
Aita
TEXTURE AND PHASES IN OXIDE FILMS ON Zr-Nb ALLOYS
.................487
Y.P. Lin, O.T. Woo, and
DJ. Lockwood
PREPARATION OF PZT THIN FILMS BY ECR PECVD
.......................493
J.W. Kim, S.T. Kim,
S.W.
Chung, J.S. Shin, K.S. No,
D.M.
Wee,
and W.J. Lee
PREPARATION AND PROPERTY CHARACTERIZATION OF ORIENTED
PLZT THIN FILMS PROCESSED USING SOL-GEL METHOD
...................499
Dae Sung Yoon, Chang Jung
Kim, Joon
Sung Lee, Chaun Gi Choi,
Won Jong Lee, and Kwangsoo No
IMPROVED SURFACE ROUGHNESS AT POLY-OXIDE/POLY-Si
INTERFACE BY A NOVEL OXIDATION METHOD
.........................505
M.C. Jun,
J.W. Kim, K.B. Kim, B.C.
Ahn,
and M.K. Han
RuO, THIN FILMS AS BOTTOM ELECTRODES FOR HIGH
DIELECTRIC CONSTANT MATERIALS
.................................511
K. Yoshikawa, T. Kimura, H. Noshiro, S.
Ontani,
M.
Yamada, and Y.
Furumura
GROWTH OF ROCK-SALT AND SPINEL STRUCTURED OXIDES
ON
a-ALĄ, c-ZrO-,
AND MgO
.......................................517
Sundar
Ramámurthy,
Paul G.
Kotula,
and C. Barry Carter
LOW TEMPERATURE ATMOSPHERIC PRESSURE CHEMICAL
VAPOR DEPOSITION OF GROUP
14
OXIDE FILMS
.........................523
David M. Hoffman, Lauren M. Atagi, Wei-Kan
Chu, Jia-Rui
Liu,
Zongshuang Zheng,
Rodrigo
R.
Rubiano, Robert W. Springer,
and David C. Smith
ATOMIC FORCE MICROSCOPY STUDY OF NICKEL OXIDE FILMS
MODIFIED BY REACTIVE ELEMENT
..................................529
F. Czerwinski and J.A. Szpunar
THE
MICROSTRUCTURAL
CHARACTERIZATION OF NANOCRYSTALLINE
CeO, CERAMICS PRODUCED BY THE SOL-GEL METHOD
....................535
F. Czerwinski and J.A. Szpunar
LOW DIELECTRIC CONSTANT, HIGH TEMPERATURE STABLE
COPOLYMER THIN FILMS BY ROOM TEMPERATURE CHEMICAL
VAPOR DEPOSITION
............................................541
Justin F. Gaynor and Seshu B.
Desu
PART V: MECHANICS AND MECHANICAL
PROPERTIES OF POLVCRYSTALLINE THIN FILMS
ENHANCED MECHANICAL HARDNESS IN COMPOSITIONALLY
MODULATED Fe/Pt AND Fe/Cr EPITAXIAL THIN FILMS
.....................549
B.J. Daniels, W.D. Nix, and B.M. Clemens
INTERFACIAL
STRUCTURE AND MECHANICAL PROPERTIES OF
COMPOSITIONALLY-MODULATED Au-Ni THIN FILMS
......................555
Shefford P. Baker, James A. Bain, Bruce M. Clemens, and William D. Nix
CALCULATION OF THE [IHJ-TEXTURE DEPENDENCE OF THE
ELASTIC BIAXIAL MODULUS
......................................561
Martha K. Small and William D. Nix
ELASTIC PROPERTIES OF FeNi/Cu AND FeNi/Nb METALLIC
SUPERLATTICES INVESTIGATED BY BRILLOUIN LIGHT SCATTERING
...........567
G. Carlotti, G. Socino,
Hua
Xia, An Hu, and
S.S.
Jiang
INTERNAL STRESS CHANGE OF PHOSPHORUS-DOPED AMORPHOUS
SILICON THIN FILMS DURING CRYSTALLIZATION
........................573
Hideo Miura and Asao Nishimura
INTRINSIC STRESS AND
MICROSTRUCTURAL
EVOLUTION IN
SPUTTERED NANOMETER SINGLE AND MULTILAYERED FILMS
..............579
Tai
D.
Nguyen
MICROSTRUCTURE-STRESS-PROPERTY RELATIONSHIPS IN
NANOMETER Ge/C MULTILAYERS
...................................585
Xiang
Lu,
Tai
D.
Nguyen, and James H. Underwood
THE EFFECT OF INCIDENT KINETIC ENERGY ON STRESS
IN SPUTTER-DEPOSITED REFRACTORY-METAL THIN FILMS
.................591
T.J.
