Materials science in microelectronics: the relationships between thin film processing and structure
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Croton-on-Hudson, NY
Giro Press
1995
|
| Ausgabe: | 1. print. |
| Schlagworte: | |
| Beschreibung: | XI, 228 S. Ill., graph. Darst. |
| ISBN: | 187885707X |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV010366438 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 950904s1995 ad|| |||| 00||| eng d | ||
| 020 | |a 187885707X |9 1-878857-07-X | ||
| 035 | |a (OCoLC)477232374 | ||
| 035 | |a (DE-599)BVBBV010366438 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 |a DE-83 | ||
| 050 | 0 | |a TK7871.15.F5 | |
| 082 | 0 | |a 621.38152 |2 19 | |
| 084 | |a UP 7500 |0 (DE-625)146433: |2 rvk | ||
| 100 | 1 | |a Machlin, Eugene S. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Materials science in microelectronics |b the relationships between thin film processing and structure |c E. S. Machlin |
| 250 | |a 1. print. | ||
| 264 | 1 | |a Croton-on-Hudson, NY |b Giro Press |c 1995 | |
| 300 | |a XI, 228 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Microelectronics | |
| 650 | 4 | |a Thin films | |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-006900962 | ||
Datensatz im Suchindex
| _version_ | 1804124789698199552 |
|---|---|
| any_adam_object | |
| author | Machlin, Eugene S. |
| author_facet | Machlin, Eugene S. |
| author_role | aut |
| author_sort | Machlin, Eugene S. |
| author_variant | e s m es esm |
| building | Verbundindex |
| bvnumber | BV010366438 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.15.F5 |
| callnumber-search | TK7871.15.F5 |
| callnumber-sort | TK 47871.15 F5 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 7500 |
| ctrlnum | (OCoLC)477232374 (DE-599)BVBBV010366438 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. print. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01126nam a2200361 c 4500</leader><controlfield tag="001">BV010366438</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">950904s1995 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">187885707X</subfield><subfield code="9">1-878857-07-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)477232374</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV010366438</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.15.F5</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.38152</subfield><subfield code="2">19</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7500</subfield><subfield code="0">(DE-625)146433:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Machlin, Eugene S.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Materials science in microelectronics</subfield><subfield code="b">the relationships between thin film processing and structure</subfield><subfield code="c">E. S. Machlin</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. print.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Croton-on-Hudson, NY</subfield><subfield code="b">Giro Press</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 228 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-006900962</subfield></datafield></record></collection> |
| id | DE-604.BV010366438 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:51:15Z |
| institution | BVB |
| isbn | 187885707X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006900962 |
| oclc_num | 477232374 |
| open_access_boolean | |
| owner | DE-384 DE-83 |
| owner_facet | DE-384 DE-83 |
| physical | XI, 228 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Giro Press |
| record_format | marc |
| spelling | Machlin, Eugene S. Verfasser aut Materials science in microelectronics the relationships between thin film processing and structure E. S. Machlin 1. print. Croton-on-Hudson, NY Giro Press 1995 XI, 228 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microelectronics Thin films Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s DE-604 |
| spellingShingle | Machlin, Eugene S. Materials science in microelectronics the relationships between thin film processing and structure Microelectronics Thin films Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4136925-7 |
| title | Materials science in microelectronics the relationships between thin film processing and structure |
| title_auth | Materials science in microelectronics the relationships between thin film processing and structure |
| title_exact_search | Materials science in microelectronics the relationships between thin film processing and structure |
| title_full | Materials science in microelectronics the relationships between thin film processing and structure E. S. Machlin |
| title_fullStr | Materials science in microelectronics the relationships between thin film processing and structure E. S. Machlin |
| title_full_unstemmed | Materials science in microelectronics the relationships between thin film processing and structure E. S. Machlin |
| title_short | Materials science in microelectronics |
| title_sort | materials science in microelectronics the relationships between thin film processing and structure |
| title_sub | the relationships between thin film processing and structure |
| topic | Microelectronics Thin films Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Microelectronics Thin films Dünne Schicht |
| work_keys_str_mv | AT machlineugenes materialsscienceinmicroelectronicstherelationshipsbetweenthinfilmprocessingandstructure |