Materials science in microelectronics: the relationships between thin film processing and structure
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Croton-on-Hudson, NY
Giro Press
1995
|
| Edition: | 1. print. |
| Subjects: | |
| Physical Description: | XI, 228 S. Ill., graph. Darst. |
| ISBN: | 187885707X |
Staff View
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Record in the Search Index
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|---|---|
| any_adam_object | |
| author | Machlin, Eugene S. |
| author_facet | Machlin, Eugene S. |
| author_role | aut |
| author_sort | Machlin, Eugene S. |
| author_variant | e s m es esm |
| building | Verbundindex |
| bvnumber | BV010366438 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.15.F5 |
| callnumber-search | TK7871.15.F5 |
| callnumber-sort | TK 47871.15 F5 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 7500 |
| ctrlnum | (OCoLC)477232374 (DE-599)BVBBV010366438 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. print. |
| format | Book |
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| id | DE-604.BV010366438 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:51:15Z |
| institution | BVB |
| isbn | 187885707X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006900962 |
| oclc_num | 477232374 |
| open_access_boolean | |
| owner | DE-384 DE-83 |
| owner_facet | DE-384 DE-83 |
| physical | XI, 228 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Giro Press |
| record_format | marc |
| spelling | Machlin, Eugene S. Verfasser aut Materials science in microelectronics the relationships between thin film processing and structure E. S. Machlin 1. print. Croton-on-Hudson, NY Giro Press 1995 XI, 228 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microelectronics Thin films Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s DE-604 |
| spellingShingle | Machlin, Eugene S. Materials science in microelectronics the relationships between thin film processing and structure Microelectronics Thin films Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4136925-7 |
| title | Materials science in microelectronics the relationships between thin film processing and structure |
| title_auth | Materials science in microelectronics the relationships between thin film processing and structure |
| title_exact_search | Materials science in microelectronics the relationships between thin film processing and structure |
| title_full | Materials science in microelectronics the relationships between thin film processing and structure E. S. Machlin |
| title_fullStr | Materials science in microelectronics the relationships between thin film processing and structure E. S. Machlin |
| title_full_unstemmed | Materials science in microelectronics the relationships between thin film processing and structure E. S. Machlin |
| title_short | Materials science in microelectronics |
| title_sort | materials science in microelectronics the relationships between thin film processing and structure |
| title_sub | the relationships between thin film processing and structure |
| topic | Microelectronics Thin films Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Microelectronics Thin films Dünne Schicht |
| work_keys_str_mv | AT machlineugenes materialsscienceinmicroelectronicstherelationshipsbetweenthinfilmprocessingandstructure |