Vink,
J.
В.
A.D.
van
Zon,
J.
CS.
Kools, and
W.
Walrave
MICRO-MECHANICAL CHARACTERIZATION OF TANTALUM NITRIDE
THIN FILMS ON SAPPHIRE SUBSTRATES
...............................597
Shankar K. Venkataraman, John C. Nelson, Neville R. Moody,
David L. Kohlstedt, and William W.
Gerberich
THE EFFECTS OF HIGH TEMPERATURE EXPOSURE ON THE
FRACTURE OF THIN TANTALUM NITRIDE FILMS
........................603
N.R. Moody, S.K. Venkataraman, J.C. Nelson, W. Worobey,
and
W.W. Gerberich
RAMAN CHARACTERIZATION OF POLYCRYSTALLINE SILICON:
STRESS PROFILE MEASUREMENTS
..................................609
M.S. Benrakkad, A. Perez-Rodriguez, T. Jahwari, J. Samitier,
J.M. Lopez-Villegas, and J.R.
Morante
MEASUREMENT OF THERMALLY-INDUCED STRAINS IN
POLYCRYSTALLINE
Ai
THIN FILMS ON Si USING CONVERGENT
BEAM ELECTRON DIFFRACTION
....................................615
S.K. Streiffer, S.
Bader,
С.
Deininger,
J.
Mayer, and M.
Rutile
TRIBOLOGICAL PROPERTIES OF LASER DEPOSITED SiC COATINGS
............621
T. Zehnder, A. Blatter, J. Burger,
С
Julia-Schmutz,
and
R.
Christoph
PART VI: POLYCRYSTALLINE METALLIZATION
»POLYCRYSTALLINE COMMUNICATION LINKS: MICROELECTRONIC
CHIP INTERCONNECTS
...........................................629
Timothy D. Sullivan
»EFFECTS OF CRYSTALLOGRAPHIC ORIENTATION ON FILM
MORPHOLOGICAL EVOLUTION
.....................................641
John E. Sanchez, Jr.
LOCAL TEXTURE AND ELECTROMIGRATION IN FINE LINE
MICROELECTRONIC ALUMINUM METALLIZATION
.......................653
J.L.
Hurd,
K.P. Rodbell, D.B.
Knorr,
and
N.
L. Koligman
MECHANICAL BEHAVIOR OF SINGLE CRYSTAL
Al
(111) AND
BICRYSTAL
Al
(110)
FILMS ON SILICON SUBSTRATES
......................659
Paul R.
Besser,
John E. Sanchez, Jr., S. Brennan,
John C. Bravman, G. Takaoka, and I. Yamada
CHARACTERIZATION OF TEXTURED ALUMINUM LINES AND
MODELLING OF STRESS VOIDING
...................................665
S.C. Wardle, B.L. Adams, C.S. Nichols, and D.A. Smith
PART
VII:
POLYCRYSTALLINE SEMICONDUCTOR FILMS
NUCLEAT1ON AND GROWTH OF POLYCRYSTALLINE SILICON FILMS
IN AN ULTRA HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR
DEPOSITION REACTOR USING
DISILĄNE
AND HYDROGEN
..................673
Katherine
E. Violette,
Mehmet
С.
Öztürk,
Gari
Harris, Mahesh
К.
Sanganeria,
Archie Lee, and Dennis
M.
Mäher
FABRICATION OF POLYCRYSTALLINE Si, Ge FILMS ON OXIDE
FOR THIN-FILM TRANSISTORS
.....................................679
Julie A. Tsai, Andrew J. Tang, and Rafael
Reif
DOPANT IMPLANTATION AND ACTIVATION IN POLYCRYSTALLINE-SiGe
........685
W.J. Edwards, Yuen-Shung Chieh, Samuel Lin, D.G.
Ast,
J.
P. Krusius, and T.I.
Kamins
POLYCRYSTALLINE SILICON LAYERS FOR SHALLOW JUNCTION FORMATION:
PHOSPHORUS DIFFUSION FROM IN SITU SPIKE-DOPED CHEMICAL
VAPOR DEPOSITED AMORPHOUS SILICON
.............................691
D.
Krüger,
J.
Schlote,
W.
Röpke,
R.
Kurps, and Ch. Quick
CRYSTALLIZATION OF HYDROGENATED AMORPHOUS SILICON THICK
FILMS ON MOLYBDENUM SUBSTRATES
...............................697
Nagarajan Sridhar, D.D.L. Chung, W.A. Anderson, and J. Coleman
PULSE-TO-PULSE LASER STABILITY EFFECTS ON MULTIPLE SHOT
EXCIMER LASER CRYSTALLIZED
а
-Si
THIN FILMS
........................703
R.I. Johnson, G.B. Anderson, J.B. Boyce, D.K. Fork, P.
Mei,
and S.E. Ready
CHARACTERIZATION OF THE SUBSTRATE INTERFACE OF EXCIMER
LASER CRYSTALLIZED POLYCRYSTALLINE SILICON THIN FILMS
.............709
G.B. Anderson, J.B. Boyce, D.K. Fork, R.I. Johnson,
P.
Mei,
and S.E. Ready
CHARACTERIZATION OF SPUTTERED Ge FILM
..........................715
Jaeshin Cho and
N.
David Theodore
*Invited Paper
KRD
TEXTURE
AND MORPHOLOGY ANALYSIS OF POLYCRYSTALLINE
LPCVD GERMANIUM-SILICON
......................................721
Cora
Salm, Jos G.E. Klappe,
Jisk Holleman, Jan Bart
Rem,
and Pierre H. Woerlee
ENERGIES AND ATOMIC STRUCTURES OF GRAIN BOUNDARIES IN
SILICON: COMPARISON BETWEEN TILT AND TWIST BOUNDARIES
............727
M. Kohyama, R. Yamamoto, and Y. Watanabe
PIEZORESISTIVE PROPERTIES OF BORON-DOPED PECVD MICRO- AND
POLYCRYSTALLINE SILICON FILMS
..................................733
M. Le
Berre,
M. Lemiti, D. Barbier, P. Pinard, J.
Cali,
E.
Bustarret,
J.-C.
Bruyère, J. Sicart,
and J.L.
Robert
PART
VIII:
POLYCRYSTALLINE
NITRIDE FILMS
MICROSTRUCTURES
OF CHEMICAL-VAPOUR-DEPOSITED TiN FILMS
...........741
Noboru Yoshikawa and Atsushi Kikuchi
PULSED LASER DEPOSITION OF NbNx
(Oá x
£ 1.4)
THIN FILMS
................747
Randolph E. Treece, James S. Horwitz, and Douglas B. Chrisey
POLYCRYSTALLINE GRAIN STRUCTURE OF SPUTTERED
ALUMINUM NITRIDE FILMS
.......................................753
Asher T. MaLsuda, H. Ming Liaw, Wayne A. Cronin, Harland G. Tompkins,
Peter L.
Fejes,
and Keenan L. Evans
EVOLUTION OF THE PROPERTIES OF REACTIVELY SPUTTERED
ZIRCONIUM NITRIDES ON SILICON SUBSTRATES
.........................759
Pierre
Vanden
Brande, Stephane Lucas, Rene Winand, Lucien Renard,
and Alain Weymeersch
AUTHOR
INDEX ...............................................765
SUBJECT
INDEX ...............................................769
XIII
|
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| genre_facet | Konferenzschrift 1994 San Francisco Calif. |
| id | DE-604.BV010375834 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:51:25Z |
| institution | BVB |
| isbn | 155899243X |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006907714 |
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| publishDate | 1994 |
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| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Polycrystalline thin films structure, texture, properties and applications eds. Katayun (Katy) Barmak ... Pittsburgh, Penn. Materials Research Soc. 1994 XVII, 772 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 343 Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Polykristall (DE-588)4188261-1 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1994 San Francisco Calif. gnd-content Dünne Schicht (DE-588)4136925-7 s Polykristall (DE-588)4188261-1 s DE-604 Barmak, Katayun Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 343 (DE-604)BV001899105 343 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006907714&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Polycrystalline thin films structure, texture, properties and applications Materials Research Society: Materials Research Society symposia proceedings Dünne Schicht (DE-588)4136925-7 gnd Polykristall (DE-588)4188261-1 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4188261-1 (DE-588)1071861417 |
| title | Polycrystalline thin films structure, texture, properties and applications |
| title_auth | Polycrystalline thin films structure, texture, properties and applications |
| title_exact_search | Polycrystalline thin films structure, texture, properties and applications |
| title_full | Polycrystalline thin films structure, texture, properties and applications eds. Katayun (Katy) Barmak ... |
| title_fullStr | Polycrystalline thin films structure, texture, properties and applications eds. Katayun (Katy) Barmak ... |
| title_full_unstemmed | Polycrystalline thin films structure, texture, properties and applications eds. Katayun (Katy) Barmak ... |
| title_short | Polycrystalline thin films |
| title_sort | polycrystalline thin films structure texture properties and applications |
| title_sub | structure, texture, properties and applications |
| topic | Dünne Schicht (DE-588)4136925-7 gnd Polykristall (DE-588)4188261-1 gnd |
| topic_facet | Dünne Schicht Polykristall Konferenzschrift 1994 San Francisco Calif. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006907714&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001899105 |
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